JP2011066400A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2011066400A5 JP2011066400A5 JP2010182024A JP2010182024A JP2011066400A5 JP 2011066400 A5 JP2011066400 A5 JP 2011066400A5 JP 2010182024 A JP2010182024 A JP 2010182024A JP 2010182024 A JP2010182024 A JP 2010182024A JP 2011066400 A5 JP2011066400 A5 JP 2011066400A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor layer
- layer
- single crystal
- photoelectric conversion
- crystal semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 37
- 239000013078 crystal Substances 0.000 claims 19
- 238000006243 chemical reaction Methods 0.000 claims 16
- 239000000758 substrate Substances 0.000 claims 13
- 239000012535 impurity Substances 0.000 claims 12
- 238000004519 manufacturing process Methods 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 238000005530 etching Methods 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
Images
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010182024A JP5564358B2 (ja) | 2009-08-18 | 2010-08-17 | 光電変換装置及びその作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009189068 | 2009-08-18 | ||
| JP2009189068 | 2009-08-18 | ||
| JP2010182024A JP5564358B2 (ja) | 2009-08-18 | 2010-08-17 | 光電変換装置及びその作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011066400A JP2011066400A (ja) | 2011-03-31 |
| JP2011066400A5 true JP2011066400A5 (enExample) | 2013-09-12 |
| JP5564358B2 JP5564358B2 (ja) | 2014-07-30 |
Family
ID=43604315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010182024A Expired - Fee Related JP5564358B2 (ja) | 2009-08-18 | 2010-08-17 | 光電変換装置及びその作製方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20110041910A1 (enExample) |
| JP (1) | JP5564358B2 (enExample) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5912404B2 (ja) | 2010-10-29 | 2016-04-27 | 株式会社半導体エネルギー研究所 | 光電変換装置 |
| US8558341B2 (en) | 2010-12-17 | 2013-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion element |
| EP2690669A4 (en) * | 2011-03-25 | 2014-08-20 | Sanyo Electric Co | SOLAR CELL |
| US9012769B2 (en) | 2011-05-25 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device |
| US8623734B2 (en) * | 2011-06-01 | 2014-01-07 | International Business Machines Corporation | Method to selectively grow phase change material inside a via hole |
| US9159939B2 (en) | 2011-07-21 | 2015-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device |
| WO2013031298A1 (ja) * | 2011-08-31 | 2013-03-07 | 三洋電機株式会社 | 太陽電池モジュール及びその製造方法 |
| JP2013058562A (ja) | 2011-09-07 | 2013-03-28 | Semiconductor Energy Lab Co Ltd | 光電変換装置 |
| JP2013077685A (ja) | 2011-09-30 | 2013-04-25 | Semiconductor Energy Lab Co Ltd | 光電変換装置 |
| JP5927027B2 (ja) * | 2011-10-05 | 2016-05-25 | 株式会社半導体エネルギー研究所 | 光電変換装置 |
| JP5917082B2 (ja) | 2011-10-20 | 2016-05-11 | 株式会社半導体エネルギー研究所 | 光電変換装置の作製方法 |
| AU2012362505B2 (en) * | 2011-12-26 | 2015-08-20 | Solexel, Inc. | Systems and methods for enhanced light trapping in solar cells |
| JP2015133339A (ja) * | 2012-04-25 | 2015-07-23 | パナソニック株式会社 | 光電変換装置 |
