JP2015028933A5 - - Google Patents
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- Publication number
- JP2015028933A5 JP2015028933A5 JP2014138331A JP2014138331A JP2015028933A5 JP 2015028933 A5 JP2015028933 A5 JP 2015028933A5 JP 2014138331 A JP2014138331 A JP 2014138331A JP 2014138331 A JP2014138331 A JP 2014138331A JP 2015028933 A5 JP2015028933 A5 JP 2015028933A5
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- electrons
- camera
- transmission electron
- electron diffraction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000003287 optical effect Effects 0.000 claims 6
- 230000005540 biological transmission Effects 0.000 claims 5
- 238000002524 electron diffraction data Methods 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 239000000126 substance Substances 0.000 claims 3
- 238000002003 electron diffraction Methods 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014138331A JP2015028933A (ja) | 2013-07-05 | 2014-07-04 | 透過電子回折測定装置および透過電子回折パターンの測定方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013141217 | 2013-07-05 | ||
| JP2013141217 | 2013-07-05 | ||
| JP2014138331A JP2015028933A (ja) | 2013-07-05 | 2014-07-04 | 透過電子回折測定装置および透過電子回折パターンの測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2015028933A JP2015028933A (ja) | 2015-02-12 |
| JP2015028933A5 true JP2015028933A5 (enExample) | 2017-07-20 |
Family
ID=52132139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014138331A Withdrawn JP2015028933A (ja) | 2013-07-05 | 2014-07-04 | 透過電子回折測定装置および透過電子回折パターンの測定方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9244025B2 (enExample) |
| JP (1) | JP2015028933A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9496330B2 (en) | 2013-08-02 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
| CN113906536B (zh) | 2019-05-20 | 2024-04-19 | 埃尔迪科科学股份有限公司 | 用于带电粒子晶体学的衍射仪 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61243649A (ja) * | 1985-04-19 | 1986-10-29 | Hitachi Ltd | 回析像同時表示電子顕微鏡 |
| US5140352A (en) * | 1990-10-31 | 1992-08-18 | Occipital, Inc. | Ccd camera and method for fundus imaging |
| JPH05128991A (ja) * | 1991-08-09 | 1993-05-25 | Hikari Gijutsu Kenkyu Kaihatsu Kk | 実時間表面モニター装置 |
| US5898177A (en) * | 1996-08-08 | 1999-04-27 | Hitachi, Ltd. | Electron microscope |
| US6061085A (en) | 1997-02-07 | 2000-05-09 | Soft Imaging System Gmbh | Camera system for a transmission electron microscope |
| JPH11111208A (ja) * | 1997-09-30 | 1999-04-23 | Ulvac Corp | 反射電子回折装置 |
| JPH11250850A (ja) | 1998-03-02 | 1999-09-17 | Hitachi Ltd | 走査電子顕微鏡及び顕微方法並びに対話型入力装置 |
| TWI258583B (en) * | 2003-01-30 | 2006-07-21 | Test Research Inc | Device and method for optical detection of printed circuit board |
| EP1665321B1 (en) * | 2003-09-02 | 2009-11-11 | Nanomegas SPRL | A method for measuring diffraction patterns from a transmission electron microscopy to determine crystal structures and a device therefor |
| US7164462B2 (en) * | 2004-03-03 | 2007-01-16 | Louise Lamarre | Filming using rear-projection screen and image projector |
| JP4262184B2 (ja) * | 2004-10-12 | 2009-05-13 | 株式会社日立ハイテクノロジーズ | 透過型電子顕微鏡およびそれを用いた像観察方法 |
| JP4596881B2 (ja) * | 2004-10-26 | 2010-12-15 | 株式会社日立ハイテクノロジーズ | 透過型電子顕微鏡装置 |
| JP5126729B2 (ja) | 2004-11-10 | 2013-01-23 | キヤノン株式会社 | 画像表示装置 |
| US7791072B2 (en) | 2004-11-10 | 2010-09-07 | Canon Kabushiki Kaisha | Display |
| JP2006196236A (ja) | 2005-01-12 | 2006-07-27 | Hitachi High-Technologies Corp | 電子顕微鏡及び観察方法 |
| JP4850654B2 (ja) * | 2006-10-23 | 2012-01-11 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置および荷電粒子線装置用試料保持装置 |
| JP2009152087A (ja) * | 2007-12-21 | 2009-07-09 | Jeol Ltd | 透過電子顕微鏡 |
| JP5226378B2 (ja) * | 2008-04-28 | 2013-07-03 | 株式会社日立ハイテクノロジーズ | 透過型電子顕微鏡、及び試料観察方法 |
| JP2010117705A (ja) * | 2008-10-14 | 2010-05-27 | Olympus Corp | バーチャルスライド作成システム用顕微鏡 |
| JP2010214847A (ja) * | 2009-03-18 | 2010-09-30 | Fujifilm Corp | 液滴吐出ヘッドおよび画像形成装置 |
| DE102010003056B9 (de) * | 2010-03-19 | 2014-07-31 | Carl Zeiss Microscopy Gmbh | Verfahren zur Erzeugung von Bildern einer Probe |
| US9496138B2 (en) * | 2011-07-08 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor film, method for manufacturing semiconductor device, and semiconductor device |
| KR20220150439A (ko) * | 2012-11-08 | 2022-11-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 디스플레이 장치 |
| US9293544B2 (en) * | 2013-02-26 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having buried channel structure |
-
2014
- 2014-06-16 US US14/305,173 patent/US9244025B2/en not_active Expired - Fee Related
- 2014-07-04 JP JP2014138331A patent/JP2015028933A/ja not_active Withdrawn
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