TWI481448B - 工件載具裝置 - Google Patents
工件載具裝置 Download PDFInfo
- Publication number
- TWI481448B TWI481448B TW097138355A TW97138355A TWI481448B TW I481448 B TWI481448 B TW I481448B TW 097138355 A TW097138355 A TW 097138355A TW 97138355 A TW97138355 A TW 97138355A TW I481448 B TWI481448 B TW I481448B
- Authority
- TW
- Taiwan
- Prior art keywords
- workpiece
- workpiece carrier
- drive
- axis
- carrier device
- Prior art date
Links
- 230000005540 biological transmission Effects 0.000 claims abstract description 41
- 230000033001 locomotion Effects 0.000 description 9
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 6
- 239000000969 carrier Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/64—Movable or adjustable work or tool supports characterised by the purpose of the movement
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H21/00—Gearings comprising primarily only links or levers, with or without slides
- F16H21/10—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane
- F16H21/12—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane for conveying rotary motion
- F16H21/14—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane for conveying rotary motion by means of cranks, eccentrics, or like members fixed to one rotary member and guided along tracks on the other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Retarders (AREA)
- Gear Transmission (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Specific Conveyance Elements (AREA)
- Physical Vapour Deposition (AREA)
- Agricultural Machines (AREA)
- Soil Working Implements (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP07405302A EP2048263B1 (de) | 2007-10-08 | 2007-10-08 | Werkstückträgereinrichtung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200936249A TW200936249A (en) | 2009-09-01 |
| TWI481448B true TWI481448B (zh) | 2015-04-21 |
Family
ID=38982780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW097138355A TWI481448B (zh) | 2007-10-08 | 2008-10-06 | 工件載具裝置 |
Country Status (14)
| Country | Link |
|---|---|
| US (2) | US8596626B2 (enExample) |
| EP (2) | EP2336387B1 (enExample) |
| JP (1) | JP5497647B2 (enExample) |
| KR (1) | KR20100071057A (enExample) |
| CN (1) | CN101827955B (enExample) |
| AT (1) | ATE503858T1 (enExample) |
| BR (1) | BRPI0818592A2 (enExample) |
| DE (1) | DE502007006849D1 (enExample) |
| ES (1) | ES2362016T3 (enExample) |
| MX (1) | MX2010003727A (enExample) |
| PL (2) | PL2336387T3 (enExample) |
| RU (1) | RU2485211C2 (enExample) |
| TW (1) | TWI481448B (enExample) |
| WO (1) | WO2009046928A1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2336387B1 (de) * | 2007-10-08 | 2013-09-04 | Oerlikon Trading AG, Trübbach | Werkstückträgereinrichtung |
| DE102010001218A1 (de) | 2010-01-26 | 2011-07-28 | Esser, Stefan, Dr.-Ing., 52072 | Substratteller und Beschichtungsanlage zum Beschichten von Substraten |
| SG184626A1 (en) * | 2011-03-17 | 2012-10-30 | Sulzer Metco Ag | Component manipulator for the dynamic positioning of a substrate, coating method, as well as use of a component manipulator |
| CA2858188C (en) * | 2011-12-08 | 2018-03-06 | Praxair S.T. Technology, Inc. | Multifunction tooling fixture assembly for use in a coating related operations |
