JP2014223734A5 - - Google Patents

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Publication number
JP2014223734A5
JP2014223734A5 JP2013103035A JP2013103035A JP2014223734A5 JP 2014223734 A5 JP2014223734 A5 JP 2014223734A5 JP 2013103035 A JP2013103035 A JP 2013103035A JP 2013103035 A JP2013103035 A JP 2013103035A JP 2014223734 A5 JP2014223734 A5 JP 2014223734A5
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JP
Japan
Prior art keywords
manufacturing
substrate
element substrate
substrate body
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013103035A
Other languages
English (en)
Japanese (ja)
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JP2014223734A (ja
JP6222985B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013103035A priority Critical patent/JP6222985B2/ja
Priority claimed from JP2013103035A external-priority patent/JP6222985B2/ja
Priority to US14/276,776 priority patent/US9108406B2/en
Publication of JP2014223734A publication Critical patent/JP2014223734A/ja
Publication of JP2014223734A5 publication Critical patent/JP2014223734A5/ja
Application granted granted Critical
Publication of JP6222985B2 publication Critical patent/JP6222985B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013103035A 2013-05-15 2013-05-15 液体吐出ヘッド、並びに、素子基板および液体吐出ヘッドの製造方法 Active JP6222985B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013103035A JP6222985B2 (ja) 2013-05-15 2013-05-15 液体吐出ヘッド、並びに、素子基板および液体吐出ヘッドの製造方法
US14/276,776 US9108406B2 (en) 2013-05-15 2014-05-13 Device substrate, liquid ejection head, and method for manufacturing device substrate and liquid ejection head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013103035A JP6222985B2 (ja) 2013-05-15 2013-05-15 液体吐出ヘッド、並びに、素子基板および液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2014223734A JP2014223734A (ja) 2014-12-04
JP2014223734A5 true JP2014223734A5 (enExample) 2016-06-09
JP6222985B2 JP6222985B2 (ja) 2017-11-01

Family

ID=51895450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013103035A Active JP6222985B2 (ja) 2013-05-15 2013-05-15 液体吐出ヘッド、並びに、素子基板および液体吐出ヘッドの製造方法

Country Status (2)

Country Link
US (1) US9108406B2 (enExample)
JP (1) JP6222985B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160318260A1 (en) * 2015-04-30 2016-11-03 Elwha Llc Printing systems and related methods
JP7547107B2 (ja) * 2020-07-30 2024-09-09 キヤノン株式会社 基板、液体吐出ヘッド用基板、液体吐出ヘッド、及び基板の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3984689B2 (ja) 1996-11-11 2007-10-03 キヤノン株式会社 インクジェットヘッドの製造方法
DE60126869T2 (de) * 2000-07-11 2007-11-08 Samsung Electronics Co., Ltd., Suwon Tintenstrahldruckkopf des mit Bläschen angetrieben Typs
JP2002178520A (ja) * 2000-10-02 2002-06-26 Canon Inc 液体吐出ヘッド、それを備えるヘッドカートリッジ、および液体吐出装置
TW505569B (en) * 2001-08-27 2002-10-11 Nano Dynamics Inc Ink-jet cavity structure for print head
JP5578859B2 (ja) * 2010-01-14 2014-08-27 キヤノン株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法

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