JP2012023032A - 蓄電装置の作製方法 - Google Patents
蓄電装置の作製方法 Download PDFInfo
- Publication number
- JP2012023032A JP2012023032A JP2011135757A JP2011135757A JP2012023032A JP 2012023032 A JP2012023032 A JP 2012023032A JP 2011135757 A JP2011135757 A JP 2011135757A JP 2011135757 A JP2011135757 A JP 2011135757A JP 2012023032 A JP2012023032 A JP 2012023032A
- Authority
- JP
- Japan
- Prior art keywords
- positive electrode
- electrode layer
- layer
- vapor deposition
- lithium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 238000003860 storage Methods 0.000 title claims description 13
- 238000000034 method Methods 0.000 claims abstract description 39
- 239000003792 electrolyte Substances 0.000 claims abstract description 36
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 22
- 238000004544 sputter deposition Methods 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 238000001704 evaporation Methods 0.000 claims description 3
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 abstract description 27
- 229910001416 lithium ion Inorganic materials 0.000 abstract description 27
- 239000000463 material Substances 0.000 abstract description 24
- 238000007740 vapor deposition Methods 0.000 abstract description 9
- 239000007788 liquid Substances 0.000 abstract description 4
- 239000007787 solid Substances 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract description 4
- 238000005979 thermal decomposition reaction Methods 0.000 abstract description 3
- 230000008016 vaporization Effects 0.000 abstract description 2
- 239000007769 metal material Substances 0.000 abstract 1
- 238000001947 vapour-phase growth Methods 0.000 abstract 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 25
- 229910052744 lithium Inorganic materials 0.000 description 25
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 17
- 239000002585 base Substances 0.000 description 16
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 16
- 239000007774 positive electrode material Substances 0.000 description 13
- 239000007789 gas Substances 0.000 description 10
- 239000002994 raw material Substances 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000007773 negative electrode material Substances 0.000 description 6
- -1 LiClO 4 Chemical class 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- AQBLLJNPHDIAPN-LNTINUHCSA-K iron(3+);(z)-4-oxopent-2-en-2-olate Chemical compound [Fe+3].C\C([O-])=C\C(C)=O.C\C([O-])=C\C(C)=O.C\C([O-])=C\C(C)=O AQBLLJNPHDIAPN-LNTINUHCSA-K 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 239000011149 active material Substances 0.000 description 4
- 150000004696 coordination complex Chemical class 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000012495 reaction gas Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- NXDKFTBUQRISLC-UHFFFAOYSA-N tetralithium butan-1-olate Chemical compound [O-]CCCC.[O-]CCCC.[O-]CCCC.[O-]CCCC.[Li+].[Li+].[Li+].[Li+] NXDKFTBUQRISLC-UHFFFAOYSA-N 0.000 description 4
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- 229910018119 Li 3 PO 4 Inorganic materials 0.000 description 3
- 229910012305 LiPON Inorganic materials 0.000 description 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 3
- 229910021419 crystalline silicon Inorganic materials 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 239000011572 manganese Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 210000000352 storage cell Anatomy 0.000 description 3
