JP2011502211A5 - - Google Patents
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- Publication number
- JP2011502211A5 JP2011502211A5 JP2010528299A JP2010528299A JP2011502211A5 JP 2011502211 A5 JP2011502211 A5 JP 2011502211A5 JP 2010528299 A JP2010528299 A JP 2010528299A JP 2010528299 A JP2010528299 A JP 2010528299A JP 2011502211 A5 JP2011502211 A5 JP 2011502211A5
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- shaft
- drive
- transmission
- workpiece transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 claims 9
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP07405302A EP2048263B1 (de) | 2007-10-08 | 2007-10-08 | Werkstückträgereinrichtung |
| EP07405302.6 | 2007-10-08 | ||
| PCT/EP2008/008349 WO2009046928A1 (en) | 2007-10-08 | 2008-10-02 | Workpiece carrier device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011502211A JP2011502211A (ja) | 2011-01-20 |
| JP2011502211A5 true JP2011502211A5 (enExample) | 2011-11-24 |
| JP5497647B2 JP5497647B2 (ja) | 2014-05-21 |
Family
ID=38982780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010528299A Active JP5497647B2 (ja) | 2007-10-08 | 2008-10-02 | ワーク搬送装置 |
Country Status (14)
| Country | Link |
|---|---|
| US (2) | US8596626B2 (enExample) |
| EP (2) | EP2336387B1 (enExample) |
| JP (1) | JP5497647B2 (enExample) |
| KR (1) | KR20100071057A (enExample) |
| CN (1) | CN101827955B (enExample) |
| AT (1) | ATE503858T1 (enExample) |
| BR (1) | BRPI0818592A2 (enExample) |
| DE (1) | DE502007006849D1 (enExample) |
| ES (1) | ES2362016T3 (enExample) |
| MX (1) | MX2010003727A (enExample) |
| PL (2) | PL2336387T3 (enExample) |
| RU (1) | RU2485211C2 (enExample) |
| TW (1) | TWI481448B (enExample) |
| WO (1) | WO2009046928A1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2336387B1 (de) * | 2007-10-08 | 2013-09-04 | Oerlikon Trading AG, Trübbach | Werkstückträgereinrichtung |
| DE102010001218A1 (de) | 2010-01-26 | 2011-07-28 | Esser, Stefan, Dr.-Ing., 52072 | Substratteller und Beschichtungsanlage zum Beschichten von Substraten |
| SG184626A1 (en) * | 2011-03-17 | 2012-10-30 | Sulzer Metco Ag | Component manipulator for the dynamic positioning of a substrate, coating method, as well as use of a component manipulator |
| CA2858188C (en) * | 2011-12-08 | 2018-03-06 | Praxair S.T. Technology, Inc. | Multifunction tooling fixture assembly for use in a coating related operations |
| RU2625698C1 (ru) * | 2016-08-29 | 2017-07-18 | Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт авиационных материалов" (ФГУП "ВИАМ") | Способ нанесения защитных покрытий и устройство для его осуществления |
| CN107740063B (zh) * | 2017-11-16 | 2024-07-23 | 东莞市赢心科技有限公司 | 真空镀铝设备用工件承载结构 |
| KR101869401B1 (ko) * | 2018-01-04 | 2018-07-20 | 홍성신 | 초정밀 선반의 공작물 자동 교환장치 |
| RU2688353C1 (ru) * | 2018-08-09 | 2019-05-21 | Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" (Госкорпорация "Росатом") | Устройство перемещения и вращения подложкодержателя |
| DE102018126862A1 (de) | 2018-10-26 | 2020-04-30 | Oerlikon Surface Solutions Ag, Pfäffikon | Werkstückträgereinrichtung und Beschichtungsanordnung |
