JP2013251262A5 - - Google Patents

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Publication number
JP2013251262A5
JP2013251262A5 JP2013112191A JP2013112191A JP2013251262A5 JP 2013251262 A5 JP2013251262 A5 JP 2013251262A5 JP 2013112191 A JP2013112191 A JP 2013112191A JP 2013112191 A JP2013112191 A JP 2013112191A JP 2013251262 A5 JP2013251262 A5 JP 2013251262A5
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JP
Japan
Prior art keywords
scanning electron
electron microscope
inspection
chamber
inspection object
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JP2013112191A
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English (en)
Japanese (ja)
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JP2013251262A (ja
JP6288951B2 (ja
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Priority claimed from KR1020120057468A external-priority patent/KR101914231B1/ko
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Publication of JP2013251262A5 publication Critical patent/JP2013251262A5/ja
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JP2013112191A 2012-05-30 2013-05-28 走査電子顕微鏡を利用した検査システム Active JP6288951B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020120057468A KR101914231B1 (ko) 2012-05-30 2012-05-30 주사 전자 현미경을 이용한 검사 시스템
KR10-2012-0057468 2012-05-30

Publications (3)

Publication Number Publication Date
JP2013251262A JP2013251262A (ja) 2013-12-12
JP2013251262A5 true JP2013251262A5 (enExample) 2016-07-07
JP6288951B2 JP6288951B2 (ja) 2018-03-07

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JP2013112191A Active JP6288951B2 (ja) 2012-05-30 2013-05-28 走査電子顕微鏡を利用した検査システム

Country Status (6)

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US (1) US8890067B2 (enExample)
EP (1) EP2669927A3 (enExample)
JP (1) JP6288951B2 (enExample)
KR (1) KR101914231B1 (enExample)
CN (1) CN103454295B (enExample)
TW (1) TWI597757B (enExample)

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US11114489B2 (en) 2018-06-18 2021-09-07 Kla-Tencor Corporation Back-illuminated sensor and a method of manufacturing a sensor
US10943760B2 (en) 2018-10-12 2021-03-09 Kla Corporation Electron gun and electron microscope
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