JP2017050120A5 - - Google Patents

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Publication number
JP2017050120A5
JP2017050120A5 JP2015171867A JP2015171867A JP2017050120A5 JP 2017050120 A5 JP2017050120 A5 JP 2017050120A5 JP 2015171867 A JP2015171867 A JP 2015171867A JP 2015171867 A JP2015171867 A JP 2015171867A JP 2017050120 A5 JP2017050120 A5 JP 2017050120A5
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JP
Japan
Prior art keywords
sample holder
holder
sample
measuring
measuring device
Prior art date
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JP2015171867A
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English (en)
Japanese (ja)
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JP6640497B2 (ja
JP2017050120A (ja
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Application filed filed Critical
Priority claimed from JP2015171867A external-priority patent/JP6640497B2/ja
Priority to JP2015171867A priority Critical patent/JP6640497B2/ja
Priority to TW105114147A priority patent/TWI700721B/zh
Priority to KR1020160068015A priority patent/KR20170027268A/ko
Priority to US15/193,922 priority patent/US9865425B2/en
Priority to SG10201605375YA priority patent/SG10201605375YA/en
Priority to EP16179243.7A priority patent/EP3139398A1/en
Priority to CN201610773695.6A priority patent/CN106483336B/zh
Publication of JP2017050120A publication Critical patent/JP2017050120A/ja
Publication of JP2017050120A5 publication Critical patent/JP2017050120A5/ja
Publication of JP6640497B2 publication Critical patent/JP6640497B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015171867A 2015-09-01 2015-09-01 試料ホルダ及び試料ホルダ群 Active JP6640497B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2015171867A JP6640497B2 (ja) 2015-09-01 2015-09-01 試料ホルダ及び試料ホルダ群
TW105114147A TWI700721B (zh) 2015-09-01 2016-05-06 試料保持具及試料保持具群
KR1020160068015A KR20170027268A (ko) 2015-09-01 2016-06-01 시료 홀더 및 시료 홀더군
US15/193,922 US9865425B2 (en) 2015-09-01 2016-06-27 Sample holder and sample holder set
SG10201605375YA SG10201605375YA (en) 2015-09-01 2016-06-30 Sample holder and sample holder set
EP16179243.7A EP3139398A1 (en) 2015-09-01 2016-07-13 Sample holder and sample holder set
CN201610773695.6A CN106483336B (zh) 2015-09-01 2016-08-31 样品支座和样品支座组

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015171867A JP6640497B2 (ja) 2015-09-01 2015-09-01 試料ホルダ及び試料ホルダ群

Publications (3)

Publication Number Publication Date
JP2017050120A JP2017050120A (ja) 2017-03-09
JP2017050120A5 true JP2017050120A5 (enExample) 2018-08-16
JP6640497B2 JP6640497B2 (ja) 2020-02-05

Family

ID=56567384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015171867A Active JP6640497B2 (ja) 2015-09-01 2015-09-01 試料ホルダ及び試料ホルダ群

Country Status (7)

Country Link
US (1) US9865425B2 (enExample)
EP (1) EP3139398A1 (enExample)
JP (1) JP6640497B2 (enExample)
KR (1) KR20170027268A (enExample)
CN (1) CN106483336B (enExample)
SG (1) SG10201605375YA (enExample)
TW (1) TWI700721B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6782191B2 (ja) * 2017-04-27 2020-11-11 株式会社日立製作所 分析システム
CN109254025B (zh) * 2018-11-02 2023-09-22 内蒙古工业大学 一种用于透射电镜样品粘贴环形载网的装置及方法
JP7229806B2 (ja) * 2019-02-19 2023-02-28 日本電子株式会社 観察方法
EP3751251A1 (de) 2019-06-11 2020-12-16 Anton Paar GmbH Probentransfer mit leichter auffindbarkeit eines zielbereichs
US20240393270A1 (en) * 2021-09-30 2024-11-28 Hitachi High-Tech Corporation Analysis System
WO2025169444A1 (ja) * 2024-02-09 2025-08-14 Ｎｔｔ株式会社 位置合わせ部品

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53114288U (enExample) * 1977-02-18 1978-09-11
JP3293739B2 (ja) * 1996-06-13 2002-06-17 株式会社日立製作所 走査電子顕微鏡
JP2003257349A (ja) * 2002-02-28 2003-09-12 Hitachi High-Technologies Corp 走査像観察装置用画像調整標準試料台
JP2004363085A (ja) * 2003-05-09 2004-12-24 Ebara Corp 荷電粒子線による検査装置及びその検査装置を用いたデバイス製造方法
US7442624B2 (en) * 2004-08-02 2008-10-28 Infineon Technologies Ag Deep alignment marks on edge chips for subsequent alignment of opaque layers
JP5403852B2 (ja) * 2005-08-12 2014-01-29 株式会社荏原製作所 検出装置及び検査装置
JP2008146990A (ja) * 2006-12-08 2008-06-26 Hitachi High-Technologies Corp 試料固定台、及びそれを備えた荷電粒子線装置、並びに観察／解析対象箇所特定方法
KR100902403B1 (ko) 2007-09-11 2009-06-11 한국기초과학지원연구원 투과전자현미경 3차원 관찰 전용 문 그리드 및 그 제조방법
DE102009020663A1 (de) * 2009-05-11 2010-11-25 Carl Zeiss Ag Mikroskopie eines Objektes mit einer Abfolge von optischer Mikroskopie und Teilchenstrahlmikroskopie
JP5624815B2 (ja) 2010-07-02 2014-11-12 株式会社キーエンス 拡大観察装置及び拡大観察方法
DE102010052674A1 (de) * 2010-11-24 2012-05-24 Carl Zeiss Ag Probenträger mit Justiermarkierung
JP5788719B2 (ja) * 2011-06-09 2015-10-07 株式会社日立ハイテクノロジーズ ステージ装置およびステージ装置の制御方法
JP2013140846A (ja) * 2011-12-28 2013-07-18 Canon Inc 描画装置及び物品の製造方法

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