JP2010232195A5 - - Google Patents

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Publication number
JP2010232195A5
JP2010232195A5 JP2010156306A JP2010156306A JP2010232195A5 JP 2010232195 A5 JP2010232195 A5 JP 2010232195A5 JP 2010156306 A JP2010156306 A JP 2010156306A JP 2010156306 A JP2010156306 A JP 2010156306A JP 2010232195 A5 JP2010232195 A5 JP 2010232195A5
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JP
Japan
Prior art keywords
sample
optical system
ion beam
beam optical
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010156306A
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English (en)
Japanese (ja)
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JP2010232195A (ja
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Publication date
Application filed filed Critical
Priority to JP2010156306A priority Critical patent/JP2010232195A/ja
Priority claimed from JP2010156306A external-priority patent/JP2010232195A/ja
Publication of JP2010232195A publication Critical patent/JP2010232195A/ja
Publication of JP2010232195A5 publication Critical patent/JP2010232195A5/ja
Pending legal-status Critical Current

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JP2010156306A 2010-07-09 2010-07-09 微小試料加工観察方法及び装置 Pending JP2010232195A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010156306A JP2010232195A (ja) 2010-07-09 2010-07-09 微小試料加工観察方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010156306A JP2010232195A (ja) 2010-07-09 2010-07-09 微小試料加工観察方法及び装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2008305836A Division JP5126031B2 (ja) 2008-12-01 2008-12-01 微小試料加工観察方法及び装置

Publications (2)

Publication Number Publication Date
JP2010232195A JP2010232195A (ja) 2010-10-14
JP2010232195A5 true JP2010232195A5 (enExample) 2011-04-21

Family

ID=43047796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010156306A Pending JP2010232195A (ja) 2010-07-09 2010-07-09 微小試料加工観察方法及び装置

Country Status (1)

Country Link
JP (1) JP2010232195A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8759765B2 (en) * 2011-08-08 2014-06-24 Omniprobe, Inc. Method for processing samples held by a nanomanipulator
JP5934521B2 (ja) * 2012-03-01 2016-06-15 日本電子株式会社 試料解析装置
JP7152757B2 (ja) 2018-10-18 2022-10-13 株式会社日立ハイテクサイエンス 試料加工観察方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11108813A (ja) * 1997-10-03 1999-04-23 Hitachi Ltd 試料作製方法および装置

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