TWI576885B - Ｘ射線產生裝置 - Google Patents

Ｘ射線產生裝置 Download PDF

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Publication number
TWI576885B
TWI576885B TW102134248A TW102134248A TWI576885B TW I576885 B TWI576885 B TW I576885B TW 102134248 A TW102134248 A TW 102134248A TW 102134248 A TW102134248 A TW 102134248A TW I576885 B TWI576885 B TW I576885B
Authority
TW
Taiwan
Prior art keywords
ray
target
electron beam
permanent magnet
lens
Prior art date
Application number
TW102134248A
Other languages
English (en)
Chinese (zh)
Other versions
TW201423819A (zh
Inventor
馬丁 霍瓦特
吉利 馬爾斯克
拉迪斯拉芙 平納
瓦克拉芙 杰利內克
大坂尚久
表和彥
神戶亮
姜立財
金鳳來
Original Assignee
理學股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 理學股份有限公司 filed Critical 理學股份有限公司
Publication of TW201423819A publication Critical patent/TW201423819A/zh
Application granted granted Critical
Publication of TWI576885B publication Critical patent/TWI576885B/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/083—Bonding or fixing with the support or substrate

Landscapes

  • X-Ray Techniques (AREA)
TW102134248A 2012-10-17 2013-09-24 Ｘ射線產生裝置 TWI576885B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012230115A JP6114981B2 (ja) 2012-10-17 2012-10-17 Ｘ線発生装置

Publications (2)

Publication Number Publication Date
TW201423819A TW201423819A (zh) 2014-06-16
TWI576885B true TWI576885B (zh) 2017-04-01

Family

ID=49630365

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102134248A TWI576885B (zh) 2012-10-17 2013-09-24 Ｘ射線產生裝置

Country Status (5)

Country Link
US (1) US9159524B2 (enExample)
JP (1) JP6114981B2 (enExample)
KR (1) KR101988538B1 (enExample)
GB (1) GB2508707B (enExample)
TW (1) TWI576885B (enExample)

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KR102065318B1 (ko) 2012-02-03 2020-01-10 라피스캔 시스템스, 인코포레이티드 조합형 산란 및 투과 멀티-뷰 이미징 시스템
CA3080221A1 (en) 2012-02-14 2013-08-22 American Science And Engineering, Inc. X-ray inspection using wavelength-shifting fiber-coupled scintillation detectors
US10670740B2 (en) 2012-02-14 2020-06-02 American Science And Engineering, Inc. Spectral discrimination using wavelength-shifting fiber-coupled scintillation detectors
US9666322B2 (en) * 2014-02-23 2017-05-30 Bruker Jv Israel Ltd X-ray source assembly
US10228487B2 (en) 2014-06-30 2019-03-12 American Science And Engineering, Inc. Rapidly relocatable modular cargo container scanner
US9748070B1 (en) 2014-09-17 2017-08-29 Bruker Jv Israel Ltd. X-ray tube anode
DE102015203459A1 (de) * 2015-02-26 2016-09-01 Siemens Aktiengesellschaft Röntgenröhre
MX379793B (es) 2015-03-20 2025-03-11 Rapiscan Systems Inc Sistema portátil de inspección de retrodispersión.
JP6377572B2 (ja) * 2015-05-11 2018-08-22 株式会社リガク Ｘ線発生装置、及びその調整方法
US10720300B2 (en) * 2016-09-30 2020-07-21 American Science And Engineering, Inc. X-ray source for 2D scanning beam imaging
US10748736B2 (en) 2017-10-18 2020-08-18 Kla-Tencor Corporation Liquid metal rotating anode X-ray source for semiconductor metrology
US10830911B2 (en) 2018-06-20 2020-11-10 American Science And Engineering, Inc. Wavelength-shifting sheet-coupled scintillation detectors
US11302508B2 (en) 2018-11-08 2022-04-12 Bruker Technologies Ltd. X-ray tube
US11719652B2 (en) 2020-02-04 2023-08-08 Kla Corporation Semiconductor metrology and inspection based on an x-ray source with an electron emitter array
US11164713B2 (en) * 2020-03-31 2021-11-02 Energetiq Technology, Inc. X-ray generation apparatus
US11145481B1 (en) * 2020-04-13 2021-10-12 Hamamatsu Photonics K.K. X-ray generation using electron beam
US11193898B1 (en) 2020-06-01 2021-12-07 American Science And Engineering, Inc. Systems and methods for controlling image contrast in an X-ray system
US11175245B1 (en) 2020-06-15 2021-11-16 American Science And Engineering, Inc. Scatter X-ray imaging with adaptive scanning beam intensity
US11340361B1 (en) 2020-11-23 2022-05-24 American Science And Engineering, Inc. Wireless transmission detector panel for an X-ray scanner
JP7549538B2 (ja) * 2021-01-22 2024-09-11 浜松ホトニクス株式会社 Ｘ線モジュール
EP4409607A1 (en) 2021-10-01 2024-08-07 Rapiscan Holdings, Inc. Methods and systems for the concurrent generation of multiple substantially similar x-ray beams
CN115394619B (zh) * 2022-08-08 2025-03-25 无锡日联科技股份有限公司 一种使开放式x射线管具有多种工作模式的方法
WO2024057479A1 (ja) 2022-09-15 2024-03-21 キヤノンアネルバ株式会社 Ｘ線発生装置、ｘ線撮像装置、および、ｘ線発生装置の調整方法
US11955308B1 (en) 2022-09-22 2024-04-09 Kla Corporation Water cooled, air bearing based rotating anode x-ray illumination source

