JP2011513960A - トンネル接合を有するオプトエレクトロニクス半導体ボディおよびそのような半導体ボディの製造方法 - Google Patents

トンネル接合を有するオプトエレクトロニクス半導体ボディおよびそのような半導体ボディの製造方法 Download PDF

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Publication number
JP2011513960A
JP2011513960A JP2010547955A JP2010547955A JP2011513960A JP 2011513960 A JP2011513960 A JP 2011513960A JP 2010547955 A JP2010547955 A JP 2010547955A JP 2010547955 A JP2010547955 A JP 2010547955A JP 2011513960 A JP2011513960 A JP 2011513960A
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layer
tunnel junction
type
semiconductor body
optoelectronic semiconductor
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JP2010547955A
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Japanese (ja)
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JP2011513960A5 (https=
Inventor
マルチン ストラスバーク
ルッツ ヘッペル
マティアス サバシル
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Ams Osram International GmbH
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Osram Opto Semiconductors GmbH
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Publication of JP2011513960A publication Critical patent/JP2011513960A/ja
Publication of JP2011513960A5 publication Critical patent/JP2011513960A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
    • H10H20/812—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/816—Bodies having carrier transport control structures, e.g. highly-doped semiconductor layers or current-blocking structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/042—Electrical excitation ; Circuits therefor
    • H01S5/0421—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
    • H01S5/3095—Tunnel junction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/323—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/32308—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm
    • H01S5/32341—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm blue laser based on GaN or GaP
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H10D8/70—Tunnel-effect diodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/822—Materials of the light-emitting regions
    • H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
JP2010547955A 2008-02-29 2009-02-26 トンネル接合を有するオプトエレクトロニクス半導体ボディおよびそのような半導体ボディの製造方法 Pending JP2011513960A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008011849 2008-02-29
DE102008028036A DE102008028036A1 (de) 2008-02-29 2008-06-12 Optoelektronischer Halbleiterkörper mit Tunnelübergang und Verfahren zur Herstellung eines solchen
PCT/DE2009/000282 WO2009106070A1 (de) 2008-02-29 2009-02-26 Optoelektronischer halbleiterkörper mit tunnelübergang und verfahren zur herstellung eines solchen

Publications (2)

Publication Number Publication Date
JP2011513960A true JP2011513960A (ja) 2011-04-28
JP2011513960A5 JP2011513960A5 (https=) 2012-01-12

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JP2010547955A Pending JP2011513960A (ja) 2008-02-29 2009-02-26 トンネル接合を有するオプトエレクトロニクス半導体ボディおよびそのような半導体ボディの製造方法

Country Status (8)

Country Link
US (1) US20110012088A1 (https=)
EP (1) EP2248192A1 (https=)
JP (1) JP2011513960A (https=)
KR (1) KR20100126458A (https=)
CN (1) CN101960622B (https=)
DE (1) DE102008028036A1 (https=)
TW (1) TWI404232B (https=)
WO (1) WO2009106070A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012256635A (ja) * 2011-06-07 2012-12-27 Denso Corp 半導体レーザ及びその製造方法
JP2019087709A (ja) * 2017-11-10 2019-06-06 学校法人 名城大学 窒化物半導体発光素子の製造方法、及び窒化物半導体発光素子

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DE102009054564A1 (de) * 2009-12-11 2011-06-16 Osram Opto Semiconductors Gmbh Laserdiodenanordnung und Verfahren zum Herstellen einer Laserdiodenanordnung
DE102011116232B4 (de) 2011-10-17 2020-04-09 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip und Verfahren zu dessen Herstellung
CN103579426B (zh) * 2012-07-19 2016-04-27 华夏光股份有限公司 半导体装置
DE102013104954A1 (de) * 2013-05-14 2014-11-20 Osram Opto Semiconductors Gmbh Optoelektronisches Bauelement und Verfahren zu seiner Herstellung
TWI597862B (zh) * 2013-08-30 2017-09-01 晶元光電股份有限公司 具阻障層的光電半導體元件
CN103489975B (zh) * 2013-10-08 2016-09-07 东南大学 一种具有隧道结结构的氮极性面发光二极管
CN103855263A (zh) * 2014-02-25 2014-06-11 广东省工业技术研究院(广州有色金属研究院) 一种具有极化隧道结的GaN基LED外延片及其制备方法
DE102016103852A1 (de) * 2016-03-03 2017-09-07 Otto-Von-Guericke-Universität Magdeburg Bauelement im System AlGaInN mit einem Tunnelübergang
US9859470B2 (en) * 2016-03-10 2018-01-02 Epistar Corporation Light-emitting device with adjusting element
DE102016113274B4 (de) * 2016-07-19 2023-03-09 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelektronischer Halbleiterchip
US20180331255A1 (en) * 2017-05-12 2018-11-15 X Development Llc Fabrication of ultraviolet light emitting diode with tunnel junction
CN107230738B (zh) * 2017-07-31 2019-05-31 河北工业大学 具有超晶格隧穿结的发光二极管外延结构及其制备方法
JP7155723B2 (ja) * 2018-08-02 2022-10-19 株式会社リコー 発光素子及びその製造方法
CN113257940B (zh) 2020-02-13 2023-12-29 隆基绿能科技股份有限公司 叠层光伏器件及生产方法
CN113066887B (zh) * 2021-03-19 2023-01-20 扬州乾照光电有限公司 一种太阳电池以及制作方法
CN114566573B (zh) * 2022-02-12 2025-07-04 江西兆驰半导体有限公司 一种AlGaN基深紫外发光二极管芯片及其制备方法
WO2025198675A1 (en) * 2023-12-04 2025-09-25 Ohio State Innovation Foundation Methods of modular construction of 0d-state tunnel junction devices and methods of use thereof

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JP2008010641A (ja) * 2006-06-29 2008-01-17 Sumitomo Electric Ind Ltd 面発光型半導体素子

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JP2000277757A (ja) * 1999-03-26 2000-10-06 Matsushita Electric Ind Co Ltd 半導体装置及びその製造方法
JP2003518326A (ja) * 1999-11-17 2003-06-03 エイチアールエル ラボラトリーズ，エルエルシー タイプｉｉインターバンド異質構造体後方ダイオード
JP2002134835A (ja) * 2000-10-20 2002-05-10 Nec Corp トンネル接合面発光レーザ
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012256635A (ja) * 2011-06-07 2012-12-27 Denso Corp 半導体レーザ及びその製造方法
JP2019087709A (ja) * 2017-11-10 2019-06-06 学校法人 名城大学 窒化物半導体発光素子の製造方法、及び窒化物半導体発光素子

Also Published As

Publication number Publication date
DE102008028036A1 (de) 2009-09-03
CN101960622B (zh) 2013-01-09
WO2009106070A1 (de) 2009-09-03
TW200945637A (en) 2009-11-01
KR20100126458A (ko) 2010-12-01
CN101960622A (zh) 2011-01-26
US20110012088A1 (en) 2011-01-20
TWI404232B (zh) 2013-08-01
EP2248192A1 (de) 2010-11-10

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