JP2012501554A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2012501554A5 JP2012501554A5 JP2011525243A JP2011525243A JP2012501554A5 JP 2012501554 A5 JP2012501554 A5 JP 2012501554A5 JP 2011525243 A JP2011525243 A JP 2011525243A JP 2011525243 A JP2011525243 A JP 2011525243A JP 2012501554 A5 JP2012501554 A5 JP 2012501554A5
- Authority
- JP
- Japan
- Prior art keywords
- type
- region
- substrate
- doped
- well region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 51
- 239000004065 semiconductor Substances 0.000 claims 8
- 230000005540 biological transmission Effects 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 239000012212 insulator Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000003071 parasitic effect Effects 0.000 description 3
- 238000002955 isolation Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US9329208P | 2008-08-29 | 2008-08-29 | |
| US61/093,292 | 2008-08-29 | ||
| PCT/US2009/055408 WO2010025391A2 (en) | 2008-08-29 | 2009-08-28 | Integrated photodiode for semiconductor substrates |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014075479A Division JP2014140065A (ja) | 2008-08-29 | 2014-04-01 | 半導体基板用集積フォトダイオード |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012501554A JP2012501554A (ja) | 2012-01-19 |
| JP2012501554A5 true JP2012501554A5 (enExample) | 2014-05-22 |
| JP5734854B2 JP5734854B2 (ja) | 2015-06-17 |
Family
ID=41722320
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011525243A Expired - Fee Related JP5734854B2 (ja) | 2008-08-29 | 2009-08-28 | 半導体基板用集積フォトダイオード |
| JP2014075479A Pending JP2014140065A (ja) | 2008-08-29 | 2014-04-01 | 半導体基板用集積フォトダイオード |
| JP2016060064A Expired - Fee Related JP6346911B2 (ja) | 2008-08-29 | 2016-03-24 | 半導体基板用集積フォトダイオード |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014075479A Pending JP2014140065A (ja) | 2008-08-29 | 2014-04-01 | 半導体基板用集積フォトダイオード |
| JP2016060064A Expired - Fee Related JP6346911B2 (ja) | 2008-08-29 | 2016-03-24 | 半導体基板用集積フォトダイオード |
Country Status (5)
| Country | Link |
|---|---|
| US (3) | US8410568B2 (enExample) |
| JP (3) | JP5734854B2 (enExample) |
| KR (2) | KR101627684B1 (enExample) |
| TW (1) | TW201013953A (enExample) |
| WO (1) | WO2010025391A2 (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8410568B2 (en) | 2008-08-29 | 2013-04-02 | Tau-Metrix, Inc. | Integrated photodiode for semiconductor substrates |
| JP5387212B2 (ja) * | 2009-07-31 | 2014-01-15 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
| US8787752B2 (en) * | 2009-08-21 | 2014-07-22 | California Institute Of Technology | Systems and methods for optically powering transducers and related transducers |
| US8586403B2 (en) * | 2011-02-15 | 2013-11-19 | Sunpower Corporation | Process and structures for fabrication of solar cells with laser ablation steps to form contact holes |
| US8486746B2 (en) * | 2011-03-29 | 2013-07-16 | Sunpower Corporation | Thin silicon solar cell and method of manufacture |
| US9559228B2 (en) | 2011-09-30 | 2017-01-31 | Sunpower Corporation | Solar cell with doped groove regions separated by ridges |
| US8992803B2 (en) | 2011-09-30 | 2015-03-31 | Sunpower Corporation | Dopant ink composition and method of fabricating a solar cell there from |
| US8586397B2 (en) | 2011-09-30 | 2013-11-19 | Sunpower Corporation | Method for forming diffusion regions in a silicon substrate |
| TWI427783B (zh) * | 2011-10-28 | 2014-02-21 | Ti Shiue Biotech Inc | 應用於分子檢測與鑑別的多接面結構之光二極體及其製造方法 |