| RU2625698C1 (ru) * | 2016-08-29 | 2017-07-18 | Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт авиационных материалов" (ФГУП "ВИАМ") | Способ нанесения защитных покрытий и устройство для его осуществления |
| CN107740063B (zh) * | 2017-11-16 | 2024-07-23 | 东莞市赢心科技有限公司 | 真空镀铝设备用工件承载结构 |
| KR101869401B1 (ko) * | 2018-01-04 | 2018-07-20 | 홍성신 | 초정밀 선반의 공작물 자동 교환장치 |
| RU2688353C1 (ru) * | 2018-08-09 | 2019-05-21 | Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" (Госкорпорация "Росатом") | Устройство перемещения и вращения подложкодержателя |
| DE102018126862A1 (de) | 2018-10-26 | 2020-04-30 | Oerlikon Surface Solutions Ag, Pfäffikon | Werkstückträgereinrichtung und Beschichtungsanordnung |
| DE102019110158A1 (de) * | 2019-04-17 | 2020-10-22 | Oerlikon Surface Solutions Ag, Pfäffikon | Werkstückträgereinrichtung |
| MX2021013562A (es) | 2019-05-07 | 2021-12-10 | Oerlikon Surface Solutions Ag Pfaeffikon | Dispositivo portador de piezas de trabajo movil para sujetar piezas de trabajo que se van a tratar. |
| US12447491B2 (en) | 2019-07-26 | 2025-10-21 | Oerlikon Surface Solutions Ag, Pfäffikon | Fixture to be used in PVD processes for cylindrical, elongated substrates |
| CN114271649B (zh) * | 2021-12-27 | 2022-11-25 | 西南民族大学 | 一种艺术作品展示设备 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6620254B2 (en) * | 1998-12-15 | 2003-09-16 | Unaxis Balzers Ag | Planetary system workpiece support and method for surface treatment of workpieces |
| US20040016406A1 (en) * | 2000-11-14 | 2004-01-29 | Oleg Siniaguine | Plasma processing comprising three rotational motions of an article being processed |
| US20070057138A1 (en) * | 2005-08-29 | 2007-03-15 | Stefan Esser | Workpiece carrier device |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU370279A1 (ru) * | 1969-08-21 | 1973-02-15 | УСТРОЙСТВО дл ТРАНСПОРТИРОВКИ и СМЕНЫ ПОДЛОЖЕК в ВАКУУМНЫХ УСТАНОВКАХ | |
| JPH01288652A (ja) * | 1988-05-17 | 1989-11-20 | Komatsu Ltd | 減速機 |
| SU1828669A3 (ru) * | 1990-11-13 | 1995-05-27 | Владимир Васильевич Кульпинов | Устройство для обработки изделий в вакууме |
| DE19803278C2 (de) | 1998-01-29 | 2001-02-01 | Bosch Gmbh Robert | Werkstückträger und dessen Verwendung zur Behandlung und Beschichtung von Werkstücken |
| DE10308471B4 (de) | 2003-02-20 | 2005-03-24 | Hensoldt Ag | Beschichtungsanlage zum Beschichten von Substraten für optische Komponenten |
| CN1865495A (zh) * | 2005-05-20 | 2006-11-22 | 中国科学院半导体研究所 | 金属有机物化学气相淀积设备反应室中的公转自转机构 |
| US7988787B2 (en) * | 2007-08-27 | 2011-08-02 | Caterpillar Inc. | Workpiece support system and method |
| EP2336387B1 (de) * | 2007-10-08 | 2013-09-04 | Oerlikon Trading AG, Trübbach | Werkstückträgereinrichtung |
-
2007
- 2007-10-08 EP EP11405237.6A patent/EP2336387B1/de active Active
- 2007-10-08 EP EP07405302A patent/EP2048263B1/de not_active Not-in-force
- 2007-10-08 AT AT07405302T patent/ATE503858T1/de active
- 2007-10-08 PL PL11405237T patent/PL2336387T3/pl unknown
- 2007-10-08 ES ES07405302T patent/ES2362016T3/es active Active
- 2007-10-08 PL PL07405302T patent/PL2048263T3/pl unknown
- 2007-10-08 DE DE502007006849T patent/DE502007006849D1/de active Active
-
2008
- 2008-10-02 WO PCT/EP2008/008349 patent/WO2009046928A1/en not_active Ceased
- 2008-10-02 BR BRPI0818592A patent/BRPI0818592A2/pt not_active IP Right Cessation
- 2008-10-02 US US12/681,833 patent/US8596626B2/en active Active
- 2008-10-02 RU RU2010113596/02A patent/RU2485211C2/ru not_active IP Right Cessation
- 2008-10-02 KR KR1020107007588A patent/KR20100071057A/ko not_active Ceased
- 2008-10-02 CN CN2008801106260A patent/CN101827955B/zh active Active
- 2008-10-02 MX MX2010003727A patent/MX2010003727A/es active IP Right Grant
- 2008-10-02 JP JP2010528299A patent/JP5497647B2/ja active Active
- 2008-10-06 TW TW097138355A patent/TWI481448B/zh not_active IP Right Cessation
-
2013
- 2013-09-04 US US14/018,118 patent/US8783673B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6620254B2 (en) * | 1998-12-15 | 2003-09-16 | Unaxis Balzers Ag | Planetary system workpiece support and method for surface treatment of workpieces |
| US20040016406A1 (en) * | 2000-11-14 | 2004-01-29 | Oleg Siniaguine | Plasma processing comprising three rotational motions of an article being processed |
| US20070057138A1 (en) * | 2005-08-29 | 2007-03-15 | Stefan Esser | Workpiece carrier device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5497647B2 (ja) | 2014-05-21 |
| US8596626B2 (en) | 2013-12-03 |
| EP2336387B1 (de) | 2013-09-04 |
| DE502007006849D1 (de) | 2011-05-12 |
| EP2336387A1 (de) | 2011-06-22 |
| BRPI0818592A2 (pt) | 2017-06-13 |
| EP2048263A1 (de) | 2009-04-15 |
| WO2009046928A1 (en) | 2009-04-16 |
| KR20100071057A (ko) | 2010-06-28 |
| US20140008857A1 (en) | 2014-01-09 |
| US8783673B2 (en) | 2014-07-22 |
| CN101827955B (zh) | 2012-11-07 |
| MX2010003727A (es) | 2010-04-21 |
| JP2011502211A (ja) | 2011-01-20 |
| RU2010113596A (ru) | 2011-11-20 |
| ATE503858T1 (de) | 2011-04-15 |
| RU2485211C2 (ru) | 2013-06-20 |
| ES2362016T3 (es) | 2011-06-27 |
| CN101827955A (zh) | 2010-09-08 |
| PL2048263T3 (pl) | 2011-09-30 |
| US20100270722A1 (en) | 2010-10-28 |
| PL2336387T3 (pl) | 2014-01-31 |
| TW200936249A (en) | 2009-09-01 |
| EP2048263B1 (de) | 2011-03-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI481448B (zh) | 工件載具裝置 | |
| CN101253281B (zh) | 工件承载装置 | |
| CN110303518A (zh) | 关节部的构造 | |
| JP5713328B1 (ja) | 義歯用研磨装置 | |
| JP5480845B2 (ja) | 遊星歯車機構 | |
| JP4234652B2 (ja) | 皮膜形成用ワーク保持装置 | |
| WO2013132760A1 (ja) | 偏心揺動型歯車装置 | |
| JP5887955B2 (ja) | 減速機およびロボット | |
| JP6109009B2 (ja) | バランスウエイト装置 | |
| WO2006054485A1 (ja) | 旋回機構 | |
| JP4648806B2 (ja) | 遊星歯車装置 | |
| WO2018168765A1 (ja) | 減速装置 | |
| JP2005155782A (ja) | フレキシブルアクチュエーター | |
| JP7398217B2 (ja) | 歯車機構、減速機、および、その減速機を用いる駆動装置 | |
| JP5709112B2 (ja) | 遊星歯車機構及びその動力伝達部材 | |
| JPH02253030A (ja) | 駆動力伝達装置 | |
| WO2020217834A1 (ja) | 減速機、および、減速機を用いる駆動装置 | |
| JP2007216236A (ja) | 内歯歯車の歯面加工装置 | |
| WO2020054294A1 (ja) | ステアリングホイール及びバイブレータ | |
| FR2515555A1 (fr) | Dispositif de montage et de blocage des broches multiples de tete de percage pour machines-outils | |
| JP2017032000A (ja) | 減速装置 | |
| JPS5894987A (ja) | ロボツトの関節 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |