GB2508707B - X-ray generating apparatus - Google Patents

X-ray generating apparatus

Info

Publication number
GB2508707B
GB2508707B GB1317784.5A GB201317784A GB2508707B GB 2508707 B GB2508707 B GB 2508707B GB 201317784 A GB201317784 A GB 201317784A GB 2508707 B GB2508707 B GB 2508707B
Authority
GB
United Kingdom
Prior art keywords
generating apparatus
ray generating
ray
generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB1317784.5A
Other languages
English (en)
Other versions
GB2508707A (en
GB201317784D0 (en
Inventor
Horvarth Martin
Marsik Jiri
Pina Ladislav
Jelinek Vaclav
Osaka Naohisa
Omote Kazuhiko
Kambe Makoto
Jiang Licai
Kim Bonglea
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Denki Co Ltd
Rigaku Corp
Original Assignee
Rigaku Denki Co Ltd
Rigaku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Denki Co Ltd, Rigaku Corp filed Critical Rigaku Denki Co Ltd
Publication of GB201317784D0 publication Critical patent/GB201317784D0/en
Publication of GB2508707A publication Critical patent/GB2508707A/en
Application granted granted Critical
Publication of GB2508707B publication Critical patent/GB2508707B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/083—Bonding or fixing with the support or substrate
GB1317784.5A 2012-10-17 2013-10-08 X-ray generating apparatus Expired - Fee Related GB2508707B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012230115A JP6114981B2 (ja) 2012-10-17 2012-10-17 Ｘ線発生装置

Publications (3)

Publication Number Publication Date
GB201317784D0 GB201317784D0 (en) 2013-11-20
GB2508707A GB2508707A (en) 2014-06-11
GB2508707B true GB2508707B (en) 2017-07-19

Family

ID=49630365

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1317784.5A Expired - Fee Related GB2508707B (en) 2012-10-17 2013-10-08 X-ray generating apparatus

Country Status (5)

Country Link
US (1) US9159524B2 (enExample)
JP (1) JP6114981B2 (enExample)
KR (1) KR101988538B1 (enExample)
GB (1) GB2508707B (enExample)
TW (1) TWI576885B (enExample)

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US9958569B2 (en) 2002-07-23 2018-05-01 Rapiscan Systems, Inc. Mobile imaging system and method for detection of contraband
KR102065318B1 (ko) 2012-02-03 2020-01-10 라피스캔 시스템스, 인코포레이티드 조합형 산란 및 투과 멀티-뷰 이미징 시스템
CA3080221A1 (en) 2012-02-14 2013-08-22 American Science And Engineering, Inc. X-ray inspection using wavelength-shifting fiber-coupled scintillation detectors
US10670740B2 (en) 2012-02-14 2020-06-02 American Science And Engineering, Inc. Spectral discrimination using wavelength-shifting fiber-coupled scintillation detectors
US9666322B2 (en) * 2014-02-23 2017-05-30 Bruker Jv Israel Ltd X-ray source assembly
US10228487B2 (en) 2014-06-30 2019-03-12 American Science And Engineering, Inc. Rapidly relocatable modular cargo container scanner
US9748070B1 (en) 2014-09-17 2017-08-29 Bruker Jv Israel Ltd. X-ray tube anode
DE102015203459A1 (de) * 2015-02-26 2016-09-01 Siemens Aktiengesellschaft Röntgenröhre
MX379793B (es) 2015-03-20 2025-03-11 Rapiscan Systems Inc Sistema portátil de inspección de retrodispersión.
JP6377572B2 (ja) * 2015-05-11 2018-08-22 株式会社リガク Ｘ線発生装置、及びその調整方法
US10720300B2 (en) * 2016-09-30 2020-07-21 American Science And Engineering, Inc. X-ray source for 2D scanning beam imaging
US10748736B2 (en) 2017-10-18 2020-08-18 Kla-Tencor Corporation Liquid metal rotating anode X-ray source for semiconductor metrology
US10830911B2 (en) 2018-06-20 2020-11-10 American Science And Engineering, Inc. Wavelength-shifting sheet-coupled scintillation detectors
US11302508B2 (en) 2018-11-08 2022-04-12 Bruker Technologies Ltd. X-ray tube
US11719652B2 (en) 2020-02-04 2023-08-08 Kla Corporation Semiconductor metrology and inspection based on an x-ray source with an electron emitter array
US11164713B2 (en) * 2020-03-31 2021-11-02 Energetiq Technology, Inc. X-ray generation apparatus
US11145481B1 (en) * 2020-04-13 2021-10-12 Hamamatsu Photonics K.K. X-ray generation using electron beam
US11193898B1 (en) 2020-06-01 2021-12-07 American Science And Engineering, Inc. Systems and methods for controlling image contrast in an X-ray system
US11175245B1 (en) 2020-06-15 2021-11-16 American Science And Engineering, Inc. Scatter X-ray imaging with adaptive scanning beam intensity
US11340361B1 (en) 2020-11-23 2022-05-24 American Science And Engineering, Inc. Wireless transmission detector panel for an X-ray scanner
JP7549538B2 (ja) * 2021-01-22 2024-09-11 浜松ホトニクス株式会社 Ｘ線モジュール
EP4409607A1 (en) 2021-10-01 2024-08-07 Rapiscan Holdings, Inc. Methods and systems for the concurrent generation of multiple substantially similar x-ray beams
CN115394619B (zh) * 2022-08-08 2025-03-25 无锡日联科技股份有限公司 一种使开放式x射线管具有多种工作模式的方法
WO2024057479A1 (ja) 2022-09-15 2024-03-21 キヤノンアネルバ株式会社 Ｘ線発生装置、ｘ線撮像装置、および、ｘ線発生装置の調整方法
US11955308B1 (en) 2022-09-22 2024-04-09 Kla Corporation Water cooled, air bearing based rotating anode x-ray illumination source

