JP2012156251A5 - - Google Patents
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- Publication number
- JP2012156251A5 JP2012156251A5 JP2011013180A JP2011013180A JP2012156251A5 JP 2012156251 A5 JP2012156251 A5 JP 2012156251A5 JP 2011013180 A JP2011013180 A JP 2011013180A JP 2011013180 A JP2011013180 A JP 2011013180A JP 2012156251 A5 JP2012156251 A5 JP 2012156251A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- electrode pad
- wiring
- semiconductor chip
- semiconductor package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 25
- 238000007789 sealing Methods 0.000 claims description 15
- 230000003014 reinforcing effect Effects 0.000 claims description 5
- 239000004745 nonwoven fabric Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000002759 woven fabric Substances 0.000 claims description 3
- 239000004744 fabric Substances 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011013180A JP5715835B2 (ja) | 2011-01-25 | 2011-01-25 | 半導体パッケージ及びその製造方法 |
| US13/354,663 US9142524B2 (en) | 2011-01-25 | 2012-01-20 | Semiconductor package and method for manufacturing semiconductor package |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011013180A JP5715835B2 (ja) | 2011-01-25 | 2011-01-25 | 半導体パッケージ及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012156251A JP2012156251A (ja) | 2012-08-16 |
| JP2012156251A5 true JP2012156251A5 (enExample) | 2013-12-26 |
| JP5715835B2 JP5715835B2 (ja) | 2015-05-13 |
Family
ID=46543582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011013180A Active JP5715835B2 (ja) | 2011-01-25 | 2011-01-25 | 半導体パッケージ及びその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9142524B2 (enExample) |
| JP (1) | JP5715835B2 (enExample) |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120090883A1 (en) * | 2010-10-13 | 2012-04-19 | Qualcomm Incorporated | Method and Apparatus for Improving Substrate Warpage |
| JP5903337B2 (ja) * | 2012-06-08 | 2016-04-13 | 新光電気工業株式会社 | 半導体パッケージ及びその製造方法 |
| CN103730436B (zh) * | 2012-10-15 | 2016-11-16 | 景硕科技股份有限公司 | 线路载板的增层结构 |
| JP2014086598A (ja) * | 2012-10-24 | 2014-05-12 | Hitachi Chemical Co Ltd | 半導体装置の製造方法、半導体装置、及び感光性樹脂組成物 |
| JP6161380B2 (ja) * | 2013-04-17 | 2017-07-12 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
| KR102250997B1 (ko) | 2014-05-02 | 2021-05-12 | 삼성전자주식회사 | 반도체 패키지 |
| US9728498B2 (en) * | 2015-06-30 | 2017-08-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Package structure |
| US9711458B2 (en) * | 2015-11-13 | 2017-07-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and formation method for chip package |
| EP3440246B1 (en) | 2016-04-07 | 2024-11-27 | Adetexs Ltd | Improvements relating to textiles incorporating electronic devices |
| US10600748B2 (en) | 2016-06-20 | 2020-03-24 | Samsung Electronics Co., Ltd. | Fan-out semiconductor package |
| TWI584425B (zh) * | 2016-06-27 | 2017-05-21 | 力成科技股份有限公司 | 扇出型晶圓級封裝結構 |
| JP2018018936A (ja) * | 2016-07-27 | 2018-02-01 | イビデン株式会社 | 配線基板 |
| CN109844938B (zh) * | 2016-08-12 | 2023-07-18 | Qorvo美国公司 | 具有增强性能的晶片级封装 |
| JP6291094B2 (ja) * | 2017-01-24 | 2018-03-14 | 信越化学工業株式会社 | 積層型半導体装置、及び封止後積層型半導体装置 |
| US11152363B2 (en) | 2018-03-28 | 2021-10-19 | Qorvo Us, Inc. | Bulk CMOS devices with enhanced performance and methods of forming the same utilizing bulk CMOS process |
| WO2019195428A1 (en) | 2018-04-04 | 2019-10-10 | Qorvo Us, Inc. | Gallium-nitride-based module with enhanced electrical performance and process for making the same |
| US12046505B2 (en) | 2018-04-20 | 2024-07-23 | Qorvo Us, Inc. | RF devices with enhanced performance and methods of forming the same utilizing localized SOI formation |
| CN118213279A (zh) | 2018-07-02 | 2024-06-18 | Qorvo美国公司 | Rf半导体装置及其制造方法 |
| CN110783300B (zh) * | 2018-07-26 | 2021-08-13 | 钰桥半导体股份有限公司 | 具有调节件及防裂结构的导线架衬底及其覆晶组体 |
| JP7211757B2 (ja) * | 2018-10-22 | 2023-01-24 | 新光電気工業株式会社 | 配線基板 |
| US11646242B2 (en) | 2018-11-29 | 2023-05-09 | Qorvo Us, Inc. | Thermally enhanced semiconductor package with at least one heat extractor and process for making the same |
| US12057374B2 (en) | 2019-01-23 | 2024-08-06 | Qorvo Us, Inc. | RF devices with enhanced performance and methods of forming the same |
| US11387157B2 (en) | 2019-01-23 | 2022-07-12 | Qorvo Us, Inc. | RF devices with enhanced performance and methods of forming the same |
| US12046570B2 (en) | 2019-01-23 | 2024-07-23 | Qorvo Us, Inc. | RF devices with enhanced performance and methods of forming the same |
| US12125825B2 (en) | 2019-01-23 | 2024-10-22 | Qorvo Us, Inc. | RF devices with enhanced performance and methods of forming the same |
| US12046483B2 (en) | 2019-01-23 | 2024-07-23 | Qorvo Us, Inc. | RF devices with enhanced performance and methods of forming the same |
| WO2020153983A1 (en) | 2019-01-23 | 2020-07-30 | Qorvo Us, Inc. | Rf semiconductor device and manufacturing method thereof |
| US11139179B2 (en) | 2019-09-09 | 2021-10-05 | Advanced Semiconductor Engineering, Inc. | Embedded component package structure and manufacturing method thereof |
| US12074086B2 (en) | 2019-11-01 | 2024-08-27 | Qorvo Us, Inc. | RF devices with nanotube particles for enhanced performance and methods of forming the same |
| US11646289B2 (en) | 2019-12-02 | 2023-05-09 | Qorvo Us, Inc. | RF devices with enhanced performance and methods of forming the same |
| US11923238B2 (en) | 2019-12-12 | 2024-03-05 | Qorvo Us, Inc. | Method of forming RF devices with enhanced performance including attaching a wafer to a support carrier by a bonding technique without any polymer adhesive |
| US12129168B2 (en) | 2019-12-23 | 2024-10-29 | Qorvo Us, Inc. | Microelectronics package with vertically stacked MEMS device and controller device |
| CN116583949A (zh) | 2020-12-11 | 2023-08-11 | Qorvo美国公司 | 多级3d堆叠式封装和其形成方法 |
| US12062571B2 (en) | 2021-03-05 | 2024-08-13 | Qorvo Us, Inc. | Selective etching process for SiGe and doped epitaxial silicon |
| KR20220151431A (ko) | 2021-05-06 | 2022-11-15 | 삼성전기주식회사 | 인쇄회로기판 |
| CN114188290B (zh) * | 2021-12-03 | 2024-11-22 | 江苏中科智芯集成科技有限公司 | 一种降低翘曲的扇出型封装结构 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7202556B2 (en) * | 2001-12-20 | 2007-04-10 | Micron Technology, Inc. | Semiconductor package having substrate with multi-layer metal bumps |
| WO2004064153A1 (en) * | 2003-01-16 | 2004-07-29 | Casio Computer Co., Ltd. | Semiconductor device and method of manufacturing the same |
| JP4441325B2 (ja) * | 2004-05-18 | 2010-03-31 | 新光電気工業株式会社 | 多層配線の形成方法および多層配線基板の製造方法 |
| JP4701842B2 (ja) * | 2005-06-02 | 2011-06-15 | 凸版印刷株式会社 | 半導体装置基板の製造方法 |
| JP4072176B2 (ja) * | 2005-08-29 | 2008-04-09 | 新光電気工業株式会社 | 多層配線基板の製造方法 |
| CN102098876B (zh) | 2006-04-27 | 2014-04-09 | 日本电气株式会社 | 用于电路基板的制造工艺 |
| DE102006062473A1 (de) * | 2006-12-28 | 2008-07-03 | Qimonda Ag | Halbleiterbauelement mit auf einem Substrat montiertem Chip |
| JP4073945B1 (ja) * | 2007-01-12 | 2008-04-09 | 新光電気工業株式会社 | 多層配線基板の製造方法 |
| JP4842167B2 (ja) * | 2007-02-07 | 2011-12-21 | 新光電気工業株式会社 | 多層配線基板の製造方法 |
| EP2372756A1 (en) * | 2007-03-13 | 2011-10-05 | Semiconductor Energy Laboratory Co, Ltd. | Semiconductor device and manufacturing method thereof |
| EP1970951A3 (en) | 2007-03-13 | 2009-05-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| JP5496445B2 (ja) * | 2007-06-08 | 2014-05-21 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
| JP5295596B2 (ja) | 2008-03-19 | 2013-09-18 | 新光電気工業株式会社 | 多層配線基板およびその製造方法 |
| JP4489821B2 (ja) * | 2008-07-02 | 2010-06-23 | 新光電気工業株式会社 | 半導体装置及びその製造方法 |
| KR101517598B1 (ko) * | 2008-07-21 | 2015-05-06 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
| WO2010010910A1 (ja) * | 2008-07-23 | 2010-01-28 | 日本電気株式会社 | コアレス配線基板、半導体装置及びそれらの製造方法 |
| CN102106198B (zh) * | 2008-07-23 | 2013-05-01 | 日本电气株式会社 | 半导体装置及其制造方法 |
| JPWO2010024233A1 (ja) * | 2008-08-27 | 2012-01-26 | 日本電気株式会社 | 機能素子を内蔵可能な配線基板及びその製造方法 |
| JP5249173B2 (ja) * | 2009-10-30 | 2013-07-31 | 新光電気工業株式会社 | 半導体素子実装配線基板及びその製造方法 |
| JP2011187473A (ja) * | 2010-03-04 | 2011-09-22 | Nec Corp | 半導体素子内蔵配線基板 |
| JP5570855B2 (ja) * | 2010-03-18 | 2014-08-13 | 新光電気工業株式会社 | 配線基板及びその製造方法並びに半導体装置及びその製造方法 |
-
2011
- 2011-01-25 JP JP2011013180A patent/JP5715835B2/ja active Active
-
2012
- 2012-01-20 US US13/354,663 patent/US9142524B2/en active Active
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