JP2011205057A - 金属窒化膜、該金属窒化膜を用いた半導体装置、および半導体装置の製造方法 - Google Patents
金属窒化膜、該金属窒化膜を用いた半導体装置、および半導体装置の製造方法 Download PDFInfo
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 96
- 239000002184 metal Substances 0.000 title claims abstract description 96
- 150000004767 nitrides Chemical class 0.000 title claims abstract description 66
- 239000004065 semiconductor Substances 0.000 title claims abstract description 43
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 65
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 42
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 42
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 68
- 238000000034 method Methods 0.000 claims description 58
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 34
- 229910052710 silicon Inorganic materials 0.000 claims description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 25
- 239000010703 silicon Substances 0.000 claims description 25
- 239000007789 gas Substances 0.000 claims description 15
- 229910044991 metal oxide Inorganic materials 0.000 claims description 12
- 150000004706 metal oxides Chemical class 0.000 claims description 12
- 238000004544 sputter deposition Methods 0.000 claims description 9
- 239000011261 inert gas Substances 0.000 claims description 8
- 239000012298 atmosphere Substances 0.000 claims description 6
- 229910052914 metal silicate Inorganic materials 0.000 claims description 6
- 230000005669 field effect Effects 0.000 claims description 4
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 238000005121 nitriding Methods 0.000 claims description 3
- 230000009467 reduction Effects 0.000 claims description 3
- 230000008859 change Effects 0.000 abstract description 12
- 230000001603 reducing effect Effects 0.000 abstract description 3
- 230000001747 exhibiting effect Effects 0.000 abstract 1
- 239000010936 titanium Substances 0.000 description 99
- 229910010037 TiAlN Inorganic materials 0.000 description 55
- 230000006870 function Effects 0.000 description 49
- 239000010410 layer Substances 0.000 description 37
- 238000000137 annealing Methods 0.000 description 29
- 230000000694 effects Effects 0.000 description 20
- 230000008569 process Effects 0.000 description 18
- 238000009792 diffusion process Methods 0.000 description 14
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 14
- 229910052735 hafnium Inorganic materials 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 10
- 229910052814 silicon oxide Inorganic materials 0.000 description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 9
- 239000001301 oxygen Substances 0.000 description 9
- 229910052760 oxygen Inorganic materials 0.000 description 9
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 238000001020 plasma etching Methods 0.000 description 7
