JP2011176314A - 発光素子 - Google Patents
発光素子 Download PDFInfo
- Publication number
- JP2011176314A JP2011176314A JP2011033622A JP2011033622A JP2011176314A JP 2011176314 A JP2011176314 A JP 2011176314A JP 2011033622 A JP2011033622 A JP 2011033622A JP 2011033622 A JP2011033622 A JP 2011033622A JP 2011176314 A JP2011176314 A JP 2011176314A
- Authority
- JP
- Japan
- Prior art keywords
- light emitting
- layer
- electrode
- emitting device
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 72
- 239000010410 layer Substances 0.000 claims description 203
- 239000011241 protective layer Substances 0.000 claims description 84
- 239000004065 semiconductor Substances 0.000 claims description 68
- 239000000463 material Substances 0.000 claims description 18
- 229910052759 nickel Inorganic materials 0.000 claims description 9
- 238000009792 diffusion process Methods 0.000 claims description 8
- 239000002019 doping agent Substances 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 229910002704 AlGaN Inorganic materials 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 229910052763 palladium Inorganic materials 0.000 claims description 5
- -1 AlInGaAs Inorganic materials 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 229910052718 tin Inorganic materials 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 230000015556 catabolic process Effects 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- 229910052741 iridium Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 claims description 2
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 238000005728 strengthening Methods 0.000 claims description 2
- 230000002265 prevention Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 20
- 238000005286 illumination Methods 0.000 abstract description 11
- 238000000034 method Methods 0.000 description 26
- 239000012790 adhesive layer Substances 0.000 description 16
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 230000008569 process Effects 0.000 description 8
- 230000004888 barrier function Effects 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 239000007769 metal material Substances 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- 238000002955 isolation Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000011112 polyethylene naphthalate Substances 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910010199 LiAl Inorganic materials 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
- H01L33/385—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape the electrode extending at least partially onto a side surface of the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L24/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01012—Magnesium [Mg]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1203—Rectifying Diode
- H01L2924/12032—Schottky diode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12041—LED
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12042—LASER
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
Abstract
【解決手段】発光素子100は、基板110と、上記基板の上に保護層120と、上記保護層の上に電極層160と、上記電極層の上に形成されて光を生成する発光構造物と、一端は上記発光構造物145の上面に配置され、他端は上記保護層に配置される第1電極170と、を含み、上記保護層は上記電極層及び上記第1電極のうち、少なくとも1つとショットキー接触をなす。
【選択図】図1
Description
上記第1導電型半導体層130がn型半導体層であり、上記第2導電型半導体層150がp型半導体層であり、上記第1電極170はn−オーミック金属であり、上記電極層160の第1層161がp−オーミック金属で形成される場合、上記保護層120はn型またはp型半導体層で形成できる。
上記第1導電型半導体層130がn型半導体層であり、上記第2導電型半導体層150がp型半導体層であり、上記第1電極170はn−オーミック金属であり、上記電極層160の第1層161がn−オーミック金属で形成される場合、上記保護層120はp型半導体層で形成できる。
上記第1導電型半導体層130がp型半導体層であり、上記第2導電型半導体層150がn型半導体層であり、上記第1電極170はp−オーミック金属であり、上記電極層160の第1層161がn−オーミック金属で形成される場合、上記保護層120はn型またはp型半導体層で形成できる。
上記第1導電型半導体層130がp型半導体層であり、上記第2導電型半導体層150がn型半導体層であり、上記第1電極170はp−オーミック金属であり、上記電極層160の第1層161がp−オーミック金属で形成される場合、上記保護層120はn型半導体層で形成できる。
以下、第2実施形態に従う発光素子100B及びその製造方法について詳細に説明する。第2実施形態に対する説明において、第1実施形態と重複する説明は省略または簡略に説明する。
以下、第3実施形態に従う発光素子100C及びその製造方法について詳細に説明する。第3実施形態に対する説明において、第1実施形態と重複する説明は省略または簡略に説明する。
以下、第4実施形態に従う発光素子100D及びその製造方法について詳細に説明する。第4実施形態に対する説明において、第1実施形態と重複する説明は省略または簡略に説明する。
以下、第5実施形態に従う発光素子100E及びその製造方法について詳細に説明する。第5実施形態に対する説明においては第3実施形態を参照する。
Claims (15)
- 基板と、
前記基板の上の保護層と、
前記保護層の上の電極層と、
前記電極層の上に形成されて光を生成し、第1半導体層、前記第1半導体層の下に活性層及び前記活性層の下に第2導電型半導体層を含む発光構造物と、
一端は前記発光構造物の上面に配置され、他端は前記保護層に配置される第1電極と、を含み、
前記保護層は、前記電極層及び前記第1電極のうち、少なくとも1つとショットキー接触をなすことを特徴とする発光素子。 - 前記保護層は、Si、GaN、InN、AlN、InGaN、AlGaN、InAlGaN、AlInN、AlGaAs、InGaAs、AlInGaAs、GaP、AlGaP、InGaP、AlInGaP、またはInPのうち、1つ以上を含むことを特徴とする請求項1に記載の発光素子。
- 前記保護層は、n型またはp型ドーパントを含むことを特徴とする請求項2に記載の発光素子。
- 前記ショットキー接触により形成された降伏電圧は、前記発光構造物の動作電圧より大きいことを特徴とする請求項1に記載の発光素子。
- 前記電極層は、前記保護層の上面に接触する第1層と、前記第1層の上に形成されて前記発光構造物から放出される光を反射する第2層と、を含むことを特徴とする請求項1に記載の発光素子。
- 前記第2層は、前記発光構造物とオーミック接触をなす材質を含むことを特徴とする請求項5に記載の発光素子。
- 前記第2層は、Ag、Rh、Ni、Au、Pd、Ir、Ti、Pt、W、またはAlのうち、少なくとも1つを含むことを特徴とする請求項5に記載の発光素子。
- 前記第1層は、Au、Sn、In、Pd、Cu、Mo、W、Si、Ta、Nb、またはNiのうち、少なくとも1つを含むことを特徴とする請求項5に記載の発光素子。
- 前記第1層及び第2層の間には拡散防止層及び結合強化層のうち、少なくとも1つをさらに含むことを特徴とする請求項5に記載の発光素子。
- 前記発光構造物の側面に保護部材を含むことを特徴とする請求項1に記載の発光素子。
- 前記電極層の上に第2電極を含むことを特徴とする請求項1に記載の発光素子。
- 前記基板の下に電極パッドを含み、前記電極パッドは前記保護層及び前記基板を貫通する導電性貫通ホールにより前記電極層と電気的に連結されることを特徴とする請求項1に記載の発光素子。
- 前記基板の下面の一側に第1電極パッド及び他側に第2電極パッドを含み、
前記第1電極パッドは、前記保護層及び前記基板を貫通する第1導電性貫通ホールにより第1電極と電気的に連結され、
前記第2電極パッドは、前記保護層及び前記基板を貫通する第2導電性貫通ホールにより前記電極層と電気的に連結されることを特徴とする請求項1に記載の発光素子。 - 前記基板は電気伝導性を有し、前記基板の下に電極パッドを含むことを特徴とする請求項1に記載の発光素子。
- 前記基板は電気伝導性を有し、
前記第1電極パッド及び第2電極パッドと前記基板との間、及び前記第1導電性貫通ホール及び第2導電性貫通ホールと前記基板との間に絶縁構造を含むことを特徴とする請求項13に記載の発光素子。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2010-0016043 | 2010-02-23 | ||
KR20100016043A KR100999784B1 (ko) | 2010-02-23 | 2010-02-23 | 발광 소자, 발광 소자 제조방법 및 발광 소자 패키지 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011176314A true JP2011176314A (ja) | 2011-09-08 |
JP5230761B2 JP5230761B2 (ja) | 2013-07-10 |
Family