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- 229910015643 LiMn 2 O 4 Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010574 gas phase reaction Methods 0.000 description 2
- 229910021450 lithium metal oxide Inorganic materials 0.000 description 2
- 229910001386 lithium phosphate Inorganic materials 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- TWQULNDIKKJZPH-UHFFFAOYSA-K trilithium;phosphate Chemical compound [Li+].[Li+].[Li+].[O-]P([O-])([O-])=O TWQULNDIKKJZPH-UHFFFAOYSA-K 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- OIFBSDVPJOWBCH-UHFFFAOYSA-N Diethyl carbonate Chemical compound CCOC(=O)OCC OIFBSDVPJOWBCH-UHFFFAOYSA-N 0.000 description 1
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- KMTRUDSVKNLOMY-UHFFFAOYSA-N Ethylene carbonate Chemical compound O=C1OCCO1 KMTRUDSVKNLOMY-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910018068 Li 2 O Inorganic materials 0.000 description 1
- 229910009324 Li2S-SiS2-Li3PO4 Inorganic materials 0.000 description 1
- 229910009328 Li2S-SiS2—Li3PO4 Inorganic materials 0.000 description 1
- 229910007295 Li2S—SiS2—Li3PO4 Inorganic materials 0.000 description 1
- 229910015015 LiAsF 6 Inorganic materials 0.000 description 1
- 229910013063 LiBF 4 Inorganic materials 0.000 description 1
- 229910013684 LiClO 4 Inorganic materials 0.000 description 1
- 229910012851 LiCoO 2 Inorganic materials 0.000 description 1
- 229910010707 LiFePO 4 Inorganic materials 0.000 description 1
- 229910013870 LiPF 6 Inorganic materials 0.000 description 1
- 229910012313 LiPOTi Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 229910001413 alkali metal ion Inorganic materials 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 229910001420 alkaline earth metal ion Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 159000000009 barium salts Chemical class 0.000 description 1
- PPYIVKOTTQCYIV-UHFFFAOYSA-L beryllium;selenate Chemical compound [Be+2].[O-][Se]([O-])(=O)=O PPYIVKOTTQCYIV-UHFFFAOYSA-L 0.000 description 1
- DLIJPAHLBJIQHE-UHFFFAOYSA-N butylphosphane Chemical compound CCCCP DLIJPAHLBJIQHE-UHFFFAOYSA-N 0.000 description 1
- 159000000007 calcium salts Chemical class 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013522 chelant Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- IEJIGPNLZYLLBP-UHFFFAOYSA-N dimethyl carbonate Chemical compound COC(=O)OC IEJIGPNLZYLLBP-UHFFFAOYSA-N 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000005001 laminate film Substances 0.000 description 1
- GELKBWJHTRAYNV-UHFFFAOYSA-K lithium iron phosphate Chemical compound [Li+].[Fe+2].[O-]P([O-])([O-])=O GELKBWJHTRAYNV-UHFFFAOYSA-K 0.000 description 1
- 229910003002 lithium salt Inorganic materials 0.000 description 1
- 159000000002 lithium salts Chemical class 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 159000000003 magnesium salts Chemical class 0.000 description 1
- MMIPFLVOWGHZQD-UHFFFAOYSA-N manganese(3+) Chemical compound [Mn+3] MMIPFLVOWGHZQD-UHFFFAOYSA-N 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000003446 memory effect Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- FAIAAWCVCHQXDN-UHFFFAOYSA-N phosphorus trichloride Chemical compound ClP(Cl)Cl FAIAAWCVCHQXDN-UHFFFAOYSA-N 0.000 description 1
