JP2010232195A - 微小試料加工観察方法及び装置 - Google Patents

微小試料加工観察方法及び装置 Download PDF

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Publication number
JP2010232195A
JP2010232195A JP2010156306A JP2010156306A JP2010232195A JP 2010232195 A JP2010232195 A JP 2010232195A JP 2010156306 A JP2010156306 A JP 2010156306A JP 2010156306 A JP2010156306 A JP 2010156306A JP 2010232195 A JP2010232195 A JP 2010232195A
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Prior art keywords
sample
micro sample
observation
micro
processing
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JP2010156306A
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Japanese (ja)
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JP2010232195A5 (enExample
Inventor
Mitsuo Tokuda
光雄 徳田
Muneyuki Fukuda
宗行 福田
Yasuhiro Mitsui
康裕 三井
Hidemi Koike
英巳 小池
Satoshi Tomimatsu
聡 富松
Hiroyasu Shichi
広康 志知
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Hitachi Ltd
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Hitachi Ltd
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Priority to JP2010156306A priority Critical patent/JP2010232195A/ja
Publication of JP2010232195A publication Critical patent/JP2010232195A/ja
Publication of JP2010232195A5 publication Critical patent/JP2010232195A5/ja
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JP2010156306A 2010-07-09 2010-07-09 微小試料加工観察方法及び装置 Pending JP2010232195A (ja)

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JP2010156306A JP2010232195A (ja) 2010-07-09 2010-07-09 微小試料加工観察方法及び装置

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JP2010156306A JP2010232195A (ja) 2010-07-09 2010-07-09 微小試料加工観察方法及び装置

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JP2008305836A Division JP5126031B2 (ja) 2008-12-01 2008-12-01 微小試料加工観察方法及び装置

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JP2010232195A true JP2010232195A (ja) 2010-10-14
JP2010232195A5 JP2010232195A5 (enExample) 2011-04-21

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013182756A (ja) * 2012-03-01 2013-09-12 Jeol Ltd 試料解析装置
JP2014522992A (ja) * 2011-08-08 2014-09-08 オムニプローブ、インコーポレイテッド ナノマニピュレータにより保持されたサンプルの処理方法
KR20200043895A (ko) 2018-10-18 2020-04-28 가부시키가이샤 히다치 하이테크 사이언스 하전 입자 빔 장치 및 시료 가공 관찰 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11108813A (ja) * 1997-10-03 1999-04-23 Hitachi Ltd 試料作製方法および装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11108813A (ja) * 1997-10-03 1999-04-23 Hitachi Ltd 試料作製方法および装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014522992A (ja) * 2011-08-08 2014-09-08 オムニプローブ、インコーポレイテッド ナノマニピュレータにより保持されたサンプルの処理方法
JP2013182756A (ja) * 2012-03-01 2013-09-12 Jeol Ltd 試料解析装置
KR20200043895A (ko) 2018-10-18 2020-04-28 가부시키가이샤 히다치 하이테크 사이언스 하전 입자 빔 장치 및 시료 가공 관찰 방법
US11282672B2 (en) 2018-10-18 2022-03-22 Hitachi High-Tech Science Corporation Charged particle beam apparatus and sample processing observation method

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