ID=43512612
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011033622A Active JP5230761B2 (ja) | 2010-02-23 | 2011-02-18 | 発光素子 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8395182B2 (ja) |
EP (1) | EP2362450B1 (ja) |
JP (1) | JP5230761B2 (ja) |
KR (1) | KR100999784B1 (ja) |
CN (1) | CN102169937B (ja) |
TW (1) | TWI492418B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014049774A1 (ja) * | 2012-09-27 | 2014-04-03 | 富士機械製造株式会社 | 半導体素子の電極構造及びその製造方法 |
JP2014170776A (ja) * | 2013-03-01 | 2014-09-18 | Stanley Electric Co Ltd | 半導体発光装置 |
JP2018137303A (ja) * | 2017-02-21 | 2018-08-30 | 鼎元光電科技股▲ふん▼有限公司 | 発光素子及び発光素子の製造方法 |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8476649B2 (en) * | 2010-12-16 | 2013-07-02 | Micron Technology, Inc. | Solid state lighting devices with accessible electrodes and methods of manufacturing |
KR101930308B1 (ko) * | 2011-07-28 | 2018-12-18 | 엘지이노텍 주식회사 | 발광 소자 |
KR101865923B1 (ko) * | 2011-10-12 | 2018-06-08 | 엘지이노텍 주식회사 | 발광소자, 발광소자 패키지 및 라이트 유닛 |
KR101852898B1 (ko) | 2011-10-17 | 2018-04-27 | 엘지이노텍 주식회사 | 발광소자 |
US8552461B2 (en) * | 2011-11-21 | 2013-10-08 | Foxsemicon Integrated Technology, Inc. | Light emitting diode without leads |
JP5776535B2 (ja) * | 2011-12-16 | 2015-09-09 | 豊田合成株式会社 | Iii族窒化物半導体発光素子 |
TWI662719B (zh) * | 2012-03-30 | 2019-06-11 | 晶元光電股份有限公司 | 發光元件 |
KR101886156B1 (ko) * | 2012-08-21 | 2018-09-11 | 엘지이노텍 주식회사 | 발광소자 |
KR101969308B1 (ko) * | 2012-10-26 | 2019-04-17 | 삼성전자주식회사 | 반도체 발광소자 및 그 제조 방법 |
KR101976459B1 (ko) * | 2012-11-02 | 2019-05-09 | 엘지이노텍 주식회사 | 발광소자, 발광소자 패키지 및 라이트 유닛 |
CN108447855B (zh) * | 2012-11-12 | 2020-11-24 | 晶元光电股份有限公司 | 半导体光电元件的制作方法 |
KR101481012B1 (ko) * | 2013-02-21 | 2015-01-14 | 루미마이크로 주식회사 | 발광 소자 및 발광 소자 패키지 |
TWI626395B (zh) | 2013-06-11 | 2018-06-11 | 晶元光電股份有限公司 | 發光裝置 |
CN103400916A (zh) * | 2013-08-21 | 2013-11-20 | 深圳市凯信光电有限公司 | 一种led晶片结构 |
WO2016011609A1 (zh) * | 2014-07-23 | 2016-01-28 | 深圳市国源铭光电科技有限公司 | 一种led光源及led灯 |
WO2016011606A1 (zh) * | 2014-07-23 | 2016-01-28 | 深圳市国源铭光电科技有限公司 | Led光源的制作方法及批量制作方法 |
CN104167485A (zh) * | 2014-08-21 | 2014-11-26 | 中国科学院半导体研究所 | 一种自支撑led阵列光源结构 |
JP2016062911A (ja) * | 2014-09-12 | 2016-04-25 | 株式会社東芝 | 半導体発光装置 |
KR102224245B1 (ko) * | 2015-01-26 | 2021-03-08 | 엘지이노텍 주식회사 | 발광소자, 발광소자 패키지, 및 이를 포함하는 조명시스템 |
KR101987698B1 (ko) * | 2017-02-14 | 2019-06-11 | 엘지전자 주식회사 | 반도체 발광 소자를 이용한 디스플레이 장치 및 이의 제조방법 |
KR102651547B1 (ko) * | 2018-09-07 | 2024-03-28 | 삼성전자주식회사 | 발광 장치 및 이를 포함하는 디스플레이 장치 |
US10879217B1 (en) * | 2019-09-11 | 2020-12-29 | Jade Bird Display (shanghai) Limited | Multi-color LED pixel unit and micro-LED display panel |
US20220140192A1 (en) * | 2020-11-04 | 2022-05-05 | Excellence Opto. Inc. | Light-emitting diode chip structure |
CN112635630B (zh) * | 2020-12-31 | 2022-05-03 | 深圳第三代半导体研究院 | 一种发光二极管及其制造方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000091628A (ja) * | 1998-09-09 | 2000-03-31 | Murata Mfg Co Ltd | 半導体発光素子 |
