JP2014056783A5 - - Google Patents

Download PDF

Info

Publication number
JP2014056783A5
JP2014056783A5 JP2012202188A JP2012202188A JP2014056783A5 JP 2014056783 A5 JP2014056783 A5 JP 2014056783A5 JP 2012202188 A JP2012202188 A JP 2012202188A JP 2012202188 A JP2012202188 A JP 2012202188A JP 2014056783 A5 JP2014056783 A5 JP 2014056783A5
Authority
JP
Japan
Prior art keywords
sample
charged particle
particle beam
diaphragm
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012202188A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014056783A (ja
JP5936497B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2012202188A external-priority patent/JP5936497B2/ja
Priority to JP2012202188A priority Critical patent/JP5936497B2/ja
Priority to CN201380041332.8A priority patent/CN104520965A/zh
Priority to KR1020157000314A priority patent/KR20150022983A/ko
Priority to PCT/JP2013/068201 priority patent/WO2014041876A1/ja
Priority to DE112013003728.9T priority patent/DE112013003728T5/de
Priority to US14/422,186 priority patent/US9240305B2/en
Publication of JP2014056783A publication Critical patent/JP2014056783A/ja
Publication of JP2014056783A5 publication Critical patent/JP2014056783A5/ja
Publication of JP5936497B2 publication Critical patent/JP5936497B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012202188A 2012-09-14 2012-09-14 荷電粒子線装置及び試料観察方法 Expired - Fee Related JP5936497B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2012202188A JP5936497B2 (ja) 2012-09-14 2012-09-14 荷電粒子線装置及び試料観察方法
DE112013003728.9T DE112013003728T5 (de) 2012-09-14 2013-07-03 Mit einem Strahl geladener Teilchen arbeitende Vorrichtung und Probenbeobachtungsverfahren
KR1020157000314A KR20150022983A (ko) 2012-09-14 2013-07-03 하전 입자선 장치 및 시료 관찰 방법
PCT/JP2013/068201 WO2014041876A1 (ja) 2012-09-14 2013-07-03 荷電粒子線装置及び試料観察方法
CN201380041332.8A CN104520965A (zh) 2012-09-14 2013-07-03 带电粒子束装置以及试样观察方法
US14/422,186 US9240305B2 (en) 2012-09-14 2013-07-03 Charged particle beam device and sample observation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012202188A JP5936497B2 (ja) 2012-09-14 2012-09-14 荷電粒子線装置及び試料観察方法

Publications (3)

Publication Number Publication Date
JP2014056783A JP2014056783A (ja) 2014-03-27
JP2014056783A5 true JP2014056783A5 (enExample) 2015-01-22
JP5936497B2 JP5936497B2 (ja) 2016-06-22

Family

ID=50278010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012202188A Expired - Fee Related JP5936497B2 (ja) 2012-09-14 2012-09-14 荷電粒子線装置及び試料観察方法

Country Status (6)

Country Link
US (1) US9240305B2 (enExample)
JP (1) JP5936497B2 (enExample)
KR (1) KR20150022983A (enExample)
CN (1) CN104520965A (enExample)
DE (1) DE112013003728T5 (enExample)
WO (1) WO2014041876A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6302702B2 (ja) * 2014-02-27 2018-03-28 株式会社日立ハイテクノロジーズ 走査電子顕微鏡および画像生成方法
JP6711655B2 (ja) * 2016-03-18 2020-06-17 株式会社日立ハイテクサイエンス 集束イオンビーム装置
KR101798473B1 (ko) * 2016-05-30 2017-11-17 (주)코셈 고분해능 주사전자현미경
KR102181455B1 (ko) * 2018-12-28 2020-11-23 참엔지니어링(주) 시료 관찰 장치 및 방법
JP7369486B2 (ja) * 2020-03-02 2023-10-26 国立研究開発法人物質・材料研究機構 観測対象ガスの透過拡散経路観測装置及び観測対象ガスの計測方法、点欠陥位置検出装置及び点欠陥位置検出方法、並びに観測用の試料

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59146145A (ja) 1983-02-09 1984-08-21 Akashi Seisakusho Co Ltd 試料移動装置
JPH11162388A (ja) * 1997-12-01 1999-06-18 Jeol Ltd 荷電粒子線装置における試料装置
JP2004039708A (ja) * 2002-07-01 2004-02-05 Nikon Corp 荷電粒子線露光装置
JP2007324099A (ja) * 2006-06-05 2007-12-13 Hitachi High-Technologies Corp 試料微動システム、及び荷電粒子線装置
JP2008218342A (ja) * 2007-03-07 2008-09-18 Hitachi High-Technologies Corp 電子顕微鏡
US8105265B2 (en) * 2007-10-12 2012-01-31 Deka Products Limited Partnership Systems, devices and methods for cardiopulmonary treatment and procedures
JP5253800B2 (ja) 2007-12-26 2013-07-31 日本電子株式会社 試料保持体及び観察・検査方法並びに観察・検査装置
JP5320418B2 (ja) * 2011-01-31 2013-10-23 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP6207824B2 (ja) * 2012-10-01 2017-10-04 株式会社日立ハイテクノロジーズ 荷電粒子線装置、隔膜の位置調整方法および隔膜位置調整ジグ
JP6051014B2 (ja) * 2012-10-29 2016-12-21 株式会社日立ハイテクノロジーズ 試料格納用容器、荷電粒子線装置、及び画像取得方法

Similar Documents

Publication Publication Date Title
JP2014056783A5 (enExample)
JP2014038787A5 (enExample)
EP2927941A3 (en) X-ray inspection apparatus
JP2011044712A5 (enExample)
TW201614250A (en) Wafer inspection apparatus
JP2012134553A5 (ja) 露光装置、液体検出方法、及びデバイス製造方法
JP2014532877A5 (enExample)
JP2011044713A5 (enExample)
JP2011160001A5 (ja) 露光装置、及び液体検出方法
EP2950324A8 (en) Charged particle optical apparatus having a selectively positionable differential pressure module
WO2012050432A3 (en) Mechanical seal static air test apparatus
GB201221331D0 (en) Air sampling device
WO2015161914A3 (en) Method for detecting micro-colonies growing on a membrane or an agarose medium of a sample and a sterility testing apparatus
MX363799B (es) Método y aparato para análisis en línea mediante espectroscopia inducida por láser.
CN102267274A (zh) 微米精度三层平面工件对位机器人系统
JP2008507688A5 (enExample)
CN104568380B (zh) 镜头正反面检测装置及检测方法
JP2017039176A5 (enExample)
RU2012102492A (ru) Сканирующий зондовый микроскоп, совмещенный с устройством модификации поверхности объекта
CN105493225B (zh) 试样支架以及带电粒子装置
KR20150022983A (ko) 하전 입자선 장치 및 시료 관찰 방법
JP2019502025A5 (enExample)
CN104251765A (zh) 一种电力用安全帽测试装置
EP3344018B1 (en) Plasma irradiation device
JP2006233283A5 (enExample)