- 229910004129 HfSiO Inorganic materials 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- 238000002955 isolation Methods 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- 229910052726 zirconium Inorganic materials 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000005240 physical vapour deposition Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 238000001459 lithography Methods 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 230000004913 activation Effects 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- 229910052720 vanadium Inorganic materials 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- 108091006146 Channels Proteins 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910018516 Al—O Inorganic materials 0.000 description 1
- 108090000699 N-Type Calcium Channels Proteins 0.000 description 1
- 102000004129 N-Type Calcium Channels Human genes 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910006501 ZrSiO Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000002484 cyclic voltammetry Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 238000004627 transmission electron microscopy Methods 0.000 description 1
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28088—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being a composite, e.g. TiN
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
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Abstract
【解決手段】本発明の一実施形態に係る金属窒化膜は、TiとAlとNを含有し、該金属窒化膜のTiとAlとNのモル比率(N/(Ti+Al+N))が0.53以上であり、かつ、上記金属窒化物層のTiとAlとNのモル比率(Ti/(Ti+Al+N))が0.32以下であり、かつ上記金属窒化物層のTiとAlとNのモル比率(Al/(Ti+Al+N))が0.15以下である。
【選択図】図3
Description
<Pチャネル型MOSFET>
<不揮発メモリ>
<ReRAM>
2 ゲート絶縁膜
3 窒化チタン膜
4 金属窒化膜
5 シリコン基板
6 ゲート絶縁膜
7 窒化チタン膜
8 金属窒化膜
9 シリコン膜
301 シリコン基板
302 素子分離領域
303 ゲート絶縁膜
304 金属窒化物層
305 シリコン層
306 エクステンション領域
307 ゲート側壁
308 ソース・ドレイン領域
401 シリコン基板
402 素子分離領域
403 第1の絶縁膜
404 第2の絶縁膜
405 第3の絶縁膜
406 金属窒素化物層
407 Poly−Si
408 エクステンション領域
409 ゲート側壁
410 ソース・ドレイン領域
501 基板
502 金属窒化膜
503 可変抵抗層
504 金属窒化膜
Claims (11)
- TiとAlとNを含有する金属窒化膜であって、
前記金属窒化膜のTiとAlとNのモル比率(N/(Ti+Al+N))が0.53以上であり、かつ、前記金属窒化物層のTiとAlとNのモル比率(Ti/(Ti+Al+N))が0.32以下であり、かつ前記金属窒化物層のTiとAlとNのモル比率(Al/(Ti+Al+N))が0.15以下であること特徴とする金属窒化膜。 - ゲート電極を有する半導体装置であって、
前記ゲート電極は、請求項1記載の金属窒化膜を含んでいることを特徴とする半導体装置。 - シリコン基板上に、ゲート絶縁膜と該ゲート絶縁膜上に設けられたゲート電極とを有する電界効果トランジスタを備えた半導体装置であって、
前記ゲート絶縁膜は、金属酸化物、金属シリケート、窒素が導入された金属酸化物、もしくは金属シリケートからなる高誘電率絶縁膜を有し、
前記ゲート電極は、請求項1記載の金属窒化膜を含んでいることを特徴とする半導体装置。 - 前記電界効果トランジスタがP型MOSFETであることを特徴とする請求項3に記載の半導体装置。
- 少なくとも表面が半導体層で構成される基板と、
前記基板上に形成されたゲート電極と、
前記基板と前記ゲート電極との間に積層させた積層型ゲート絶縁膜とを備える不揮発性半導体装置であって、
前記ゲート電極は、請求項1記載の金属窒化膜を含んでいることを特徴とする半導体装置。 - 第1の電極と、
第2の電極と、
前記第1の電極と前記第2の電極との間に挟持された、抵抗値が2つの異なる値に変化する可変抵抗層とを備える不揮発性記憶素子であって、
前記第1の電極と前記第2の電極の少なくともどちらか一方の電極は、請求項1記載の金属窒化膜を含んでいることを特徴とする半導体装置。 - 前記ゲート電極が、TiとAlとNを含有する金属窒化物層と、TiN、W、WN、およびSiから選択される少なくとも一つを含む金属含有層との積層構造を有することを特徴とする請求項3に記載の半導体装置。
- 金属窒化膜を備える半導体装置の製造方法であって、
前記金属窒化膜を形成する工程を有し、
前記金属窒化膜は、該金属窒化膜のTiとAlとNのモル比率(N/(Ti+Al+N))が0.53以上であり、かつ、前記金属窒化物層のTiとAlとNのモル比率(Ti/(Ti+Al+N))が0.32以下であり、かつ前記金属窒化物層のTiとAlとNのモル比率(Al/(Ti+Al+N))が0.15以下であること特徴とする半導体装置の製造方法。 - 前記金属窒化膜を形成する工程は、
真空容器内で、窒素を含む反応性ガスと不活性ガスとの混合雰囲気下においてTiターゲットおよびAlターゲット、もしくはTiとAlとを含有する合金ターゲットをマグネトロンスパッタする工程であることを特徴とする請求項8に記載の半導体装置の製造方法。 - 前記反応性ガスの供給量を、前記TiターゲットおよびAlターゲット、もしくは前記合金ターゲットの表面が窒化することにより生じるスパッタ率の低下率が最大となる供給量以上に設定することを特徴とする請求項9に記載の半導体装置の製造方法。
- 前記反応性ガスはN2であり、前記反応性ガスの供給量が15sccm以上であることを特徴とする請求項9に記載の半導体装置の製造方法。
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