JP2001339100A (ja) * | 2000-05-30 | 2001-12-07 | Shin Etsu Handotai Co Ltd | 発光素子及びその製造方法 |
JP2006086300A (ja) * | 2004-09-15 | 2006-03-30 | Sanken Electric Co Ltd | 保護素子を有する半導体発光装置及びその製造方法 |
US20070069218A1 (en) * | 2005-09-29 | 2007-03-29 | Ming-Sheng Chen | Light-emitting diode chip |
JP2008505508A (ja) * | 2004-06-30 | 2008-02-21 | クリー インコーポレイテッド | 発光デバイスをパッケージするためのチップスケール方法およびチップスケールにパッケージされた発光デバイス |
JP2008153669A (ja) * | 2006-12-15 | 2008-07-03 | Cree Inc | 発光ダイオードのための反射性マウント基板 |
JP2011520270A (ja) * | 2008-05-09 | 2011-07-14 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 放射を放出する半導体チップ |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1140891A (ja) * | 1997-07-15 | 1999-02-12 | Nec Corp | 窒化ガリウム系半導体発光素子及びその製造方法 |
TW417320B (en) * | 1998-06-18 | 2001-01-01 | Ind Tech Res Inst | Self-aligned method for fabricating a ridge-waveguide semiconductor laser diode |
JP2001220230A (ja) * | 2000-02-09 | 2001-08-14 | Murata Mfg Co Ltd | 誘電体磁器組成物 |
TW480740B (en) * | 2000-04-12 | 2002-03-21 | Uni Light Technology Inc | Light-emitting semiconductor device with reflective layer structure and method for making the same |
JP3877642B2 (ja) * | 2002-05-21 | 2007-02-07 | ローム株式会社 | 半導体チップを使用した半導体装置 |
KR100495215B1 (ko) * | 2002-12-27 | 2005-06-14 | 삼성전기주식회사 | 수직구조 갈륨나이트라이드 발광다이오드 및 그 제조방법 |
KR100601143B1 (ko) | 2003-07-30 | 2006-07-19 | 에피밸리 주식회사 | 반도체 발광 소자 |
KR101114168B1 (ko) | 2005-01-11 | 2012-06-12 | 엘지이노텍 주식회사 | 질화물 반도체 발광소자 및 그 제조 방법 |
KR100609968B1 (ko) * | 2005-06-29 | 2006-08-08 | 엘지전자 주식회사 | 정전기 보호 기능을 갖는 발광 다이오드 및 그 제조 방법 |
TWI422044B (zh) * | 2005-06-30 | 2014-01-01 | Cree Inc | 封裝發光裝置之晶片尺度方法及經晶片尺度封裝之發光裝置 |
CN100426542C (zh) | 2005-10-08 | 2008-10-15 | 璨圆光电股份有限公司 | 发光二极管芯片 |
CN100446288C (zh) * | 2006-08-01 | 2008-12-24 | 金芃 | 通孔垂直结构的半导体芯片及其制造方法 |
CN101494260B (zh) * | 2008-01-23 | 2013-02-13 | 晶元光电股份有限公司 | 发光二极管元件 |
WO2009125953A2 (ko) * | 2008-04-06 | 2009-10-15 | Song June O | 발광 소자 |
-
2010
- 2010-02-23 KR KR20100016043A patent/KR100999784B1/ko active IP Right Grant
-
2011
- 2011-02-16 EP EP11154744.4A patent/EP2362450B1/en active Active
- 2011-02-18 TW TW100105353A patent/TWI492418B/zh active
- 2011-02-18 US US13/030,600 patent/US8395182B2/en active Active
- 2011-02-18 JP JP2011033622A patent/JP5230761B2/ja active Active
- 2011-02-23 CN CN201110048470.1A patent/CN102169937B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000091628A (ja) * | 1998-09-09 | 2000-03-31 | Murata Mfg Co Ltd | 半導体発光素子 |
JP2001339100A (ja) * | 2000-05-30 | 2001-12-07 | Shin Etsu Handotai Co Ltd | 発光素子及びその製造方法 |
JP2008505508A (ja) * | 2004-06-30 | 2008-02-21 | クリー インコーポレイテッド | 発光デバイスをパッケージするためのチップスケール方法およびチップスケールにパッケージされた発光デバイス |
JP2006086300A (ja) * | 2004-09-15 | 2006-03-30 | Sanken Electric Co Ltd | 保護素子を有する半導体発光装置及びその製造方法 |
US20070069218A1 (en) * | 2005-09-29 | 2007-03-29 | Ming-Sheng Chen | Light-emitting diode chip |
JP2008153669A (ja) * | 2006-12-15 | 2008-07-03 | Cree Inc | 発光ダイオードのための反射性マウント基板 |
JP2011520270A (ja) * | 2008-05-09 | 2011-07-14 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 放射を放出する半導体チップ |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014049774A1 (ja) * | 2012-09-27 | 2014-04-03 | 富士機械製造株式会社 | 半導体素子の電極構造及びその製造方法 |
JPWO2014049774A1 (ja) * | 2012-09-27 | 2016-08-22 | 富士機械製造株式会社 | 半導体素子の電極構造及びその製造方法 |
JP2014170776A (ja) * | 2013-03-01 | 2014-09-18 | Stanley Electric Co Ltd | 半導体発光装置 |
JP2018137303A (ja) * | 2017-02-21 | 2018-08-30 | 鼎元光電科技股▲ふん▼有限公司 | 発光素子及び発光素子の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
EP2362450A3 (en) | 2014-05-07 |
CN102169937B (zh) | 2014-03-26 |
KR100999784B1 (ko) | 2010-12-08 |
TWI492418B (zh) | 2015-07-11 |
JP5230761B2 (ja) | 2013-07-10 |
EP2362450A2 (en) | 2011-08-31 |
EP2362450B1 (en) | 2018-07-18 |
CN102169937A (zh) | 2011-08-31 |
US20110204402A1 (en) | 2011-08-25 |
US8395182B2 (en) | 2013-03-12 |
TW201214770A (en) | 2012-04-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5230761B2 (ja) | 発光素子 | |
JP5973693B2 (ja) | 発光素子及び発光素子パッケージ | |
EP2381490B1 (en) | Light emitting device with electrode material having different plasmon frequency differing from emitted light | |
JP5189176B2 (ja) | 発光素子 | |
JP5458044B2 (ja) | 発光素子および発光素子の製造方法 | |
JP5858633B2 (ja) | 発光素子、発光素子パッケージ | |
KR101154709B1 (ko) | 발광 소자, 발광 소자 제조방법, 발광 소자 패키지 및 조명 시스템 | |
JP5736479B2 (ja) | 発光素子、発光素子製造方法 | |
JP6062149B2 (ja) | 発光素子及び発光素子パッケージ | |
US20110095263A1 (en) | Light emitting device and light emitting device package | |
JP5276680B2 (ja) | 発光素子パッケージ、照明システム | |
JP2011129922A (ja) | 発光素子、発光素子の製造方法、発光素子パッケージ及び照明システム | |
KR20120020061A (ko) | 발광 소자, 발광 소자 패키지, 라이트 유닛 | |
JP5266349B2 (ja) | 発光装置 | |
JP2011091402A (ja) | 発光素子、発光素子の製造方法 | |
EP2405496A2 (en) | Light emitting device with an N-face between two n-type semiconductor layers | |
EP2381492B1 (en) | Light emitting device with resonant thickness of one semiconductor layer | |
KR101064064B1 (ko) | 발광 소자 | |
KR20120019750A (ko) | 발광 소자 | |
KR20110139445A (ko) | 발광 소자, 발광 소자 제조방법, 발광 소자 패키지 및 조명 시스템 | |
KR101714049B1 (ko) | 발광 소자 패키지 | |
KR20120087035A (ko) | 발광 소자 및 발광 소자 패키지 | |
KR102251120B1 (ko) | 발광소자 | |
KR20120058350A (ko) | 발광 소자 | |
KR101693869B1 (ko) | 발광 소자, 발광 소자 제조방법, 발광 소자 패키지 및 조명 시스템 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120926 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121002 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121227 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130219 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130319 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160329 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5230761 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |