JP2014082130A5 - - Google Patents

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Publication number
JP2014082130A5
JP2014082130A5 JP2012230115A JP2012230115A JP2014082130A5 JP 2014082130 A5 JP2014082130 A5 JP 2014082130A5 JP 2012230115 A JP2012230115 A JP 2012230115A JP 2012230115 A JP2012230115 A JP 2012230115A JP 2014082130 A5 JP2014082130 A5 JP 2014082130A5
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JP
Japan
Prior art keywords
cap
thin film
holder portion
circulate
coolant
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Application number
JP2012230115A
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English (en)
Japanese (ja)
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JP6114981B2 (ja
JP2014082130A (ja
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Publication date
Application filed filed Critical
Priority claimed from JP2012230115A external-priority patent/JP6114981B2/ja
Priority to JP2012230115A priority Critical patent/JP6114981B2/ja
Priority to TW102134248A priority patent/TWI576885B/zh
Priority to GB1317784.5A priority patent/GB2508707B/en
Priority to KR1020130121249A priority patent/KR101988538B1/ko
Priority to US14/055,453 priority patent/US9159524B2/en
Publication of JP2014082130A publication Critical patent/JP2014082130A/ja
Publication of JP2014082130A5 publication Critical patent/JP2014082130A5/ja
Publication of JP6114981B2 publication Critical patent/JP6114981B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012230115A 2012-10-17 2012-10-17 Ｘ線発生装置 Active JP6114981B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012230115A JP6114981B2 (ja) 2012-10-17 2012-10-17 Ｘ線発生装置
TW102134248A TWI576885B (zh) 2012-10-17 2013-09-24 Ｘ射線產生裝置
GB1317784.5A GB2508707B (en) 2012-10-17 2013-10-08 X-ray generating apparatus
KR1020130121249A KR101988538B1 (ko) 2012-10-17 2013-10-11 X선 발생 장치
US14/055,453 US9159524B2 (en) 2012-10-17 2013-10-16 X-ray generating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012230115A JP6114981B2 (ja) 2012-10-17 2012-10-17 Ｘ線発生装置

Publications (3)

Publication Number Publication Date
JP2014082130A JP2014082130A (ja) 2014-05-08
JP2014082130A5 true JP2014082130A5 (enExample) 2014-12-18
JP6114981B2 JP6114981B2 (ja) 2017-04-19

Family

ID=49630365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012230115A Active JP6114981B2 (ja) 2012-10-17 2012-10-17 Ｘ線発生装置

Country Status (5)

Country Link
US (1) US9159524B2 (enExample)
JP (1) JP6114981B2 (enExample)
KR (1) KR101988538B1 (enExample)
GB (1) GB2508707B (enExample)
TW (1) TWI576885B (enExample)

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CA3080221A1 (en) 2012-02-14 2013-08-22 American Science And Engineering, Inc. X-ray inspection using wavelength-shifting fiber-coupled scintillation detectors
US10670740B2 (en) 2012-02-14 2020-06-02 American Science And Engineering, Inc. Spectral discrimination using wavelength-shifting fiber-coupled scintillation detectors
US9666322B2 (en) * 2014-02-23 2017-05-30 Bruker Jv Israel Ltd X-ray source assembly
US10228487B2 (en) 2014-06-30 2019-03-12 American Science And Engineering, Inc. Rapidly relocatable modular cargo container scanner
US9748070B1 (en) 2014-09-17 2017-08-29 Bruker Jv Israel Ltd. X-ray tube anode
DE102015203459A1 (de) * 2015-02-26 2016-09-01 Siemens Aktiengesellschaft Röntgenröhre
MX379793B (es) 2015-03-20 2025-03-11 Rapiscan Systems Inc Sistema portátil de inspección de retrodispersión.
JP6377572B2 (ja) * 2015-05-11 2018-08-22 株式会社リガク Ｘ線発生装置、及びその調整方法
US10720300B2 (en) * 2016-09-30 2020-07-21 American Science And Engineering, Inc. X-ray source for 2D scanning beam imaging
US10748736B2 (en) 2017-10-18 2020-08-18 Kla-Tencor Corporation Liquid metal rotating anode X-ray source for semiconductor metrology
US10830911B2 (en) 2018-06-20 2020-11-10 American Science And Engineering, Inc. Wavelength-shifting sheet-coupled scintillation detectors
US11302508B2 (en) 2018-11-08 2022-04-12 Bruker Technologies Ltd. X-ray tube
US11719652B2 (en) 2020-02-04 2023-08-08 Kla Corporation Semiconductor metrology and inspection based on an x-ray source with an electron emitter array
US11164713B2 (en) * 2020-03-31 2021-11-02 Energetiq Technology, Inc. X-ray generation apparatus
US11145481B1 (en) * 2020-04-13 2021-10-12 Hamamatsu Photonics K.K. X-ray generation using electron beam
US11193898B1 (en) 2020-06-01 2021-12-07 American Science And Engineering, Inc. Systems and methods for controlling image contrast in an X-ray system
US11175245B1 (en) 2020-06-15 2021-11-16 American Science And Engineering, Inc. Scatter X-ray imaging with adaptive scanning beam intensity
US11340361B1 (en) 2020-11-23 2022-05-24 American Science And Engineering, Inc. Wireless transmission detector panel for an X-ray scanner
JP7549538B2 (ja) * 2021-01-22 2024-09-11 浜松ホトニクス株式会社 Ｘ線モジュール
EP4409607A1 (en) 2021-10-01 2024-08-07 Rapiscan Holdings, Inc. Methods and systems for the concurrent generation of multiple substantially similar x-ray beams
CN115394619B (zh) * 2022-08-08 2025-03-25 无锡日联科技股份有限公司 一种使开放式x射线管具有多种工作模式的方法
WO2024057479A1 (ja) 2022-09-15 2024-03-21 キヤノンアネルバ株式会社 Ｘ線発生装置、ｘ線撮像装置、および、ｘ線発生装置の調整方法
US11955308B1 (en) 2022-09-22 2024-04-09 Kla Corporation Water cooled, air bearing based rotating anode x-ray illumination source

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JP4772212B2 (ja) * 2001-05-31 2011-09-14 浜松ホトニクス株式会社 Ｘ線発生装置
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KR101318592B1 (ko) * 2009-11-26 2013-10-15 가부시키가이샤 히다치 하이테크놀로지즈 주사 전자 현미경
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