Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
  • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
  • B23Q1/25—Movable or adjustable work or tool supports
  • B23Q1/64—Movable or adjustable work or tool supports characterised by the purpose of the movement
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
  • C23C14/50—Substrate holders
  • C23C14/505—Substrate holders for rotation of the substrates
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
  • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
  • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16H—GEARING
  • F16H21/00—Gearings comprising primarily only links or levers, with or without slides
  • F16H21/10—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane
  • F16H21/12—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane for conveying rotary motion
  • F16H21/14—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane for conveying rotary motion by means of cranks, eccentrics, or like members fixed to one rotary member and guided along tracks on the other
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
  • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames

Definitions

• the invention relates to a workpiece carrier device according to the preamble of claim 1.
• Such devices are used for the processing of workpieces, especially in vacuum appliances, and in particular for coating said workpieces.
• WO 2007/025 397 Al discloses a workpiece carrier device of the generic type, in which the transmission part is realized as a driving disc which is eccentrically joined to a rotational axle which is closely surrounded by a corresponding recess on the transmission part. It is possible to influence the transmission ratio between the rotation of the workpieces and that of the rotary frame only via an auxiliary gear set which directly controls the motion of the driving disc.
• a further workpiece carrier device is known from
• EP 1 153 155 Al the workpiece holders rotatably mounted on rotary frames are rotated in that in each case a toothed wheel on the workpiece holder engages with a ring gear which coaxially surrounds the driving axle of the rotary frame and is torsionally rigid in relation to the base frame.
• This known workpiece carrier device is of a relatively complex structure. The transmission ratio is selectable only within fairly narrow limits.
• the rotation of the workpiece holders is effected by drivers which are anchored to the base frame and engage temporarily with said workpiece holders.
• the .notation is intermittent, which is usually disadvantageous per se and can impair the quality of the workpieces, especially when a coating consisting of a plurality of very thin layers is being applied.
• DE 103 08 471 Al discloses a workpiece carrier device in which workpiece carriers are disposed on a rotary frame in a plurality of concentric rings. Each workpiece carrier of a ring is made to rotate by an intermediate gear set engaging with a stationary central wheel on the rotary frame. The workpiece carriers pertaining to a ring are operatively connected to one another in such a way that this rotation is transmitted to the remaining workpiece carriers.
• the invention is based on the object of disclosing a workpiece carrier device of the generic type, which is of a simple structure and reliable and allows the transmission ratio to be adjusted in a simple manner. This object is achieved by the features in the characterizing portion of claim 1.
• Fig. 1 shows, in schematic form, an axial section through a workpiece carrier device of the invention, according to a first embodiment
• Fig. 2 shows a detail from Fig. 1,
• Fig. 3 shows a top view of the detail according to Fig. 2,
• Fig. 4 shows, in partial section, a portion of the workpiece carrier device of the invention, in a perspective view
• Fig. 5 shows an enlarged top view of a portion of the workpiece carrier device of the invention.
• a workpiece carrier device (Fig. 1) of the invention, there is disposed on a stationary base frame 1 a workpiece carrier 2, having a rotary frame 3 which is mounted on the base frame 1 so as to be rotatable about vertical driving axle 4 and, at the lower end, carries on its exterior a ring gear 5 with which there engages a toothed wheel 7 driven by a motor 6.
• the rotary frame 3 is realized as a closed housing which is approximately rotationally symmetrical about the driving axle 4 and has central tubular portions 8 between which are located, along the driving axle 4, successive projections (only the lowest is shown in Fig. 1, see also Fig. 4), each constituted by a bottom part 9, a cover 10 and an outer ring 11 that is concentric relative to the tubular portions 8, said outer ring I-I being joined Lo the outer edge of the bottom part 9 and projecting somewhat over the outer edge of the cover 10.
• the rotary frame 3 carries, on each of the said projections, a group 12 of workpiece holders 13, respectively distributed at the same level and in a uniform manner over a circle surrounding the driving axle 4.
• Each workpiece holder 13 is rotatable about a holder axis that is parallel to the driving axle 4, and comprises a base 14, which is located partly within a projection of the rotary frame 3, and a mount 15 for securing a workpiece 16, said mount 15 being joined to the base 14 via an axle pin 17 which is brought through the cover 10.
• the base 14 furthermore comprises a bearing pin 18 having a downwardly facing conical tip, the axis of which, as in the case of the axle pin 17, is coincident with the holder axis and is rotatably mounted in the bottom part 9, where the tip engages in a corresponding recess.
• the bearing pin 18 and the axle pin 17 are respectively joined by a crank-type intermediate portion comprising a driving pin 19 which is parallel to, but at a distance from, the holder axis.
• the base 14 is a simple bent part of substantially uniform cross-section.
• the fitted-on mount 15 has a cylindrical recess, open at the top, into which the workpiece 16, e.g. a milling head, is inserted.
• a shaft 20 which is non-rotatably anchored to the base frame 1 carries at the level of each of the groups 12 a central wheel 21 which is torsionally rigid in relation to the base frame 1 (see also Fig. 2, 3) with outer toothing.
• a driving part 22 comprising a mount which is rotatable about the driving axle 4 and has an upper arm 23 lying above the central wheel 21 and a similar lower arm 24 lying below the central wheel 21 and also an intermediate gear seL which is attached to the mount and in the example consists merely of a pinion 25 which is mounted between the upper arm 23 and the lower arm 24 and is rotatable about a pinion axis parallel to the driving axle 4 and the toothing of which engages with that of the central wheel 21.
• the pinion 25 is joined to the driving pins 19 of the group 12 of workpiece carriers 13 lying at the level of the central wheel 21 and the driving part 22 by a transmission part 26 having a circular central coupling cutout.
• the edge of said cutout carries an inwardly pointing ring gear 27 which engages with the toothing of the pinion 25.
• the transmission part 26 has for each workpiece holder 13 a driving aperture 28 through which there projects the driving pin 19 of said workpiece holder 13, said driving pin 19 being closely surrounded by the edge of said driving aperture 28.
• the transmission part 26 is therefore in each case connected in a rotatable manner, but otherwise with little play, to the workpiece holders 13 and is in engagement with the driving part 22, more precisely the pinion 25 thereof.
• the centre point of the ring gear 27 on the transmission part 26 constitutes an output point 29 which is at a distance of an eccentricity E from the driving axle 4.
• the distance of the driving pin 19 of each workpiece holder 13 from the respective holder axis likewise corresponds to the eccentricity E.
• the transmission part 26, which is represented in schematic form only in Figs. 2, 3, may be realized as a flat stamped part (see Fig. 4 in which a projection is shown but parts of the housing, most workpiece carriers 13 and the shaft 20 are omitted) having an inner ring 30, which surrounds the said coupling cutout, and an outer ring 31, in which there are provided, distributed over the circumference, in this case sixty-six driving apertures 29 for engagement with the same number of workpiece carriers 13.
• the inner ring 30 and the outer ring 31 are connected through radial spokes 32 which, in the example, are weakened by holes 33, such that they constitute predetermined breaking points which break in the event of an obstruction of one of the workpiece holders 13 of the respective group 12.
• the eccentric motion is transmitted to the driving pins 19, so that each revolution of the eccentric motion effects a rotation of the workpiece carriers 13, the vector pointing from the holder axis to the corresponding driving pin 19 being in each case parallel at all times to the above-mentioned vector.
• the motions of the transmission part 26 and the driving part 22 are viewed in a coordinate system fixed on the base frame 1 (see in this regard Fig. 3, 5; in the latter the cover 10 is omitted) and if the number of teeth of the central toothing, i.e. the toothing of the central wheel 21, is denoted by Z z and that of the transmission toothing, i.e.
• the eccentric motion runs backward in relation to the rotary frame 3.
• the ratio of the rates of rotation is u-1, i.e. in the example approx. -0.43.
• the transmission ratio depends only on z and can easily be changed, for example by exchanging the shaft 20 with the central wheels 21 and the driving parts 22. Thus, for example, a different shaft with smaller central wheels can be used and z thus reduced and the transmission ratio u increased accordingly (2) .
• the engagement with the ring gear of the transmission part then demands larger pinions, although these do not influence the transmission ratio u. If necessary, the transmission parts can additionally be exchanged, although this is more costly.
• the configuration of the described exemplary embodiment can also be modified differently without departing from the scope of the invention.
• the central toothing does not need to be non-rotatably joined to the base frame. It is for example possible to join the shaft carrying the central wheels to the base frame via an auxiliary gear set driven by the motion of the rotary frame, so that the central toothing performs in each case a rotary motion.
• An auxiliary gear set of this type can be configured and installed, for example as described in WO 2007/025 397 Al. In this case too, the transmission ratio can easily be changed by exchanging the shaft with the central wheels and driving parts as described above.