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system
WO1992003837A1 (en) * 1990-08-24 1992-03-05 Michael Danos X-ray tube
US5506482A (en) * 1993-08-05 1996-04-09 Mitsubishi Denki Kabushiki Kaisha Magnetic focusing system with improved symmetry and manufacturability
JP2000082430A (ja) * 1998-09-08 2000-03-21 Hamamatsu Photonics Kk Ｘ線発生用ターゲット及びこれを用いたｘ線管
EP1146542A1 (en) * 2000-04-11 2001-10-17 General Electric Company Apparatus and method for increasing X-ray tube power per target thermal load
EP1471562A2 (en) * 2003-04-24 2004-10-27 FEI Company Particle-optical apparatus with a permanent-magnetic lens and an electrostatic lens
WO2006105332A2 (en) * 2005-03-31 2006-10-05 Moxtek, Inc. Magnetic head for x-ray source
WO2008017376A1 (de) * 2006-08-05 2008-02-14 Carl Zeiss Industrielle Messtechnik Gmbh Fokussiervorrichtung für elektronenstrahl mit spulenwindung, ferromagnetischem kern und permanentmagnet
US7443953B1 (en) * 2005-12-09 2008-10-28 Xradia, Inc. Structured anode X-ray source for X-ray microscopy
US20120211654A1 (en) * 2009-11-26 2012-08-23 Hitachi High-Technologies Corporation Scanning electron microscope

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Publication number Priority date Publication date Assignee Title
JPS58145049A (ja) * 1982-02-22 1983-08-29 Aloka Co Ltd 小型ｘ線管球
US5206895A (en) 1990-08-24 1993-04-27 Michael Danos X-ray tube
JP2551867Y2 (ja) * 1991-03-29 1997-10-27 日本電気ホームエレクトロニクス株式会社 フォーカスマグネット
GB9620160D0 (en) 1996-09-27 1996-11-13 Bede Scient Instr Ltd X-ray generator
GB9906886D0 (en) 1999-03-26 1999-05-19 Bede Scient Instr Ltd Method and apparatus for prolonging the life of an X-ray target
US6421422B1 (en) 1999-08-25 2002-07-16 General Electric Company Apparatus and method for increasing X-ray tube power per target thermal load
JP3481186B2 (ja) * 2000-06-08 2003-12-22 メディエックステック株式会社 Ｘ線発生器、ｘ線検査装置およびｘ線発生方法
JP4772212B2 (ja) * 2001-05-31 2011-09-14 浜松ホトニクス株式会社 Ｘ線発生装置
JP5153388B2 (ja) * 2008-03-06 2013-02-27 株式会社リガク Ｘ線発生装置ならびにｘ線分析装置、ｘ線透過像計測装置及びｘ線干渉計
JP2011233365A (ja) * 2010-04-27 2011-11-17 Toshiba Corp 回転陽極型ｘ線管及び回転陽極型ｘ線管装置
EP2587517B1 (en) * 2010-10-27 2015-09-09 Param Corporation Electron lens and the electron beam device
US8831179B2 (en) * 2011-04-21 2014-09-09 Carl Zeiss X-ray Microscopy, Inc. X-ray source with selective beam repositioning

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system
WO1992003837A1 (en) * 1990-08-24 1992-03-05 Michael Danos X-ray tube
US5506482A (en) * 1993-08-05 1996-04-09 Mitsubishi Denki Kabushiki Kaisha Magnetic focusing system with improved symmetry and manufacturability
JP2000082430A (ja) * 1998-09-08 2000-03-21 Hamamatsu Photonics Kk Ｘ線発生用ターゲット及びこれを用いたｘ線管
EP1146542A1 (en) * 2000-04-11 2001-10-17 General Electric Company Apparatus and method for increasing X-ray tube power per target thermal load
EP1471562A2 (en) * 2003-04-24 2004-10-27 FEI Company Particle-optical apparatus with a permanent-magnetic lens and an electrostatic lens
WO2006105332A2 (en) * 2005-03-31 2006-10-05 Moxtek, Inc. Magnetic head for x-ray source
US7443953B1 (en) * 2005-12-09 2008-10-28 Xradia, Inc. Structured anode X-ray source for X-ray microscopy
WO2008017376A1 (de) * 2006-08-05 2008-02-14 Carl Zeiss Industrielle Messtechnik Gmbh Fokussiervorrichtung für elektronenstrahl mit spulenwindung, ferromagnetischem kern und permanentmagnet
US20120211654A1 (en) * 2009-11-26 2012-08-23 Hitachi High-Technologies Corporation Scanning electron microscope

Also Published As

Publication number Publication date
KR20140049471A (ko) 2014-04-25
TWI576885B (zh) 2017-04-01
JP6114981B2 (ja) 2017-04-19
GB2508707A (en) 2014-06-11
GB201317784D0 (en) 2013-11-20
JP2014082130A (ja) 2014-05-08
TW201423819A (zh) 2014-06-16
KR101988538B1 (ko) 2019-06-12
US20140105367A1 (en) 2014-04-17
US9159524B2 (en) 2015-10-13

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20181008