| WO2013130257A1 (en) | 2012-03-01 | 2013-09-06 | California Institute Of Technology | Methods of modulating microlasers at ultralow power levels, and systems thereof |
| JP2015530564A (ja) | 2012-07-25 | 2015-10-15 | カリフォルニア インスティチュート オブ テクノロジー | 機能ゲート及びベース電極を有するナノピラー電界効果型及び接合型トランジスタ |
| US9252234B2 (en) * | 2012-09-06 | 2016-02-02 | International Business Machines Corporation | Partially-blocked well implant to improve diode ideality with SiGe anode |
| WO2014074180A1 (en) | 2012-11-09 | 2014-05-15 | California Institute Of Technology | Nanopillar field-effect and junction transistors |
| US11837669B2 (en) * | 2013-03-15 | 2023-12-05 | ActLight SA | Photo detector systems and methods of operating same |
| WO2014201286A1 (en) | 2013-06-12 | 2014-12-18 | Popovic Milos A | Optical modulator from standard fabrication processing |
| DE102014218772A1 (de) * | 2014-09-18 | 2016-03-24 | Technische Universität Dresden | Photovoltaisches Element |
| FR3029373B1 (fr) * | 2014-12-02 | 2018-01-12 | Sunpartner Technologies | Dispositif electronique associe a un module photovoltaique pour optimiser le debit d'une transmission bidirectionnelle de type vlc |
| US11105974B2 (en) * | 2015-06-30 | 2021-08-31 | Massachusetts Institute Of Technology | Waveguide-coupled silicon-germanium photodetectors and fabrication methods for same |
| CN110931578B (zh) * | 2018-09-20 | 2024-05-28 | 台湾积体电路制造股份有限公司 | 光电探测器及其形成方法 |
| EP3850665B1 (en) * | 2019-01-30 | 2023-11-15 | Yangtze Memory Technologies Co., Ltd. | Capacitor structure having vertical diffusion plates |
| US10892373B2 (en) * | 2019-02-07 | 2021-01-12 | Newport Fab, Llc | Germanium photodiode with silicon cap |
| US11251217B2 (en) * | 2019-04-17 | 2022-02-15 | ActLight SA | Photodetector sensor arrays |
| US12474453B2 (en) | 2022-01-20 | 2025-11-18 | ActLight SA | Control techniques for photodetector systems |
| CN115206940B (zh) * | 2022-06-30 | 2024-11-29 | 上海韦尔半导体股份有限公司 | 一种用于插指形光电二极管电势分析的测试结构与测试方法 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5181586A (enExample) * | 1975-01-13 | 1976-07-16 | Nippon Electric Co | |
| JPS5526661A (en) * | 1978-08-15 | 1980-02-26 | Sharp Corp | Photo-semiconductor device |
| JPS57100761A (en) * | 1980-12-16 | 1982-06-23 | Fujitsu Ltd | Semiconductor light sensitive device |
| JPS6355980A (ja) * | 1986-08-26 | 1988-03-10 | Matsushita Electric Works Ltd | フオトダイオ−ドアレイの製法 |
| JPS6481522A (en) * | 1987-09-24 | 1989-03-27 | Agency Ind Science Techn | Optical control circuit and semiconductor device constituting said circuit |
| JP3029497B2 (ja) * | 1991-12-20 | 2000-04-04 | ローム株式会社 | フォトダイオードアレイおよびその製造法 |
| JPH06268247A (ja) * | 1993-03-15 | 1994-09-22 | Matsushita Electric Works Ltd | 光結合型半導体リレー |
| US5360987A (en) * | 1993-11-17 | 1994-11-01 | At&T Bell Laboratories | Semiconductor photodiode device with isolation region |
| JPH09260501A (ja) * | 1996-03-25 | 1997-10-03 | Sanyo Electric Co Ltd | ホトダイオード内蔵半導体集積回路 |
| JPH09260715A (ja) * | 1996-03-25 | 1997-10-03 | Sanyo Electric Co Ltd | ホトダイオード内蔵半導体集積回路 |
| JPH1051017A (ja) * | 1996-08-02 | 1998-02-20 | Sanyo Electric Co Ltd | 半導体装置 |
| JP2970580B2 (ja) * | 1997-03-21 | 1999-11-02 | 日本電気株式会社 | 半導体チップ、光受信モジュールおよび光受信モジュールの製造方法 |
| US6529018B1 (en) * | 1998-08-28 | 2003-03-04 | International Business Machines Corporation | Method for monitoring defects in polysilicon gates in semiconductor devices responsive to illumination by incident light |
| JP2001077400A (ja) * | 1999-08-31 | 2001-03-23 | Tokai Rika Co Ltd | 半導体フォトデバイス |
| TW419834B (en) | 1999-09-01 | 2001-01-21 | Opto Tech Corp | Photovoltaic generator |
| JP2001135849A (ja) * | 1999-11-05 | 2001-05-18 | Matsushita Electronics Industry Corp | 受光装置 |
| JP2003007975A (ja) * | 2001-06-27 | 2003-01-10 | Sony Corp | 半導体装置およびその製造方法 |
| US20030015705A1 (en) | 2001-07-17 | 2003-01-23 | Motorola, Inc. | Structure and method for fabricating semiconductor structures and devices with an energy source |
| JP3859480B2 (ja) | 2001-10-17 | 2006-12-20 | 株式会社ルネサステクノロジ | 検査方法 |
| JP2004006778A (ja) * | 2002-04-04 | 2004-01-08 | Toshiba Corp | Mosfet、その製造方法及びそれを用いた光半導体リレー装置 |
| GB0216075D0 (en) | 2002-07-11 | 2002-08-21 | Qinetiq Ltd | Photodetector circuits |
| KR20040057238A (ko) | 2002-12-26 | 2004-07-02 | 삼성전기주식회사 | 포토다이오드, 이를 구비한 광전자 집적회로장치 및 그제조방법 |
| JP2005086063A (ja) | 2003-09-10 | 2005-03-31 | Keio Gijuku | フォトダイオード及び集積化光受信器 |
| JP2005158834A (ja) | 2003-11-21 | 2005-06-16 | Sanyo Electric Co Ltd | 光半導体装置 |
| TWI226137B (en) | 2004-01-09 | 2005-01-01 | Integrated Crystal Technology | Structure of dual-pad high speed photodiode |
| US7535089B2 (en) | 2005-11-01 | 2009-05-19 | Massachusetts Institute Of Technology | Monolithically integrated light emitting devices |
| US7928317B2 (en) * | 2006-06-05 | 2011-04-19 | Translucent, Inc. | Thin film solar cell |
| US8410568B2 (en) | 2008-08-29 | 2013-04-02 | Tau-Metrix, Inc. | Integrated photodiode for semiconductor substrates |
-
2009
- 2009-08-25 US US12/547,463 patent/US8410568B2/en not_active Expired - Fee Related
- 2009-08-28 TW TW098129125A patent/TW201013953A/zh unknown
- 2009-08-28 KR KR1020117007285A patent/KR101627684B1/ko not_active Expired - Fee Related
- 2009-08-28 JP JP2011525243A patent/JP5734854B2/ja not_active Expired - Fee Related
- 2009-08-28 KR KR1020147027667A patent/KR101619206B1/ko not_active Expired - Fee Related
- 2009-08-28 WO PCT/US2009/055408 patent/WO2010025391A2/en not_active Ceased
-
2013
- 2013-02-28 US US13/781,437 patent/US8872297B2/en not_active Expired - Fee Related
-
2014
- 2014-04-01 JP JP2014075479A patent/JP2014140065A/ja active Pending
- 2014-10-23 US US14/522,175 patent/US20160104812A1/en not_active Abandoned
-
2016
- 2016-03-24 JP JP2016060064A patent/JP6346911B2/ja not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2012501554A5 (enExample) | ||
| JP6346911B2 (ja) | 半導体基板用集積フォトダイオード | |
| JP2014140065A5 (enExample) | ||
| US8928101B2 (en) | Semiconductor device | |
| KR100984542B1 (ko) | 반도체장치 및 이의 제조방법 | |
| US20120199883A1 (en) | Solid-state image pickup device | |
| CN107887375B (zh) | 半导体静电放电保护元件 | |
| JP5359072B2 (ja) | 半導体装置 | |
| US9252298B2 (en) | Photodiode device with reducible space charge region | |
| US12154917B2 (en) | Semiconductor image sensor | |
| US7615396B1 (en) | Photodiode stack for photo MOS relay using junction isolation technology | |
| CN101383362A (zh) | 图像传感器及其制造方法 | |
| JP4460272B2 (ja) | パワートランジスタおよびそれを用いた半導体集積回路 | |
| TWI682518B (zh) | 靜電放電防護元件 | |
| JP4043246B2 (ja) | 光半導体集積回路装置 | |
| CN109983582B (zh) | 摄像元件及摄像元件的制造方法 | |
| JP2014123632A (ja) | 半導体装置 | |
| JP3838156B2 (ja) | 半導体集積回路装置 | |
| JP2022134417A (ja) | フォトダイオード | |
| TWM671595U (zh) | 光電單元 | |
| JP5970763B2 (ja) | 半導体装置 | |
| JP5102011B2 (ja) | 半導体装置 | |
| JP2004063955A (ja) | 半導体装置 | |
| JP2014143378A (ja) | Esd保護素子を有する半導体装置 | |
| JP2011138965A (ja) | 半導体装置 |