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• Chemical & Material Sciences (AREA)
• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Chemical Kinetics & Catalysis (AREA)
• Materials Engineering (AREA)
• Metallurgy (AREA)
• Organic Chemistry (AREA)
• General Engineering & Computer Science (AREA)
• General Chemical & Material Sciences (AREA)
• Manufacturing & Machinery (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Physics & Mathematics (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Retarders (AREA)
• Gear Transmission (AREA)
• Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
• Grinding Of Cylindrical And Plane Surfaces (AREA)
• Physical Vapour Deposition (AREA)
• Specific Conveyance Elements (AREA)
• Mechanical Treatment Of Semiconductor (AREA)
• Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
• Agricultural Machines (AREA)
• Soil Working Implements (AREA)

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Citations (2)

Family Cites Families (9)

• 2007
  • 2007-10-08 EP EP11405237.6A patent/EP2336387B1/de active Active
  • 2007-10-08 EP EP07405302A patent/EP2048263B1/de not_active Not-in-force
  • 2007-10-08 AT AT07405302T patent/ATE503858T1/de active
  • 2007-10-08 PL PL11405237T patent/PL2336387T3/pl unknown
  • 2007-10-08 ES ES07405302T patent/ES2362016T3/es active Active
  • 2007-10-08 PL PL07405302T patent/PL2048263T3/pl unknown
  • 2007-10-08 DE DE502007006849T patent/DE502007006849D1/de active Active
• 2008
  • 2008-10-02 WO PCT/EP2008/008349 patent/WO2009046928A1/en not_active Ceased
  • 2008-10-02 BR BRPI0818592A patent/BRPI0818592A2/pt not_active IP Right Cessation
  • 2008-10-02 US US12/681,833 patent/US8596626B2/en active Active
  • 2008-10-02 RU RU2010113596/02A patent/RU2485211C2/ru not_active IP Right Cessation
  • 2008-10-02 KR KR1020107007588A patent/KR20100071057A/ko not_active Ceased
  • 2008-10-02 CN CN2008801106260A patent/CN101827955B/zh active Active
  • 2008-10-02 MX MX2010003727A patent/MX2010003727A/es active IP Right Grant
  • 2008-10-02 JP JP2010528299A patent/JP5497647B2/ja active Active
  • 2008-10-06 TW TW097138355A patent/TWI481448B/zh not_active IP Right Cessation
• 2013
  • 2013-09-04 US US14/018,118 patent/US8783673B2/en active Active

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