| JP6115806B2 (ja) * | 2012-11-29 | 2017-04-19 | パナソニックIpマネジメント株式会社 | 光起電力装置 |
| JP6125042B2 (ja) * | 2013-12-04 | 2017-05-10 | 三菱電機株式会社 | 太陽電池セルの製造方法 |
| CN104966789A (zh) * | 2015-06-30 | 2015-10-07 | 深圳市华星光电技术有限公司 | 一种电荷连接层及其制造方法、叠层oled器件 |
| CN107482081B (zh) * | 2017-07-20 | 2020-06-12 | 东莞南玻光伏科技有限公司 | 太阳能电池片及其制备方法和太阳能电池 |
| US10698158B1 (en) * | 2017-11-28 | 2020-06-30 | Facebook Technologies, Llc | Optical waveguides in micro-LED devices |
| CN208691627U (zh) * | 2018-08-03 | 2019-04-02 | 奥特斯科技(重庆)有限公司 | 具有嵌入腔中的部件且前侧上具有双介电层的部件承载件 |
| US11656546B2 (en) | 2020-02-27 | 2023-05-23 | Canon Kabushiki Kaisha | Exposure apparatus for uniform light intensity and methods of using the same |
| US11367803B2 (en) | 2020-04-01 | 2022-06-21 | Taiwan Semiconductor Manufacturing Company Ltd. | Light detecting device, optical device and method of manufacturing the same |
| CN111628015A (zh) * | 2020-05-06 | 2020-09-04 | 电子科技大学 | 一种高速高效率msm光电探测器及其制备方法 |
| US11443940B2 (en) * | 2020-06-24 | 2022-09-13 | Canon Kabushiki Kaisha | Apparatus for uniform light intensity and methods of using the same |
Family Cites Families (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3536299A1 (de) * | 1985-10-11 | 1987-04-16 | Nukem Gmbh | Solarzelle aus silizium |
| JP2500245B2 (ja) * | 1992-05-07 | 1996-05-29 | 岐阜プラスチック工業株式会社 | パレット容器 |
| JPH07130665A (ja) * | 1993-11-09 | 1995-05-19 | Sanyo Electric Co Ltd | 凹凸表面の形成方法および凹凸表面基板 |
| JP3792281B2 (ja) * | 1995-01-09 | 2006-07-05 | 株式会社半導体エネルギー研究所 | 太陽電池 |
| US6191007B1 (en) * | 1997-04-28 | 2001-02-20 | Denso Corporation | Method for manufacturing a semiconductor substrate |
| US6548382B1 (en) * | 1997-07-18 | 2003-04-15 | Silicon Genesis Corporation | Gettering technique for wafers made using a controlled cleaving process |
| US6335479B1 (en) * | 1998-10-13 | 2002-01-01 | Dai Nippon Printing Co., Ltd. | Protective sheet for solar battery module, method of fabricating the same and solar battery module |
| JP4329183B2 (ja) * | 1999-10-14 | 2009-09-09 | ソニー株式会社 | 単一セル型薄膜単結晶シリコン太陽電池の製造方法、バックコンタクト型薄膜単結晶シリコン太陽電池の製造方法および集積型薄膜単結晶シリコン太陽電池の製造方法 |
| KR100378016B1 (ko) * | 2001-01-03 | 2003-03-29 | 삼성에스디아이 주식회사 | 태양 전지용 반도체 기판의 텍스처링 방법 |
| KR20040068928A (ko) * | 2001-11-29 | 2004-08-02 | 오리진 에너지 솔라 피티와이 리미티드 | 반도체 가공 방법 |
| US7388147B2 (en) * | 2003-04-10 | 2008-06-17 | Sunpower Corporation | Metal contact structure for solar cell and method of manufacture |
| EP1521309A1 (de) * | 2003-10-02 | 2005-04-06 | Scheuten Glasgroep | Serienverschaltung von Solarzellen mit integrierten Halbleiterkörpern, Verfahren zur Herstellung und Photovoltaikmodul mit Serienverschaltung |
| US7144751B2 (en) * | 2004-02-05 | 2006-12-05 | Advent Solar, Inc. | Back-contact solar cells and methods for fabrication |
| US20060060238A1 (en) * | 2004-02-05 | 2006-03-23 | Advent Solar, Inc. | Process and fabrication methods for emitter wrap through back contact solar cells |