| DE102019110158A1 (de) * | 2019-04-17 | 2020-10-22 | Oerlikon Surface Solutions Ag, Pfäffikon | Werkstückträgereinrichtung |
| MX2021013562A (es) | 2019-05-07 | 2021-12-10 | Oerlikon Surface Solutions Ag Pfaeffikon | Dispositivo portador de piezas de trabajo movil para sujetar piezas de trabajo que se van a tratar. |
| US12447491B2 (en) | 2019-07-26 | 2025-10-21 | Oerlikon Surface Solutions Ag, Pfäffikon | Fixture to be used in PVD processes for cylindrical, elongated substrates |
| CN114271649B (zh) * | 2021-12-27 | 2022-11-25 | 西南民族大学 | 一种艺术作品展示设备 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU370279A1 (ru) * | 1969-08-21 | 1973-02-15 | УСТРОЙСТВО дл ТРАНСПОРТИРОВКИ и СМЕНЫ ПОДЛОЖЕК в ВАКУУМНЫХ УСТАНОВКАХ | |
| JPH01288652A (ja) * | 1988-05-17 | 1989-11-20 | Komatsu Ltd | 減速機 |
| SU1828669A3 (ru) * | 1990-11-13 | 1995-05-27 | Владимир Васильевич Кульпинов | Устройство для обработки изделий в вакууме |
| DE19803278C2 (de) | 1998-01-29 | 2001-02-01 | Bosch Gmbh Robert | Werkstückträger und dessen Verwendung zur Behandlung und Beschichtung von Werkstücken |
| JP4614538B2 (ja) * | 1998-12-15 | 2011-01-19 | エリコン・トレーディング・アクチェンゲゼルシャフト，トリュープバッハ | 真空処理遊星システム工作物キャリヤ |
| US6749764B1 (en) * | 2000-11-14 | 2004-06-15 | Tru-Si Technologies, Inc. | Plasma processing comprising three rotational motions of an article being processed |
| DE10308471B4 (de) | 2003-02-20 | 2005-03-24 | Hensoldt Ag | Beschichtungsanlage zum Beschichten von Substraten für optische Komponenten |
| CN1865495A (zh) * | 2005-05-20 | 2006-11-22 | 中国科学院半导体研究所 | 金属有机物化学气相淀积设备反应室中的公转自转机构 |
| BRPI0615301B1 (pt) * | 2005-08-29 | 2019-06-25 | Oerlikon Trading Ag, Trübbach | Dispositivo transportador de peça de trabalho |
| US7988787B2 (en) * | 2007-08-27 | 2011-08-02 | Caterpillar Inc. | Workpiece support system and method |
| EP2336387B1 (de) * | 2007-10-08 | 2013-09-04 | Oerlikon Trading AG, Trübbach | Werkstückträgereinrichtung |
-
2007
- 2007-10-08 EP EP11405237.6A patent/EP2336387B1/de active Active
- 2007-10-08 EP EP07405302A patent/EP2048263B1/de not_active Not-in-force
- 2007-10-08 AT AT07405302T patent/ATE503858T1/de active
- 2007-10-08 PL PL11405237T patent/PL2336387T3/pl unknown
- 2007-10-08 ES ES07405302T patent/ES2362016T3/es active Active
- 2007-10-08 PL PL07405302T patent/PL2048263T3/pl unknown
- 2007-10-08 DE DE502007006849T patent/DE502007006849D1/de active Active
-
2008
- 2008-10-02 WO PCT/EP2008/008349 patent/WO2009046928A1/en not_active Ceased
- 2008-10-02 BR BRPI0818592A patent/BRPI0818592A2/pt not_active IP Right Cessation
- 2008-10-02 US US12/681,833 patent/US8596626B2/en active Active
- 2008-10-02 RU RU2010113596/02A patent/RU2485211C2/ru not_active IP Right Cessation
- 2008-10-02 KR KR1020107007588A patent/KR20100071057A/ko not_active Ceased
- 2008-10-02 CN CN2008801106260A patent/CN101827955B/zh active Active
- 2008-10-02 MX MX2010003727A patent/MX2010003727A/es active IP Right Grant
- 2008-10-02 JP JP2010528299A patent/JP5497647B2/ja active Active
- 2008-10-06 TW TW097138355A patent/TWI481448B/zh not_active IP Right Cessation
-
2013
- 2013-09-04 US US14/018,118 patent/US8783673B2/en active Active
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