- WKFBZNUBXWCCHG-UHFFFAOYSA-N phosphorus trifluoride Chemical compound FP(F)F WKFBZNUBXWCCHG-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- XAEFZNCEHLXOMS-UHFFFAOYSA-M potassium benzoate Chemical compound [K+].[O-]C(=O)C1=CC=CC=C1 XAEFZNCEHLXOMS-UHFFFAOYSA-M 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 159000000008 strontium salts Chemical class 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 229910000314 transition metal oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0676—Oxynitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/052—Li-accumulators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/058—Construction or manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
- H01M4/0421—Methods of deposition of the material involving vapour deposition
- H01M4/0428—Chemical vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
- H01G11/22—Electrodes
- H01G11/30—Electrodes characterised by their material
- H01G11/50—Electrodes characterised by their material specially adapted for lithium-ion capacitors, e.g. for lithium-doping or for intercalation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
- H01G11/84—Processes for the manufacture of hybrid or EDL capacitors, or components thereof
- H01G11/86—Processes for the manufacture of hybrid or EDL capacitors, or components thereof specially adapted for electrodes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Electrochemistry (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Secondary Cells (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
【解決手段】平面を有する基材上に化学気相成長法、具体的には有機金属気相成長法により正極層を形成し、正極層上に電解質層を形成し、電解質層上に負極層を形成するリチウムイオン二次電池を作製する。正極層は、MOCVD装置により形成する。MOCVD装置は、液状または固体の有機金属原料を気化させて生成されたガスを反応させて熱分解して成膜を行う装置である。全ての層をスパッタ法、蒸着法、または化学気相成長法を用いて形成すれば、固体リチウムイオン二次電池も実現することができる。
【選択図】図1
Description
本実施の形態では、リチウム二次電池の構成およびその作製方法の一例について説明する。
本実施の形態では、実施の形態1と異なるリチウム二次電池の作製方法の一例について説明する。
本実施の形態では、実施の形態1と積層順が異なるリチウム二次電池の作製方法の一例について説明する。
本実施の形態では、リチウムイオン二次電池の構造について、図4を用いて説明する。本実施の形態では、電解質に溶媒などの液体を用いる例を示す。
101:正極層
102:電解質層
103:負極層
200:基材
201:負極層
202:電解質層
203:正極層
Claims (5)
- 平面を有する基材上に化学気相成長法により正極層を形成し、前記正極層上に電解質層を形成し、前記電解質層上に負極層を形成する蓄電装置の作製方法。
- 平面を有する基材上に負極層を形成し、前記負極層上に電解質層を形成し、前記電解質層上に化学気相成長法により正極層を形成する蓄電装置の作製方法。
- 請求項1または請求項2において、前記化学気相成長法は、有機金属気相成長法であることを特徴とする蓄電装置の作製方法。
- 請求項1乃至3のいずれか一において、前記負極層は、スパッタ法、蒸着法、または化学気相成長法を用いて形成することを特徴とする蓄電装置の作製方法。
- 請求項1乃至4のいずれか一において、前記電解質層は、スパッタ法、蒸着法、または化学気相成長法を用いて形成することを特徴とする蓄電装置の作製方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011135757A JP5826530B2 (ja) | 2010-06-18 | 2011-06-17 | 蓄電装置の作製方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010139255 | 2010-06-18 | ||
JP2010139255 | 2010-06-18 | ||
JP2011135757A JP5826530B2 (ja) | 2010-06-18 | 2011-06-17 | 蓄電装置の作製方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012023032A true JP2012023032A (ja) | 2012-02-02 |
JP5826530B2 JP5826530B2 (ja) | 2015-12-02 |
Family
ID=45327698
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011135757A Expired - Fee Related JP5826530B2 (ja) | 2010-06-18 | 2011-06-17 | 蓄電装置の作製方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9109286B2 (ja) |
JP (1) | JP5826530B2 (ja) |
WO (1) | WO2011158948A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018044206A (ja) * | 2016-09-14 | 2018-03-22 | 株式会社アルバック | 固体電解質膜の形成方法 |
KR20190088064A (ko) | 2016-12-09 | 2019-07-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 2차 전지 및 그 제작 방법 |
KR20210118118A (ko) | 2019-01-25 | 2021-09-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 전고체 전지 및 그 제작 방법 |
KR20210143747A (ko) | 2019-03-26 | 2021-11-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 고체 이차 전지 및 그 제작 방법 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6047342B2 (ja) | 2011-08-31 | 2016-12-21 | 株式会社半導体エネルギー研究所 | 蓄電装置用負極 |
