JP6288951B2 - 走査電子顕微鏡を利用した検査システム - Google Patents

走査電子顕微鏡を利用した検査システム Download PDF

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Publication number
JP6288951B2
JP6288951B2 JP2013112191A JP2013112191A JP6288951B2 JP 6288951 B2 JP6288951 B2 JP 6288951B2 JP 2013112191 A JP2013112191 A JP 2013112191A JP 2013112191 A JP2013112191 A JP 2013112191A JP 6288951 B2 JP6288951 B2 JP 6288951B2
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scanning electron
electron microscope
inspection
chamber
inspection object
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Japanese (ja)
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JP2013251262A (ja
JP2013251262A5 (enExample
Inventor
英 吉 朴
英 吉 朴
原 奉 白
原 奉 白
基 元 呉
基 元 呉
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Samsung Display Co Ltd
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Samsung Display Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24592—Inspection and quality control of devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2013112191A 2012-05-30 2013-05-28 走査電子顕微鏡を利用した検査システム Active JP6288951B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2012-0057468 2012-05-30
KR1020120057468A KR101914231B1 (ko) 2012-05-30 2012-05-30 주사 전자 현미경을 이용한 검사 시스템

Publications (3)

Publication Number Publication Date
JP2013251262A JP2013251262A (ja) 2013-12-12
JP2013251262A5 JP2013251262A5 (enExample) 2016-07-07
JP6288951B2 true JP6288951B2 (ja) 2018-03-07

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JP2013112191A Active JP6288951B2 (ja) 2012-05-30 2013-05-28 走査電子顕微鏡を利用した検査システム

Country Status (6)

Country Link
US (1) US8890067B2 (enExample)
EP (1) EP2669927A3 (enExample)
JP (1) JP6288951B2 (enExample)
KR (1) KR101914231B1 (enExample)
CN (1) CN103454295B (enExample)
TW (1) TWI597757B (enExample)

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US9410901B2 (en) 2014-03-17 2016-08-09 Kla-Tencor Corporation Image sensor, an inspection system and a method of inspecting an article
US9767986B2 (en) * 2014-08-29 2017-09-19 Kla-Tencor Corporation Scanning electron microscope and methods of inspecting and reviewing samples
TWI573165B (zh) * 2014-12-09 2017-03-01 財團法人工業技術研究院 電子顯微鏡、讀取器以及擷取元素頻譜之方法
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US10748730B2 (en) 2015-05-21 2020-08-18 Kla-Tencor Corporation Photocathode including field emitter array on a silicon substrate with boron layer
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CN106291899A (zh) * 2016-09-29 2017-01-04 东方晶源微电子科技（北京）有限公司 照明模块、光学显微系统及电子束检测装置
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CN107116308B (zh) * 2017-05-03 2019-01-04 湖北工业大学 波导微纳加工系统以及加工方法
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CN109975340A (zh) * 2017-12-26 2019-07-05 上海梅山钢铁股份有限公司 镀铝锌板无铬钝化膜厚度的微观分析方法
US11114489B2 (en) 2018-06-18 2021-09-07 Kla-Tencor Corporation Back-illuminated sensor and a method of manufacturing a sensor
US10943760B2 (en) 2018-10-12 2021-03-09 Kla Corporation Electron gun and electron microscope
KR20200062573A (ko) 2018-11-27 2020-06-04 김창섭 디스펜서형 노즈워크 장난감
US11114491B2 (en) 2018-12-12 2021-09-07 Kla Corporation Back-illuminated sensor and a method of manufacturing a sensor
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Also Published As

Publication number Publication date
KR101914231B1 (ko) 2018-11-02
KR20130134160A (ko) 2013-12-10
EP2669927A2 (en) 2013-12-04
TW201403652A (zh) 2014-01-16
US8890067B2 (en) 2014-11-18
JP2013251262A (ja) 2013-12-12
EP2669927A3 (en) 2015-08-12
CN103454295A (zh) 2013-12-18
US20130320211A1 (en) 2013-12-05
TWI597757B (zh) 2017-09-01
CN103454295B (zh) 2017-12-29

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