Citations (3)

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TW580721B (en) * 2001-05-31 2004-03-21 Hamamatsu Photonics Kk Device for generating X-ray
US20120269326A1 (en) * 2011-04-21 2012-10-25 Adler David L X-ray source with high-temperature electron emitter
CN103038855A (zh) * 2010-10-27 2013-04-10 株式会社Param 电子透镜和电子束装置

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JPS58145049A (ja) * 1982-02-22 1983-08-29 Aloka Co Ltd 小型ｘ線管球
GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system
US5206895A (en) 1990-08-24 1993-04-27 Michael Danos X-ray tube
US5128977A (en) 1990-08-24 1992-07-07 Michael Danos X-ray tube
JP2551867Y2 (ja) * 1991-03-29 1997-10-27 日本電気ホームエレクトロニクス株式会社 フォーカスマグネット
JPH0799027A (ja) * 1993-08-05 1995-04-11 Mitsubishi Electric Corp 電子ビーム集束装置
GB9620160D0 (en) 1996-09-27 1996-11-13 Bede Scient Instr Ltd X-ray generator
JP2000082430A (ja) * 1998-09-08 2000-03-21 Hamamatsu Photonics Kk Ｘ線発生用ターゲット及びこれを用いたｘ線管
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US6421422B1 (en) 1999-08-25 2002-07-16 General Electric Company Apparatus and method for increasing X-ray tube power per target thermal load
EP1146542A1 (en) * 2000-04-11 2001-10-17 General Electric Company Apparatus and method for increasing X-ray tube power per target thermal load
JP3481186B2 (ja) * 2000-06-08 2003-12-22 メディエックステック株式会社 Ｘ線発生器、ｘ線検査装置およびｘ線発生方法
NL1023260C1 (nl) * 2003-04-24 2004-10-27 Fei Co Deeltjes-optisch apparaat met een permanent magnetische lens en een elektrostatische lens.
US7428298B2 (en) 2005-03-31 2008-09-23 Moxtek, Inc. Magnetic head for X-ray source
US7443953B1 (en) * 2005-12-09 2008-10-28 Xradia, Inc. Structured anode X-ray source for X-ray microscopy
DE102006036694A1 (de) * 2006-08-05 2008-02-07 Carl Zeiss Industrielle Messtechnik Gmbh Fokussiervorrichtung
JP5153388B2 (ja) * 2008-03-06 2013-02-27 株式会社リガク Ｘ線発生装置ならびにｘ線分析装置、ｘ線透過像計測装置及びｘ線干渉計
KR101318592B1 (ko) * 2009-11-26 2013-10-15 가부시키가이샤 히다치 하이테크놀로지즈 주사 전자 현미경
JP2011233365A (ja) * 2010-04-27 2011-11-17 Toshiba Corp 回転陽極型ｘ線管及び回転陽極型ｘ線管装置

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
TW580721B (en) * 2001-05-31 2004-03-21 Hamamatsu Photonics Kk Device for generating X-ray
CN103038855A (zh) * 2010-10-27 2013-04-10 株式会社Param 电子透镜和电子束装置
US20120269326A1 (en) * 2011-04-21 2012-10-25 Adler David L X-ray source with high-temperature electron emitter

Also Published As

Publication number Publication date
KR20140049471A (ko) 2014-04-25
JP6114981B2 (ja) 2017-04-19
GB2508707A (en) 2014-06-11
GB201317784D0 (en) 2013-11-20
JP2014082130A (ja) 2014-05-08
TW201423819A (zh) 2014-06-16
KR101988538B1 (ko) 2019-06-12
US20140105367A1 (en) 2014-04-17
US9159524B2 (en) 2015-10-13
GB2508707B (en) 2017-07-19

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