JP2014182125A5 - - Google Patents

Download PDF

Info

Publication number
JP2014182125A5
JP2014182125A5 JP2014040004A JP2014040004A JP2014182125A5 JP 2014182125 A5 JP2014182125 A5 JP 2014182125A5 JP 2014040004 A JP2014040004 A JP 2014040004A JP 2014040004 A JP2014040004 A JP 2014040004A JP 2014182125 A5 JP2014182125 A5 JP 2014182125A5
Authority
JP
Japan
Prior art keywords
flake
sample holder
tem sample
attaching
manipulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014040004A
Other languages
English (en)
Japanese (ja)
Other versions
JP6396038B2 (ja
JP2014182125A (ja
Filing date
Publication date
Priority claimed from US13/935,720 external-priority patent/US8729469B1/en
Application filed filed Critical
Publication of JP2014182125A publication Critical patent/JP2014182125A/ja
Publication of JP2014182125A5 publication Critical patent/JP2014182125A5/ja
Application granted granted Critical
Publication of JP6396038B2 publication Critical patent/JP6396038B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014040004A 2013-03-15 2014-03-02 高スループットのサンプル作製のためのナノマニピュレータに対する複数のサンプルの付着 Active JP6396038B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201361794816P 2013-03-15 2013-03-15
US61/794,816 2013-03-15
US13/935,720 US8729469B1 (en) 2013-03-15 2013-07-05 Multiple sample attachment to nano manipulator for high throughput sample preparation
US13/935,720 2013-07-05

Publications (3)

Publication Number Publication Date
JP2014182125A JP2014182125A (ja) 2014-09-29
JP2014182125A5 true JP2014182125A5 (enExample) 2017-04-06
JP6396038B2 JP6396038B2 (ja) 2018-09-26

Family

ID=50692220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014040004A Active JP6396038B2 (ja) 2013-03-15 2014-03-02 高スループットのサンプル作製のためのナノマニピュレータに対する複数のサンプルの付着

Country Status (4)

Country Link
US (1) US8729469B1 (enExample)
EP (1) EP2778652B1 (enExample)
JP (1) JP6396038B2 (enExample)
CN (1) CN104049097B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103403520B (zh) 2011-01-28 2015-12-23 Fei公司 Tem样品制备
US9281163B2 (en) * 2014-04-14 2016-03-08 Fei Company High capacity TEM grid
KR102383571B1 (ko) 2014-06-30 2022-04-06 가부시키가이샤 히다치 하이테크 사이언스 자동 시료 제작 장치
EP3082148A1 (en) 2015-04-15 2016-10-19 FEI Company Method of manipulating a sample in an evacuated chamber of a charged particle apparatus
CN107132241B (zh) * 2017-04-24 2019-06-25 中国石油大学(北京) 一种在原位电镜中对纳米材料进行焊接的方法
CN107356460B (zh) * 2017-07-12 2020-04-10 上海华力微电子有限公司 一种用于聚焦离子束机台提取样品的方法
US11189458B2 (en) 2020-01-21 2021-11-30 Battelle Memorial Institute Cryo nanomanipulator probe with integrated gas injection
CN114464516A (zh) * 2020-10-21 2022-05-10 长鑫存储技术有限公司 栅格
EP4068333A1 (en) * 2021-03-31 2022-10-05 FEI Company Sample carrier for use in a charged particle microscope, and a method of using such a sample carrier in a charged particle microscope
US12165832B2 (en) * 2021-12-31 2024-12-10 Fei Company Systems and methods for performing sample lift-out for highly reactive materials

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999005506A1 (fr) * 1997-07-22 1999-02-04 Hitachi, Ltd. Procede et dispositif de preparation d'echantillons
US6828566B2 (en) * 1997-07-22 2004-12-07 Hitachi Ltd Method and apparatus for specimen fabrication
JP4178741B2 (ja) * 2000-11-02 2008-11-12 株式会社日立製作所 荷電粒子線装置および試料作製装置
JP2003194681A (ja) * 2001-12-26 2003-07-09 Toshiba Microelectronics Corp Ｔｅｍ試料作製方法
JP2003242921A (ja) * 2002-02-15 2003-08-29 Jeol Ltd 微小物体移動方法及びそれを用いた観察方法並びに観察装置
EP1515360B1 (en) * 2003-06-13 2011-01-19 Fei Company Method and apparatus for manipulating a microscopic sample
EP2095134B1 (en) 2006-10-20 2017-02-22 FEI Company Method and apparatus for sample extraction and handling
JP5959139B2 (ja) 2006-10-20 2016-08-02 エフ・イ−・アイ・カンパニー Ｓ／ｔｅｍのサンプルを分析する方法
CN103403520B (zh) * 2011-01-28 2015-12-23 Fei公司 Tem样品制备

Similar Documents

Publication Publication Date Title
JP2014182125A5 (enExample)
JP2015506787A5 (enExample)
JP2012098988A5 (enExample)
EP3429996A4 (en) SMALL MOLECULES AGAINST CEREBLON TO IMPROVE THE FUNCTION OF EFFECTOR T CELLS
GB2548634B (en) Utility arm
TWD186625S (zh) 工業機器人之使用者介面裝置
EP2970849A4 (en) METHOD AND DEVICE FOR ANALYZING DEFINED MULTICELLULAR COMBINATIONS
TWD172241S (zh) 機器人
TWD171713S (zh) 電連接器
IL243207B (en) Process for manufacturing 4 -propargylated amino-benzoxazinones
GB201420026D0 (en) Improvements to robotic arm end effectors and their use in the preparation and application of production materials
EP3166726A4 (en) Devices and kits for collection, storage and analysis of samples and methods of production and use thereof
JP2015186128A5 (enExample)
EP3118211A8 (en) Amide compounds and methods for the production and use thereof
EP3083555A4 (en) Processes for the diazotization of 2,5-dichloroanilines
SI3083275T1 (sl) S silanom spremenjena silicijeva kislina, postopek njene priprave in uporabe
JP2016038993A5 (enExample)
JP2015529327A5 (enExample)
JP2015189606A5 (enExample)
JP2016046294A5 (enExample)
JP2016011847A5 (enExample)
JP2018121576A5 (enExample)
WO2016038560A9 (en) Process for the preparation of enzalutamide
WO2015066485A3 (en) Mitochondrial disease genetic diagnostics
JP2016084883A5 (enExample)