JP5779804B2 (ja) * | 2011-10-12 | 2015-09-16 | 日東電工株式会社 | 有機エレクトロルミネッセンス素子の製造方法 |
US9865871B2 (en) | 2014-12-26 | 2018-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Silicon oxide and storage battery |
US10840539B2 (en) | 2015-06-22 | 2020-11-17 | King Abdullah University Of Science And Technology | Lithium batteries, anodes, and methods of anode fabrication |
US10797284B2 (en) | 2017-02-14 | 2020-10-06 | Volkswagen Ag | Electric vehicle battery cell with polymer frame for battery cell components |
US11362371B2 (en) * | 2017-02-14 | 2022-06-14 | Volkswagen Ag | Method for manufacturing electric vehicle battery cells with polymer frame support |
US11362338B2 (en) | 2017-02-14 | 2022-06-14 | Volkswagen Ag | Electric vehicle battery cell with solid state electrolyte |
US11870028B2 (en) | 2017-02-14 | 2024-01-09 | Volkswagen Ag | Electric vehicle battery cell with internal series connection stacking |
DE102017217046A1 (de) * | 2017-09-26 | 2019-03-28 | Robert Bosch Gmbh | Lithium enthaltende Elektrode mit Lithiumhalogenid umfassender Beschichtung |
JP6947136B2 (ja) * | 2018-08-06 | 2021-10-13 | トヨタ自動車株式会社 | 電極積層体製造装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5960866A (ja) * | 1982-09-29 | 1984-04-06 | Hitachi Ltd | 薄膜リチウム二次電池 |
JPS6072168A (ja) * | 1983-09-28 | 1985-04-24 | Hitachi Maxell Ltd | 固体電解質電池 |
JPS6244960A (ja) * | 1985-08-22 | 1987-02-26 | Mitsubishi Electric Corp | 薄膜二次電池の製造装置 |
JPS62108470A (ja) * | 1985-11-05 | 1987-05-19 | Tech Res Assoc Conduct Inorg Compo | 固体状態電池 |
JP2008532238A (ja) * | 2005-03-03 | 2008-08-14 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 電気化学エネルギー源の製造方法、その方法により得られる電気化学エネルギー源及び電子デバイス |
JP2009181807A (ja) * | 2008-01-30 | 2009-08-13 | Sony Corp | 固体電解質、および固体電解質電池、並びにリチウムイオン伝導体の製造方法、固体電解質の製造方法、および固体電解質電池の製造方法 |
Family Cites Families (73)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4740431A (en) * | 1986-12-22 | 1988-04-26 | Spice Corporation | Integrated solar cell and battery |
JPH1083838A (ja) | 1996-09-06 | 1998-03-31 | Nippon Telegr & Teleph Corp <Ntt> | 全固体リチウム電池 |
JPH1125983A (ja) | 1997-07-04 | 1999-01-29 | Japan Storage Battery Co Ltd | リチウム電池用活物質 |
JP3371200B2 (ja) | 1997-10-14 | 2003-01-27 | 富士通株式会社 | 液晶表示装置の表示制御方法及び液晶表示装置 |
JP3280307B2 (ja) | 1998-05-11 | 2002-05-13 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 液晶表示装置 |
US7317438B2 (en) | 1998-10-30 | 2008-01-08 | Semiconductor Energy Laboratory Co., Ltd. | Field sequential liquid crystal display device and driving method thereof, and head mounted display |
US6597348B1 (en) | 1998-12-28 | 2003-07-22 | Semiconductor Energy Laboratory Co., Ltd. | Information-processing device |
US7145536B1 (en) | 1999-03-26 | 2006-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
JP3592205B2 (ja) | 1999-07-23 | 2004-11-24 | 日本電気株式会社 | 液晶表示装置の駆動方法 |
KR100347558B1 (ko) | 1999-07-23 | 2002-08-07 | 닛본 덴기 가부시끼가이샤 | 액정표시장치 및 그 구동방법 |
US6882012B2 (en) | 2000-02-28 | 2005-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and a method of manufacturing the same |
TW521237B (en) | 2000-04-18 | 2003-02-21 | Semiconductor Energy Lab | Light emitting device |
WO2001084654A1 (en) * | 2000-04-26 | 2001-11-08 | Sanyo Electric Co., Ltd. | Lithium secondary battery-use electrode and lithium secondary battery |
TWI267049B (en) | 2000-05-09 | 2006-11-21 | Sharp Kk | Image display device, and electronic apparatus using the same |
TW518552B (en) | 2000-08-18 | 2003-01-21 | Semiconductor Energy Lab | Liquid crystal display device, method of driving the same, and method of driving a portable information device having the liquid crystal display device |
US7385579B2 (en) | 2000-09-29 | 2008-06-10 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method of driving the same |
JP2003045415A (ja) * | 2001-07-31 | 2003-02-14 | Nec Corp | 二次電池用負極 |
JP2004077567A (ja) | 2002-08-09 | 2004-03-11 | Semiconductor Energy Lab Co Ltd | 表示装置及びその駆動方法 |
JP2004094058A (ja) | 2002-09-02 | 2004-03-25 | Semiconductor Energy Lab Co Ltd | 液晶表示装置および液晶表示装置の駆動方法 |
US7193593B2 (en) | 2002-09-02 | 2007-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method of driving a liquid crystal display device |
AU2003280806A1 (en) | 2002-11-29 | 2004-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Display and its driving method, and electronic device |
JP2004191490A (ja) | 2002-12-09 | 2004-07-08 | Hitachi Displays Ltd | 液晶表示装置 |
US7176878B2 (en) | 2002-12-11 | 2007-02-13 | Nvidia Corporation | Backlight dimming and LCD amplitude boost |
CN1833328B (zh) | 2003-01-31 | 2012-01-04 | 三井造船株式会社 | 蓄电池的阴极材料,生产方法和蓄电池 |
JP2004335192A (ja) * | 2003-05-02 | 2004-11-25 | Sony Corp | 正極の製造方法および電池の製造方法 |
TWI246048B (en) | 2003-06-17 | 2005-12-21 | Au Optronics Corp | Driving method of liquid crystal display |
TWI368774B (en) | 2003-07-14 | 2012-07-21 | Semiconductor Energy Lab | Light-emitting device |
JP4225859B2 (ja) | 2003-07-29 | 2009-02-18 | 日本化学工業株式会社 | Mn原子を含有するリチウム鉄リン系複合酸化物炭素複合体の製造方法 |
CN100557667C (zh) | 2004-04-22 | 2009-11-04 | 株式会社半导体能源研究所 | 发光装置及其驱动方法 |
US20070216616A1 (en) | 2004-06-01 | 2007-09-20 | Koninklijke Philips Electronics, N.V. | Display Device Comprising A Light Source |
JP2006220685A (ja) | 2005-02-08 | 2006-08-24 | 21 Aomori Sangyo Sogo Shien Center | スキャンバックライトを用いた分割駆動フィールドシーケンシャルカラー液晶ディスプレイの駆動方法および装置 |
JP4559985B2 (ja) | 2005-03-15 | 2010-10-13 | 株式会社東芝 | 乱数発生回路 |
JP2007114628A (ja) | 2005-10-24 | 2007-05-10 | Rohm Co Ltd | バックライト装置およびこれを用いた画像表示装置 |
KR101106561B1 (ko) | 2005-12-19 | 2012-01-19 | 엘지디스플레이 주식회사 | 액정표시장치의 구동회로 및 이를 포함하는 액정표시장치 |
EP1832915B1 (en) | 2006-01-31 | 2012-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device with improved contrast |
JP4691711B2 (ja) | 2006-03-20 | 2011-06-01 | 独立行政法人産業技術総合研究所 | リチウムマンガン系複合酸化物およびその製造方法 |
JP2007264211A (ja) | 2006-03-28 | 2007-10-11 | 21 Aomori Sangyo Sogo Shien Center | 色順次表示方式液晶表示装置用の色表示方法 |
US8154493B2 (en) | 2006-06-02 | 2012-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, driving method of the same, and electronic device using the same |
US8106865B2 (en) | 2006-06-02 | 2012-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Display device and driving method thereof |
WO2008004161A2 (en) | 2006-07-03 | 2008-01-10 | Koninklijke Philips Electronics N.V. | Method for the manufacture of a thin film electrochemical energy source and device |
EP1898676A1 (en) | 2006-09-06 | 2008-03-12 | THOMSON Licensing | Display apparatus |
CA2566906A1 (en) | 2006-10-30 | 2008-04-30 | Nathalie Ravet | Carbon-coated lifepo4 storage and handling |
JP5479106B2 (ja) | 2006-12-22 | 2014-04-23 | ユミコア ソシエテ アノニム | 結晶性ナノLiFeMPO4の合成 |
CN105236378B (zh) | 2006-12-22 | 2018-10-02 | 尤米科尔公司 | 结晶的纳米LiFeMPO4的合成 |
US7941471B2 (en) | 2007-01-29 | 2011-05-10 | International Business Machines Corporation | Differential approach to current-mode chaos based random number generator |
US20080238336A1 (en) | 2007-03-29 | 2008-10-02 | Hong Kong Applied Science And Technology Research | Back-Light Devices and Displays Incorporating Same |
