MX2016005564A - Capa de carrera contra oxidacion. - Google Patents

Capa de carrera contra oxidacion.

Info

Publication number
MX2016005564A
MX2016005564A MX2016005564A MX2016005564A MX2016005564A MX 2016005564 A MX2016005564 A MX 2016005564A MX 2016005564 A MX2016005564 A MX 2016005564A MX 2016005564 A MX2016005564 A MX 2016005564A MX 2016005564 A MX2016005564 A MX 2016005564A
Authority
MX
Mexico
Prior art keywords
barrier layer
oxidation barrier
workpiece
oxidation
pvd
Prior art date
Application number
MX2016005564A
Other languages
English (en)
Inventor
Ramm Jürgen
Seibert Florian
Widrig Beno
Fopp-Spori Doris
Original Assignee
Oerlikon Surface Solutions Ag Pfäffikon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions Ag Pfäffikon filed Critical Oerlikon Surface Solutions Ag Pfäffikon
Publication of MX2016005564A publication Critical patent/MX2016005564A/es

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5826—Treatment with charged particles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/5853—Oxidation

Abstract

La invención se refiere a un método para producir una capa de barrera contra oxidación sobre un sustrato de pieza de trabajo, siendo que la capa de barrera contra oxidación se produce mediante deposición física por evaporación (PV) y es un óxido de un material afín a la superficie no revestida de la pieza de trabajo.
MX2016005564A 2013-11-03 2014-10-31 Capa de carrera contra oxidacion. MX2016005564A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP13005182 2013-11-03
PCT/EP2014/002924 WO2015062733A1 (de) 2013-11-03 2014-10-31 Oxidationsbarriereschicht

Publications (1)

Publication Number Publication Date
MX2016005564A true MX2016005564A (es) 2016-12-09

Family

ID=49578064

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2016005564A MX2016005564A (es) 2013-11-03 2014-10-31 Capa de carrera contra oxidacion.

Country Status (10)

Country Link
US (1) US10487391B2 (es)
EP (1) EP3063309B1 (es)
JP (1) JP2016537515A (es)
KR (1) KR102252440B1 (es)
CN (1) CN105917020B (es)
CA (1) CA2929460C (es)
ES (1) ES2932411T3 (es)
MX (1) MX2016005564A (es)
RU (1) RU2701801C2 (es)
WO (1) WO2015062733A1 (es)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3052463B1 (fr) * 2016-06-10 2020-05-08 Safran Procede de fabrication d'une piece en superalliage a base de nickel contenant de l'hafnium
JP7357542B2 (ja) * 2017-04-21 2023-10-06 エーリコン・サーフェス・ソリューションズ・アーゲー・プフェフィコン 超合金スパッタリングターゲット
EP3682040A1 (en) * 2017-09-15 2020-07-22 Oerlikon Surface Solutions AG, Pfäffikon Al-cr-o-based coatings with higher thermal stability and producing method thereof
EP3728695B1 (de) * 2017-12-22 2022-08-03 Oerlikon Surface Solutions AG, Pfäffikon Korrosions- und erosionsbeständige beschichtung für turbinenschaufeln von gasturbinen
WO2019195527A1 (en) * 2018-04-05 2019-10-10 Dmc Global Inc. Multilayer transition joint for aluminum smelter and method of making
KR20210124983A (ko) * 2019-02-08 2021-10-15 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 붕화물-함유 확산 장벽 층을 포함하는 코팅을 구비하는 코팅 공구
CN111500987B (zh) * 2019-12-17 2022-06-10 西南技术物理研究所 一种基于金属铪沉积二氧化铪薄膜的方法
EP3933066A1 (de) * 2020-06-30 2022-01-05 Oerlikon Surface Solutions AG, Pfäffikon Schutzschicht gegen umwelteinflüsse (umweltbarriereschicht) für ti-al material
CN115516126A (zh) * 2020-07-01 2022-12-23 欧瑞康表面处理解决方案股份公司普费菲孔 用于钛铝材料的防环境影响的保护层(环境阻挡层)

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6376861A (ja) 1986-09-19 1988-04-07 Nippon Steel Corp 燃焼器具用ステンレス鋼およびその製造法
US5741596A (en) 1989-02-21 1998-04-21 Boeing North American, Inc. Coating for oxidation protection of metal surfaces
FR2671798B1 (fr) 1991-01-21 1994-03-25 Propulsion Ste Europeenne Procede pour la protection anti-oxydation d'un materiau qui, au moins en surface, est constitue d'une ceramique formee par un compose du silicium, et materiau tel qu'obtenu par le procede.
US5310607A (en) * 1991-05-16 1994-05-10 Balzers Aktiengesellschaft Hard coating; a workpiece coated by such hard coating and a method of coating such workpiece by such hard coating
AT1669U1 (de) 1996-11-22 1997-09-25 Plansee Ag Oxidationsschutzschicht für refraktärmetalle
RU2218451C2 (ru) * 1996-12-10 2003-12-10 Сименс Акциенгезелльшафт Изделие с теплоизолирующим слоем, подвергаемое воздействию горячего газа, а также способ его изготовления
RU2154124C2 (ru) * 1997-01-06 2000-08-10 Парфенов Михаил Дмитриевич Способ нанесения цветного защитно-декоративного покрытия с рисунком
RU2120494C1 (ru) * 1997-06-17 1998-10-20 Международный Центр Электронно-Лучевых Технологий Института Электросварки им.Е.О.Патона НАН Украины Способ получения на подложке защитных покрытий с градиентом химического состава и структуры по толщине с внешним керамическим слоем, его вариант
FR2814473B1 (fr) * 2000-09-25 2003-06-27 Snecma Moteurs Procede de realisation d'un revetement de protection formant barriere thermique avec sous-couche de liaison sur un substrat en superalliage et piece obtenue
US7323247B2 (en) 2003-11-21 2008-01-29 Honeywell International, Inc. Oxidation barrier coatings for silicon based ceramics
JP2007196364A (ja) * 2005-12-28 2007-08-09 Sumitomo Electric Ind Ltd 表面被覆切削工具およびその製造方法
UA99819C2 (ru) 2006-10-10 2012-10-10 Ерлікон Трейдінг Аг, Трюббах Полученная дуговым испарением слоистая система для покрытия детали, способ ее получения и инструмент или деталь, покрытые такой системой
US9605338B2 (en) 2006-10-11 2017-03-28 Oerlikon Surface Solutions Ag, Pfaffikon Method for depositing electrically insulating layers
US7939181B2 (en) * 2006-10-11 2011-05-10 Oerlikon Trading Ag, Trubbach Layer system with at least one mixed crystal layer of a multi-oxide
US8652589B2 (en) 2008-01-25 2014-02-18 Oerlikon Trading Ag, Truebbach Permeation barrier layer
JP5445847B2 (ja) 2010-01-28 2014-03-19 三菱マテリアル株式会社 高速重切削加工で硬質被覆層がすぐれた耐チッピング性、耐摩耗性を発揮する表面被覆切削工具
EP2369031B1 (de) 2010-03-18 2016-05-04 Oerlikon Trading AG, Trübbach Beschichtung auf nial2o4 basis in spinellstruktur
DE102010028558A1 (de) * 2010-05-04 2011-11-10 Walter Ag PVD-Hybridverfahren zum Abscheiden von Mischkristallschichten
WO2013159870A1 (en) 2012-04-22 2013-10-31 Oerlikon Trading Ag, Trübbach Arc-deposited al-cr-o coatings having enhanced coating properties
WO2014111264A1 (en) 2013-01-18 2014-07-24 Oerlikon Trading Ag, Trübbach COATING METHOD FOR PRODUCING (Al,Cr)2O3-BASED COATINGS WITH ENHANCED PROPERTIES

Also Published As

Publication number Publication date
EP3063309B1 (de) 2022-10-12
KR20160083887A (ko) 2016-07-12
CN105917020B (zh) 2019-09-20
CN105917020A (zh) 2016-08-31
RU2701801C2 (ru) 2019-10-01
RU2016121873A (ru) 2017-12-07
EP3063309A1 (de) 2016-09-07
CA2929460A1 (en) 2015-05-07
WO2015062733A1 (de) 2015-05-07
ES2932411T3 (es) 2023-01-18
KR102252440B1 (ko) 2021-05-17
RU2016121873A3 (es) 2018-06-27
US20160273093A1 (en) 2016-09-22
JP2016537515A (ja) 2016-12-01
CA2929460C (en) 2023-03-28
US10487391B2 (en) 2019-11-26

Similar Documents

Publication Publication Date Title
MX2016005564A (es) Capa de carrera contra oxidacion.
MX2016002432A (es) Pelicula delgada hibrida organica-inorganica y metodo para su preparacion.
EP3122918A4 (en) Precursor and process design for photo-assisted metal atomic layer deposition (ald) and chemical vapor deposition (cvd)
MX2018000314A (es) Procesamiento de capa de material de perovskita.
EP3149222A4 (en) Plating or coating method for producing metal-ceramic coating on a substrate
EP3287542A4 (en) Method for roughening substrate, method for surface-treating substrate, method for producing spray-coated member, and spray-coated member
EP3358038A4 (en) DEPOSIT MASK, MANUFACTURING METHOD THEREOF AND METAL PLATE
EP3257964A4 (en) Manufacturing method for deposition mask, metal sheet used for producing deposition mask, and manufacturing method for said metal sheet
EP3514844A4 (en) METAL PLATE FOR DEPOSIT MASK, AND DEPOSIT MASK AND MANUFACTURING METHOD THEREOF
PH12018501352A1 (en) Grain-oriented electrical steel sheet and method for manufacturing grain-oriented electrical steel sheet
MX367029B (es) Broca que tiene un recubrimiento.
EP2981507A4 (en) Metal compound, method for preparing the same, selective metallization of surface of substrate with the metal compound
PH12015502695A1 (en) Metal coating on ceramic substrates
MX2015003080A (es) Proceso para producir una capa de borocarburo metalico en un sustrato.
WO2014063670A3 (de) Verfahren zur herstellung einer nanoporösen schicht auf einem substrat
EP3063791A4 (en) Metal oxide semiconductor sensor and method of forming a metal oxide semiconductor sensor using atomic layer deposition
EP3512979A4 (en) PARTICLE COATING BY ATOMIC LAYER DEPOSITION (ALD)
EP3097574A4 (en) Fabrication of enhanced supercapacitors using atomic layer deposition of metal oxide on nanostructures
EP3067438A4 (en) Method for forming intermediate layer formed between substrate and dlc film, method for forming dlc film, and intermediate layer formed between substrate and dlc film
WO2016061468A3 (en) High-speed deposition of mixed oxide barrier films
MX2017001398A (es) Elemento de conexion electrica, proceso para fabricar un elemento de conexion electrica y uso de un elemento de conexion electrica.
EP2989229A4 (en) Methods for the photo-initiated chemical vapor deposition (picvd) of coatings and coatings produced by these methods
MX2017009473A (es) Proceso para la produccion de laminados flexibles organicos-inorganicos.
SG2013020532A (en) Method of forming a coating on a metal substrate
MX2016016452A (es) Proceso para producir laminados organicos-inorganicos.