JP2013140846A - 描画装置及び物品の製造方法 - Google Patents

描画装置及び物品の製造方法 Download PDF

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Publication number
JP2013140846A
JP2013140846A JP2011289888A JP2011289888A JP2013140846A JP 2013140846 A JP2013140846 A JP 2013140846A JP 2011289888 A JP2011289888 A JP 2011289888A JP 2011289888 A JP2011289888 A JP 2011289888A JP 2013140846 A JP2013140846 A JP 2013140846A
Authority
JP
Japan
Prior art keywords
charged particle
measurement unit
reference mark
measurement
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011289888A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013140846A5 (enExample
Inventor
Koichi Chitoku
孝一 千徳
Hideki Ine
秀樹 稲
Wataru Yamaguchi
渉 山口
Nobushige Korenaga
伸茂 是永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011289888A priority Critical patent/JP2013140846A/ja
Priority to US13/721,540 priority patent/US20130171570A1/en
Publication of JP2013140846A publication Critical patent/JP2013140846A/ja
Publication of JP2013140846A5 publication Critical patent/JP2013140846A5/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • G21K5/08—Holders for targets or for other objects to be irradiated
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20292—Means for position and/or orientation registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2011289888A 2011-12-28 2011-12-28 描画装置及び物品の製造方法 Pending JP2013140846A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011289888A JP2013140846A (ja) 2011-12-28 2011-12-28 描画装置及び物品の製造方法
US13/721,540 US20130171570A1 (en) 2011-12-28 2012-12-20 Drawing apparatus, and method of manufacturing article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011289888A JP2013140846A (ja) 2011-12-28 2011-12-28 描画装置及び物品の製造方法

Publications (2)

Publication Number Publication Date
JP2013140846A true JP2013140846A (ja) 2013-07-18
JP2013140846A5 JP2013140846A5 (enExample) 2015-02-19

Family

ID=48695065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011289888A Pending JP2013140846A (ja) 2011-12-28 2011-12-28 描画装置及び物品の製造方法

Country Status (2)

Country Link
US (1) US20130171570A1 (enExample)
JP (1) JP2013140846A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017050120A (ja) * 2015-09-01 2017-03-09 株式会社日立ハイテクサイエンス 試料ホルダ及び試料ホルダ群

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5506560B2 (ja) * 2010-06-18 2014-05-28 キヤノン株式会社 描画装置及びデバイス製造方法
JP2014220263A (ja) * 2013-04-30 2014-11-20 キヤノン株式会社 リソグラフィ装置、及び物品の製造方法
JP2014220262A (ja) * 2013-04-30 2014-11-20 キヤノン株式会社 リソグラフィ装置、リソグラフィ方法、及びデバイスの製造方法
JP2015128132A (ja) * 2013-11-28 2015-07-09 キヤノン株式会社 描画データの作成方法、描画装置、描画方法、及び物品の製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03265120A (ja) * 1990-03-15 1991-11-26 Hitachi Ltd ビーム照射方法および電子ビーム描画方法とビーム照射装置並びに電子ビーム描画装置
JP2004158559A (ja) * 2002-11-05 2004-06-03 Nikon Corp フィデューシャルマーク及びそれを有する露光装置
JP2004241652A (ja) * 2003-02-06 2004-08-26 Nikon Corp 基準マーク体及びそれを有する露光装置
JP2011243957A (ja) * 2010-04-20 2011-12-01 Canon Inc 電子線描画装置及びデバイス製造方法
JP2012004461A (ja) * 2010-06-18 2012-01-05 Canon Inc 描画装置及びデバイス製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014220263A (ja) * 2013-04-30 2014-11-20 キヤノン株式会社 リソグラフィ装置、及び物品の製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03265120A (ja) * 1990-03-15 1991-11-26 Hitachi Ltd ビーム照射方法および電子ビーム描画方法とビーム照射装置並びに電子ビーム描画装置
JP2004158559A (ja) * 2002-11-05 2004-06-03 Nikon Corp フィデューシャルマーク及びそれを有する露光装置
JP2004241652A (ja) * 2003-02-06 2004-08-26 Nikon Corp 基準マーク体及びそれを有する露光装置
JP2011243957A (ja) * 2010-04-20 2011-12-01 Canon Inc 電子線描画装置及びデバイス製造方法
JP2012004461A (ja) * 2010-06-18 2012-01-05 Canon Inc 描画装置及びデバイス製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017050120A (ja) * 2015-09-01 2017-03-09 株式会社日立ハイテクサイエンス 試料ホルダ及び試料ホルダ群

Also Published As

Publication number Publication date
US20130171570A1 (en) 2013-07-04

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