EP2248192A1 - Optoelektronischer halbleiterkörper mit tunnelübergang und verfahren zur herstellung eines solchen - Google Patents

Optoelektronischer halbleiterkörper mit tunnelübergang und verfahren zur herstellung eines solchen

Info

Publication number
EP2248192A1
EP2248192A1 EP09715687A EP09715687A EP2248192A1 EP 2248192 A1 EP2248192 A1 EP 2248192A1 EP 09715687 A EP09715687 A EP 09715687A EP 09715687 A EP09715687 A EP 09715687A EP 2248192 A1 EP2248192 A1 EP 2248192A1
Authority
EP
European Patent Office
Prior art keywords
layer
tunnel junction
semiconductor body
type
intermediate layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09715687A
Other languages
German (de)
English (en)
French (fr)
Inventor
Martin Strassburg
Lutz Höppel
Matthias Sabathil
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ams Osram International GmbH
Original Assignee
Osram Opto Semiconductors GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osram Opto Semiconductors GmbH filed Critical Osram Opto Semiconductors GmbH
Publication of EP2248192A1 publication Critical patent/EP2248192A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
    • H10H20/812—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/816—Bodies having carrier transport control structures, e.g. highly-doped semiconductor layers or current-blocking structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/042—Electrical excitation ; Circuits therefor
    • H01S5/0421—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
    • H01S5/3095—Tunnel junction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/323—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/32308—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm
    • H01S5/32341—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm blue laser based on GaN or GaP
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H10D8/70—Tunnel-effect diodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/822—Materials of the light-emitting regions
    • H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN

Definitions

  • the impurities By means of the impurities, energetic states are generated within the band gap in the region of the intermediate layer, which is provided with the impurities.
  • the tunneling probability for carriers can be increased through the tunnel junction, so that an increased transition rate of electrons and / or holes through the intermediate layer can be achieved.
  • the additional states act in particular as so-called tunnel centers.
  • the amount of hydrogen gas introduced in one embodiment, is from 0.1% to 50% inclusive of that amount of hydrogen gas intended to grow silicon-doped gallium nitride (GaN: Si) with trimethylgallium (TMGa) as a precursor in the epitaxial reactor is.
  • the amount of hydrogen which is provided for the growth of GaN: Si with TMGa as precursor is generally specified by the manufacturer of the epitaxy reactor and thus known in principle to the person skilled in the art.
  • the defects 6 are generated by, during the deposition of the central region for a period of, for example, 120 seconds or less the process temperature and / or the pressure in the epitaxial reactor are changed greatly. Under a strong change, for example, a change in pressure by 100 millibars per minute or more or the temperature is understood by 60 Kelvin per minute or more. The change can be gradual or continuous, as so-called temperature or pressure ramp.
EP09715687A 2008-02-29 2009-02-26 Optoelektronischer halbleiterkörper mit tunnelübergang und verfahren zur herstellung eines solchen Withdrawn EP2248192A1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008011849 2008-02-29
DE102008028036A DE102008028036A1 (de) 2008-02-29 2008-06-12 Optoelektronischer Halbleiterkörper mit Tunnelübergang und Verfahren zur Herstellung eines solchen
PCT/DE2009/000282 WO2009106070A1 (de) 2008-02-29 2009-02-26 Optoelektronischer halbleiterkörper mit tunnelübergang und verfahren zur herstellung eines solchen

Publications (1)

Publication Number Publication Date
EP2248192A1 true EP2248192A1 (de) 2010-11-10

Family

ID=40911448

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09715687A Withdrawn EP2248192A1 (de) 2008-02-29 2009-02-26 Optoelektronischer halbleiterkörper mit tunnelübergang und verfahren zur herstellung eines solchen

Country Status (8)

Country Link
US (1) US20110012088A1 (https=)
EP (1) EP2248192A1 (https=)
JP (1) JP2011513960A (https=)
KR (1) KR20100126458A (https=)
CN (1) CN101960622B (https=)
DE (1) DE102008028036A1 (https=)
TW (1) TWI404232B (https=)
WO (1) WO2009106070A1 (https=)

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DE102009054564A1 (de) * 2009-12-11 2011-06-16 Osram Opto Semiconductors Gmbh Laserdiodenanordnung und Verfahren zum Herstellen einer Laserdiodenanordnung
JP5678806B2 (ja) * 2011-06-07 2015-03-04 株式会社デンソー 半導体レーザ及びその製造方法
DE102011116232B4 (de) 2011-10-17 2020-04-09 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip und Verfahren zu dessen Herstellung
CN103579426B (zh) * 2012-07-19 2016-04-27 华夏光股份有限公司 半导体装置
DE102013104954A1 (de) * 2013-05-14 2014-11-20 Osram Opto Semiconductors Gmbh Optoelektronisches Bauelement und Verfahren zu seiner Herstellung
TWI597862B (zh) * 2013-08-30 2017-09-01 晶元光電股份有限公司 具阻障層的光電半導體元件
CN103489975B (zh) * 2013-10-08 2016-09-07 东南大学 一种具有隧道结结构的氮极性面发光二极管
CN103855263A (zh) * 2014-02-25 2014-06-11 广东省工业技术研究院(广州有色金属研究院) 一种具有极化隧道结的GaN基LED外延片及其制备方法
DE102016103852A1 (de) * 2016-03-03 2017-09-07 Otto-Von-Guericke-Universität Magdeburg Bauelement im System AlGaInN mit einem Tunnelübergang
US9859470B2 (en) * 2016-03-10 2018-01-02 Epistar Corporation Light-emitting device with adjusting element
DE102016113274B4 (de) * 2016-07-19 2023-03-09 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelektronischer Halbleiterchip
US20180331255A1 (en) * 2017-05-12 2018-11-15 X Development Llc Fabrication of ultraviolet light emitting diode with tunnel junction
CN107230738B (zh) * 2017-07-31 2019-05-31 河北工业大学 具有超晶格隧穿结的发光二极管外延结构及其制备方法
JP6964875B2 (ja) * 2017-11-10 2021-11-10 学校法人 名城大学 窒化物半導体発光素子の製造方法
JP7155723B2 (ja) * 2018-08-02 2022-10-19 株式会社リコー 発光素子及びその製造方法
CN113257940B (zh) 2020-02-13 2023-12-29 隆基绿能科技股份有限公司 叠层光伏器件及生产方法
CN113066887B (zh) * 2021-03-19 2023-01-20 扬州乾照光电有限公司 一种太阳电池以及制作方法
CN114566573B (zh) * 2022-02-12 2025-07-04 江西兆驰半导体有限公司 一种AlGaN基深紫外发光二极管芯片及其制备方法
WO2025198675A1 (en) * 2023-12-04 2025-09-25 Ohio State Innovation Foundation Methods of modular construction of 0d-state tunnel junction devices and methods of use thereof

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Also Published As

Publication number Publication date
DE102008028036A1 (de) 2009-09-03
JP2011513960A (ja) 2011-04-28
CN101960622B (zh) 2013-01-09
WO2009106070A1 (de) 2009-09-03
TW200945637A (en) 2009-11-01
KR20100126458A (ko) 2010-12-01
CN101960622A (zh) 2011-01-26
US20110012088A1 (en) 2011-01-20
TWI404232B (zh) 2013-08-01

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