JP5293936B2 (ja) | 2007-05-21 | 2013-09-18 | 戸田工業株式会社 | 非水電解質二次電池用オリビン型複合酸化物及びその製造方法、並びに二次電池 |
JP2009004289A (ja) | 2007-06-25 | 2009-01-08 | Panasonic Corp | 非水電解質二次電池 |
KR100867104B1 (ko) | 2007-07-27 | 2008-11-06 | 전자부품연구원 | 영상 표시 장치의 백라이트 밝기 제어 방법 및 장치 |
JP5200209B2 (ja) | 2007-08-08 | 2013-06-05 | エプソンイメージングデバイス株式会社 | 液晶表示装置 |
JP4516588B2 (ja) | 2007-09-05 | 2010-08-04 | セイコーエプソン株式会社 | 全固体リチウム二次電池および全固体リチウム二次電池の製造方法 |
JP5157365B2 (ja) | 2007-10-25 | 2013-03-06 | 株式会社豊田中央研究所 | リチウムイオン二次電池及びそれを用いた電気自動車用電源 |
JP4308293B2 (ja) | 2007-11-20 | 2009-08-05 | 際国 董 | 乱数生成装置及び方法 |
JP5109619B2 (ja) | 2007-11-21 | 2012-12-26 | トヨタ自動車株式会社 | 組電池システム、及び充放電制御方法 |
JP2009129179A (ja) | 2007-11-22 | 2009-06-11 | Toshiba Corp | プログラム並列化支援装置およびプログラム並列化支援方法 |
EP2065887A1 (en) | 2007-11-30 | 2009-06-03 | Hitachi Global Storage Technologies Netherlands B.V. | Method for manufacturing magnetic disk unit |
US20090167670A1 (en) | 2007-12-26 | 2009-07-02 | Hong Kong Applied Science and Technology Research Institute Company Limited | Method of determining luminance values for a backlight of an lcd panel displaying an image |
USRE47325E1 (en) * | 2007-12-28 | 2019-03-26 | Universitetet I Oslo | Formation of a lithium comprising structure on a substrate by ALD |
US8063873B2 (en) | 2008-02-29 | 2011-11-22 | Research In Motion Limited | System and method for adjusting a backlight level for a display on an electronic device |
JP5517032B2 (ja) | 2008-03-31 | 2014-06-11 | 戸田工業株式会社 | 非水電解質二次電池用オリビン型複合酸化物粒子粉末及びその製造方法、並びに二次電池 |
JP4662183B2 (ja) | 2008-04-16 | 2011-03-30 | カシオ計算機株式会社 | 光源装置及びプロジェクタ |
CN102077331B (zh) | 2008-06-27 | 2014-05-07 | 株式会社半导体能源研究所 | 薄膜晶体管 |
JP5417757B2 (ja) * | 2008-07-16 | 2014-02-19 | ソニー株式会社 | 薄膜電池の正極の製造方法および薄膜電池の製造方法 |
JP2010080210A (ja) * | 2008-09-25 | 2010-04-08 | Sumitomo Electric Ind Ltd | 電池およびその製造方法 |
JP5590868B2 (ja) | 2008-12-11 | 2014-09-17 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP5100670B2 (ja) | 2009-01-21 | 2012-12-19 | 株式会社半導体エネルギー研究所 | タッチパネル、電子機器 |
JP5444771B2 (ja) | 2009-03-10 | 2014-03-19 | ソニー株式会社 | 固体電解質電池および固体電解質電池の製造方法 |
TWI496042B (zh) | 2009-07-02 | 2015-08-11 | Semiconductor Energy Lab | 觸控面板及其驅動方法 |
JP5287593B2 (ja) | 2009-08-12 | 2013-09-11 | ソニー株式会社 | 正極活物質の製造方法。 |
US8860442B2 (en) | 2009-09-11 | 2014-10-14 | Agency For Science, Technology And Research | Method of determining a sensitivity of a biosensor arrangement, and biosensor sensitivity determining system |
JP2011076820A (ja) | 2009-09-30 | 2011-04-14 | Hitachi Vehicle Energy Ltd | リチウム二次電池及びリチウム二次電池用正極 |
KR101872678B1 (ko) | 2009-12-28 | 2018-07-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치 및 전자 기기 |
KR101842865B1 (ko) | 2009-12-28 | 2018-03-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 액정 표시 장치 및 전자 기기 |
-
2011
- 2011-06-13 WO PCT/JP2011/063990 patent/WO2011158948A1/en active Application Filing
- 2011-06-14 US US13/159,602 patent/US9109286B2/en active Active
- 2011-06-17 JP JP2011135757A patent/JP5826530B2/ja not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5960866A (ja) * | 1982-09-29 | 1984-04-06 | Hitachi Ltd | 薄膜リチウム二次電池 |
JPS6072168A (ja) * | 1983-09-28 | 1985-04-24 | Hitachi Maxell Ltd | 固体電解質電池 |
JPS6244960A (ja) * | 1985-08-22 | 1987-02-26 | Mitsubishi Electric Corp | 薄膜二次電池の製造装置 |
JPS62108470A (ja) * | 1985-11-05 | 1987-05-19 | Tech Res Assoc Conduct Inorg Compo | 固体状態電池 |
