JP2010232195A5 - - Google Patents
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- Publication number
- JP2010232195A5 JP2010232195A5 JP2010156306A JP2010156306A JP2010232195A5 JP 2010232195 A5 JP2010232195 A5 JP 2010232195A5 JP 2010156306 A JP2010156306 A JP 2010156306A JP 2010156306 A JP2010156306 A JP 2010156306A JP 2010232195 A5 JP2010232195 A5 JP 2010232195A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- optical system
- ion beam
- beam optical
- micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims 10
- 238000010884 ion-beam technique Methods 0.000 claims 3
- 230000003287 optical Effects 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 claims 1
Claims (1)
- 集束イオンビーム光学系と、当該集束イオンビーム光学系とビーム軸同士が交差するように配置された電子ビーム光学系と、試料を載置する試料台をその内部に有する真空試料室と、を備えた微小試料加工観察装置に搭載できる移送手段であって、
イオンビームの照射により試料から分離された微小試料を支持するプローブを有し、前記真空試料室の内部において当該プローブを回転させて前記微小試料の姿勢を制御するように構成された移送手段。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010156306A JP2010232195A (ja) | 2010-07-09 | 2010-07-09 | 微小試料加工観察方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010156306A JP2010232195A (ja) | 2010-07-09 | 2010-07-09 | 微小試料加工観察方法及び装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008305836A Division JP5126031B2 (ja) | 2008-12-01 | 2008-12-01 | 微小試料加工観察方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010232195A JP2010232195A (ja) | 2010-10-14 |
| JP2010232195A5 true JP2010232195A5 (ja) | 2011-04-21 |
Family
ID=43047796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010156306A Pending JP2010232195A (ja) | 2010-07-09 | 2010-07-09 | 微小試料加工観察方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2010232195A (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8759765B2 (en) * | 2011-08-08 | 2014-06-24 | Omniprobe, Inc. | Method for processing samples held by a nanomanipulator |
| JP5934521B2 (ja) * | 2012-03-01 | 2016-06-15 | 日本電子株式会社 | 試料解析装置 |
| JP7152757B2 (ja) | 2018-10-18 | 2022-10-13 | 株式会社日立ハイテクサイエンス | 試料加工観察方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11108813A (ja) * | 1997-10-03 | 1999-04-23 | Hitachi Ltd | 試料作製方法および装置 |
-
2010
- 2010-07-09 JP JP2010156306A patent/JP2010232195A/ja active Pending
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