JP2013140846A5 - - Google Patents

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Publication number
JP2013140846A5
JP2013140846A5 JP2011289888A JP2011289888A JP2013140846A5 JP 2013140846 A5 JP2013140846 A5 JP 2013140846A5 JP 2011289888 A JP2011289888 A JP 2011289888A JP 2011289888 A JP2011289888 A JP 2011289888A JP 2013140846 A5 JP2013140846 A5 JP 2013140846A5
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JP
Japan
Prior art keywords
charged particle
reference mark
distance
substrate
drawing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011289888A
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English (en)
Japanese (ja)
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JP2013140846A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011289888A priority Critical patent/JP2013140846A/ja
Priority claimed from JP2011289888A external-priority patent/JP2013140846A/ja
Priority to US13/721,540 priority patent/US20130171570A1/en
Publication of JP2013140846A publication Critical patent/JP2013140846A/ja
Publication of JP2013140846A5 publication Critical patent/JP2013140846A5/ja
Pending legal-status Critical Current

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JP2011289888A 2011-12-28 2011-12-28 描画装置及び物品の製造方法 Pending JP2013140846A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011289888A JP2013140846A (ja) 2011-12-28 2011-12-28 描画装置及び物品の製造方法
US13/721,540 US20130171570A1 (en) 2011-12-28 2012-12-20 Drawing apparatus, and method of manufacturing article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011289888A JP2013140846A (ja) 2011-12-28 2011-12-28 描画装置及び物品の製造方法

Publications (2)

Publication Number Publication Date
JP2013140846A JP2013140846A (ja) 2013-07-18
JP2013140846A5 true JP2013140846A5 (enExample) 2015-02-19

Family

ID=48695065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011289888A Pending JP2013140846A (ja) 2011-12-28 2011-12-28 描画装置及び物品の製造方法

Country Status (2)

Country Link
US (1) US20130171570A1 (enExample)
JP (1) JP2013140846A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5506560B2 (ja) * 2010-06-18 2014-05-28 キヤノン株式会社 描画装置及びデバイス製造方法
JP2014220263A (ja) * 2013-04-30 2014-11-20 キヤノン株式会社 リソグラフィ装置、及び物品の製造方法
JP2014220262A (ja) * 2013-04-30 2014-11-20 キヤノン株式会社 リソグラフィ装置、リソグラフィ方法、及びデバイスの製造方法
JP2015128132A (ja) * 2013-11-28 2015-07-09 キヤノン株式会社 描画データの作成方法、描画装置、描画方法、及び物品の製造方法
JP6640497B2 (ja) * 2015-09-01 2020-02-05 株式会社日立ハイテクサイエンス 試料ホルダ及び試料ホルダ群

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2960746B2 (ja) * 1990-03-15 1999-10-12 株式会社日立製作所 ビーム照射方法および電子ビーム描画方法とビーム照射装置並びに電子ビーム描画装置
JP2004158559A (ja) * 2002-11-05 2004-06-03 Nikon Corp フィデューシャルマーク及びそれを有する露光装置
JP2004241652A (ja) * 2003-02-06 2004-08-26 Nikon Corp 基準マーク体及びそれを有する露光装置
JP5744601B2 (ja) * 2010-04-20 2015-07-08 キヤノン株式会社 電子線描画装置及びデバイス製造方法
JP5506560B2 (ja) * 2010-06-18 2014-05-28 キヤノン株式会社 描画装置及びデバイス製造方法
JP2014220263A (ja) * 2013-04-30 2014-11-20 キヤノン株式会社 リソグラフィ装置、及び物品の製造方法

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