JP2008532238A (ja) * | 2005-03-03 | 2008-08-14 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 電気化学エネルギー源の製造方法、その方法により得られる電気化学エネルギー源及び電子デバイス |
JP2009181807A (ja) * | 2008-01-30 | 2009-08-13 | Sony Corp | 固体電解質、および固体電解質電池、並びにリチウムイオン伝導体の製造方法、固体電解質の製造方法、および固体電解質電池の製造方法 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018044206A (ja) * | 2016-09-14 | 2018-03-22 | 株式会社アルバック | 固体電解質膜の形成方法 |
KR20190088064A (ko) | 2016-12-09 | 2019-07-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 2차 전지 및 그 제작 방법 |
KR20230058551A (ko) | 2016-12-09 | 2023-05-03 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 2차 전지 및 그 제작 방법 |
KR20230129592A (ko) | 2016-12-09 | 2023-09-08 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 2차 전지 및 그 제작 방법 |
KR20210118118A (ko) | 2019-01-25 | 2021-09-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 전고체 전지 및 그 제작 방법 |
KR20210143747A (ko) | 2019-03-26 | 2021-11-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 고체 이차 전지 및 그 제작 방법 |
Also Published As
Publication number | Publication date |
---|---|
JP5826530B2 (ja) | 2015-12-02 |
WO2011158948A1 (en) | 2011-12-22 |
US20110308935A1 (en) | 2011-12-22 |
US9109286B2 (en) | 2015-08-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5826530B2 (ja) | 蓄電装置の作製方法 | |
US11888109B2 (en) | Lithium anode device stack manufacturing | |
TWI689128B (zh) | 用於改良的鋰金屬循環的介面層 | |
CN103779550B (zh) | 用于钛酸锂来抑制锂离子电池组中气体产生的涂层及其制造和使用方法 | |
TWI795264B (zh) | 無烯烴隔板之鋰離子電池 | |
US9531004B2 (en) | Multifunctional hybrid coatings for electrodes made by atomic layer deposition techniques | |
CN100423325C (zh) | 具有无机保护膜的隔板及使用它的锂电池 | |
CN110573459B (zh) | 制备锂二次电池的正极添加剂的方法 | |
US11876213B2 (en) | Manufacturing process of making negative electrodes for batteries | |
US20100173098A1 (en) | Method for producing electrode for non-aqueous electrolyte secondary battery | |
KR102164252B1 (ko) | 음극 활물질, 상기 음극 활물질을 포함하는 음극, 상기 음극을 포함하는 이차 전지 및 상기 음극 활물질의 제조 방법 | |
KR20160047991A (ko) | 다층구조의 리튬금속 전극 및 이의 제조방법 | |
US20080233478A1 (en) | Anode, method of manufacturing it, battery, and method of manufacturing it | |
US20100330420A1 (en) | Method for manufacturing electrochemical element electrode | |
JP7314320B2 (ja) | Liイオンバッテリアノード用の保護インターフェース | |
US8273136B2 (en) | Electrochemical element, and method and apparatus for manufacturing electrode thereof | |
KR101856830B1 (ko) | 리튬 또는 리튬 화합물 코팅층이 도포되어 있는 분리막을 포함하는 전극조립체 및 이를 제조하는 방법 | |
CN113299871B (zh) | 锂电池负极及采用固态电化学腐蚀法制备该负极的方法 | |
JP2013073907A (ja) | 電極合材の製造方法 | |
KR101284025B1 (ko) | 리튬이차전지용 음극소재 및 이의 제조방법 | |
US20210242457A1 (en) | Negative electrode for lithium secondary battery, lithium secondary battery comprising same, and manufacturing method therefor | |
KR100329809B1 (ko) | 주석/리튬 산화물을 음극활물질로 포함하는 리튬이차전지 | |
KR20240060829A (ko) | 전지 부재의 보호 방법 및 장비, 이차 전지, 전지 모듈, 전지 팩 및 전기 장치 | |
CN116314780A (zh) | 用于阴极材料的含锂涂层 | |
KR101775189B1 (ko) | 이차전지용 전극 제조방법 및 그에 따라 제조된 이차전지용 전극 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140430 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150220 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150310 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150429 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150728 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150804 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150929 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20151014 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5826530 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |