JP2008248311A5 - - Google Patents
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- Publication number
- JP2008248311A5 JP2008248311A5 JP2007090566A JP2007090566A JP2008248311A5 JP 2008248311 A5 JP2008248311 A5 JP 2008248311A5 JP 2007090566 A JP2007090566 A JP 2007090566A JP 2007090566 A JP2007090566 A JP 2007090566A JP 2008248311 A5 JP2008248311 A5 JP 2008248311A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- detachable
- holds
- regulating member
- substrate holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007090566A JP2008248311A (ja) | 2007-03-30 | 2007-03-30 | 真空蒸着装置 |
| US12/059,616 US20080236496A1 (en) | 2007-03-30 | 2008-03-31 | Vacuum evaporation apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007090566A JP2008248311A (ja) | 2007-03-30 | 2007-03-30 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008248311A JP2008248311A (ja) | 2008-10-16 |
| JP2008248311A5 true JP2008248311A5 (enExample) | 2009-11-05 |
Family
ID=39792119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007090566A Pending JP2008248311A (ja) | 2007-03-30 | 2007-03-30 | 真空蒸着装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20080236496A1 (enExample) |
| JP (1) | JP2008248311A (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8963094B2 (en) * | 2008-06-11 | 2015-02-24 | Rapiscan Systems, Inc. | Composite gamma-neutron detection system |
| KR101097311B1 (ko) * | 2009-06-24 | 2011-12-21 | 삼성모바일디스플레이주식회사 | 유기 발광 디스플레이 장치 및 이를 제조하기 위한 유기막 증착 장치 |
| US9491802B2 (en) * | 2012-02-17 | 2016-11-08 | Honeywell International Inc. | On-chip alkali dispenser |
| CN102632234B (zh) * | 2012-04-27 | 2013-10-16 | 四川大学 | 超细w-k金属粉末的真空热蒸发混料工艺 |
| JP2016069714A (ja) * | 2014-10-01 | 2016-05-09 | 新日鐵住金株式会社 | 基材保持具およびそれを備える成膜装置 |
| JP7159708B2 (ja) * | 2018-09-05 | 2022-10-25 | 富士フイルムビジネスイノベーション株式会社 | 定着装置、画像形成装置 |
| CN111710749B (zh) * | 2020-04-23 | 2022-09-09 | 中国科学院上海技术物理研究所 | 基于多基板二次拼接的长线列探测器拼接结构及实现方法 |
| CN112201709A (zh) * | 2020-09-25 | 2021-01-08 | 暨南大学 | 一种硒化锑薄膜太阳电池及其制备方法与应用 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60180998A (ja) * | 1984-02-27 | 1985-09-14 | Anelva Corp | 分子線エピタキシヤル成長装置用の基板保持装置 |
| SG114589A1 (en) * | 2001-12-12 | 2005-09-28 | Semiconductor Energy Lab | Film formation apparatus and film formation method and cleaning method |
| US7256370B2 (en) * | 2002-03-15 | 2007-08-14 | Steed Technology, Inc. | Vacuum thermal annealer |
| JP2005310472A (ja) * | 2004-04-20 | 2005-11-04 | Canon Inc | 真空蒸着用マスクおよび真空蒸着装置および真空蒸着方法 |
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2007
- 2007-03-30 JP JP2007090566A patent/JP2008248311A/ja active Pending
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2008
- 2008-03-31 US US12/059,616 patent/US20080236496A1/en not_active Abandoned