JP2014086598A - 半導体装置の製造方法、半導体装置、及び感光性樹脂組成物 - Google Patents
半導体装置の製造方法、半導体装置、及び感光性樹脂組成物 Download PDFInfo
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- JP2014086598A JP2014086598A JP2012235060A JP2012235060A JP2014086598A JP 2014086598 A JP2014086598 A JP 2014086598A JP 2012235060 A JP2012235060 A JP 2012235060A JP 2012235060 A JP2012235060 A JP 2012235060A JP 2014086598 A JP2014086598 A JP 2014086598A
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Abstract
【解決手段】この半導体装置の製造方法では、封止工程において半導体素子3の封止及び第1の絶縁層4の形成を一括で行いながら、剥離工程において半導体素子3の反対面S2を容易に露出することができる。よって、従来の半導体装置の製造方法と比較して、再配線形成された半導体装置100を薄型化させながら効率よく製造できる。
【選択図】図1
Description
次に、上述の半導体装置の製造に用いられる感光性樹脂組成物について詳細に説明するが、本発明はこれらの樹脂組成に限定されるものではない。
まず、支持体1として直径220mm、厚み1.5mmのSUS板を準備した。次に、SUS板の片側に仮固定層である仮固定用フィルム2を、ラミネータを用いて貼り付けた(図1(a)参照)。SUS板からはみ出した仮固定用フィルム2については、カッターナイフで切り離した。
次いで、図1(b)に示すように、7.3mm×7.3mmの半導体素子3(株式会社ウォルツ製 CC80−0101JY)を半導体素子3の反対面S2側と仮固定用フィルム2とが貼り合わさるように格子状に配置した。半導体素子3の搭載数は293個、ピッチは縦方向、横方向ともに9.6mmとした。半導体素子3の配置にはダイソーター(キヤノンマシナリー株式会社製 CAP3500)を用いた。配置時の荷重は半導体素子1個当り1kgfとした。
半導体素子3の回路面S1を覆うように封止し、第1の絶縁層4を形成するために用いる感光性樹脂組成物として、以下に示すものを調製した。
第1の絶縁層4を形成し、表1及び2に示す条件で熱硬化を行った後の成形物の反りについて評価した(図1(c)参照)。詳細には、第1の絶縁層4における直径200mmの範囲を室温下(25℃)で測定し、以下の基準に基づいて評価した。評価結果を表3、4に示す。いずれも、反り量が2mm未満であり、半導体装置100を製造する上で問題がない範囲であった。
A:反り量が1mm未満
B:反り量が1mm以上、2mm未満
第1の絶縁層4を形成し、表1及び2に示す条件で熱硬化を行った後の感光性樹脂組成物の埋込性について、目視で確認し以下の基準に基づいて評価した。
A:半導体素子間に充分に樹脂が埋め込まれており、未充填部がほとんどないもの。
B:半導体素子間に未充填部が多少確認されるが、半導体装置100を製造する上で問題ないもの。
第1の絶縁層4を形成し、表1及び2に示す条件で熱硬化を行った後の半導体素子3の回路面S1側の感光性樹脂組成物の平滑性を評価した。平滑性の評価は、表面粗さ計を用いて半導体素子3の回路面S1の段差を測定し、以下の基準に基づいて評価した。いずれも、段差が10μm未満であり、半導体装置100を製造する上で問題ない範囲であった。
A:感光性樹脂組成物の表面の段差が2μm未満
B:感光性樹脂組成物の表面の段差が2μm以上、5μm未満
C:感光性樹脂組成物の表面の段差が10μm未満
A:壁面がほぼ平滑なもの。
B:壁面に多少段差が確認されるが、半導体装置100を製造する上で問題ないもの。
Claims (10)
- 半導体素子を封止材により封止すると共に、当該半導体素子の回路面上に絶縁層を形成し、当該絶縁層に設けた開口に配線パターンを形成してなる半導体装置の製造方法であって、
支持体上に、少なくとも一つ以上の前記半導体素子を、前記半導体素子における前記回路面の反対面側と当該支持体とが対向するように配置する配置工程と、
前記半導体素子の前記回路面上に、前記封止材となる絶縁性の感光性樹脂組成物により前記絶縁層を形成することで、当該半導体素子の当該回路面を封止する封止工程と、
前記絶縁層に露光処理及び現像処理を施すことにより、当該絶縁層の表面から前記半導体素子の前記回路面にまで至る前記開口を設ける開口形成工程と、
前記支持体を前記半導体素子から剥離し、当該半導体素子の反対面を露出させる剥離工程と、
を備えたことを特徴とする半導体装置の製造方法。 - 前記配置工程の前工程として、前記支持体の表面に、前記半導体素子と当該支持体とを仮固定させるための仮固定層を形成する工程を更に備えたことを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記開口形成工程の後工程として、前記絶縁層上に、前記配線パターンの下地となるシード層を形成する工程を更に備えたことを特徴とする請求項1又は2に記載の半導体装置の製造方法。
- 前記封止工程において、前記感光性樹脂組成物の温度を50〜120℃とし、且つ封止時間を10〜300秒とすることを特徴とする請求項1〜3のいずれか一項に記載の半導体装置の製造方法。
- 前記封止工程において、前記感光性樹脂組成物の封止圧力を0.2〜2.0MPaとすることを特徴とする請求項1〜4のいずれか一項に記載の半導体装置の製造方法。
- 前記封止工程において、前記絶縁層の厚みT2を50〜750μmとすることを特徴とする請求項1〜5のいずれか一項に記載の半導体装置の製造方法。
- 前記封止工程において、前記絶縁層の厚みT2と前記半導体素子の厚みT1との差(T2−T1)を5〜50μmとすることを特徴とする請求項1〜6のいずれか一項に記載の半導体装置の製造方法。
- 請求項1〜7のいずれか一項に記載の方法により得られる半導体装置。
- 請求項1〜7のいずれか一項に記載の方法において使用される感光性樹脂組成物であって、
(a)カルボキシル基とエチレン性不飽和基とを含有する樹脂、(b)光重合開始剤、(c)熱硬化剤、及び(d)最大粒径が5μm以下であり且つ平均粒径が1μm以下である無機フィラーを含有する感光性樹脂組成物。 - 請求項9に記載の感光性樹脂組成物を支持体上に塗布後、乾燥して得られる感光性樹脂フィルム。
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JP2016066726A (ja) * | 2014-09-25 | 2016-04-28 | 日立化成株式会社 | 半導体封止用部材、半導体装置の製造方法及び半導体装置 |
JP2016134516A (ja) * | 2015-01-20 | 2016-07-25 | ローム株式会社 | 半導体装置およびその製造方法 |
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