| WO2005093855A1 (ja) * | 2004-03-29 | 2005-10-06 | Kyocera Corporation | 太陽電池モジュール及びこれを用いた太陽光発電装置 |
| US20060130891A1 (en) * | 2004-10-29 | 2006-06-22 | Carlson David E | Back-contact photovoltaic cells |
| US7700400B2 (en) * | 2004-12-27 | 2010-04-20 | Naoetsu Electronics Co., Ltd. | Back junction solar cell and process for producing the same |
| JP2006216841A (ja) * | 2005-02-04 | 2006-08-17 | Toyota Motor Corp | 光電変換素子 |
| US7554031B2 (en) * | 2005-03-03 | 2009-06-30 | Sunpower Corporation | Preventing harmful polarization of solar cells |
| EP1763086A1 (en) * | 2005-09-09 | 2007-03-14 | Interuniversitair Micro-Elektronica Centrum | Photovoltaic cell with thick silicon oxide and silicon nitride passivation and fabrication method |
| CN102420271B (zh) * | 2005-12-21 | 2016-07-06 | 太阳能公司 | 背面触点太阳能电池及制造方法 |
| WO2007112452A2 (en) * | 2006-03-28 | 2007-10-04 | Solopower, Inc. | Technique for manufacturing photovoltaic modules |
| EP2002484A4 (en) * | 2006-04-05 | 2016-06-08 | Silicon Genesis Corp | METHOD AND STRUCTURE FOR MANUFACTURING PHOTOVOLTAIC CELLS USING A LAYER TRANSFER PROCESS |
| US7811900B2 (en) * | 2006-09-08 | 2010-10-12 | Silicon Genesis Corporation | Method and structure for fabricating solar cells using a thick layer transfer process |
| GB2442254A (en) * | 2006-09-29 | 2008-04-02 | Renewable Energy Corp Asa | Back contacted solar cell |
| JP2009152222A (ja) * | 2006-10-27 | 2009-07-09 | Kyocera Corp | 太陽電池素子の製造方法 |
| US7705237B2 (en) * | 2006-11-27 | 2010-04-27 | Sunpower Corporation | Solar cell having silicon nano-particle emitter |
| US20080217563A1 (en) * | 2007-03-07 | 2008-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus |
| JP2008282926A (ja) * | 2007-05-09 | 2008-11-20 | Sanyo Electric Co Ltd | 太陽電池モジュール |
| JP2009135338A (ja) * | 2007-11-30 | 2009-06-18 | Sanyo Electric Co Ltd | 太陽電池及び太陽電池の製造方法 |
| JP5572307B2 (ja) * | 2007-12-28 | 2014-08-13 | 株式会社半導体エネルギー研究所 | 光電変換装置の製造方法 |
| JP2009176782A (ja) * | 2008-01-21 | 2009-08-06 | Sanyo Electric Co Ltd | 太陽電池モジュール |
| CN101499480B (zh) * | 2008-01-30 | 2013-03-20 | 松下电器产业株式会社 | 半导体芯片及半导体装置 |
| US8481845B2 (en) * | 2008-02-05 | 2013-07-09 | Gtat Corporation | Method to form a photovoltaic cell comprising a thin lamina |
| US8017429B2 (en) * | 2008-02-19 | 2011-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing photoelectric conversion device |
| US8338218B2 (en) * | 2008-06-26 | 2012-12-25 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device module and manufacturing method of the photoelectric conversion device module |
| JP2010283339A (ja) * | 2009-05-02 | 2010-12-16 | Semiconductor Energy Lab Co Ltd | 光電変換装置及びその作製方法 |
-
2010
- 2010-08-11 US US12/854,201 patent/US20110041910A1/en not_active Abandoned
- 2010-08-17 JP JP2010182024A patent/JP5564358B2/ja not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2011066400A5 (enExample) | ||
| JP2009200267A5 (enExample) | ||
| MX336453B (es) | Método para formar una estructura de microleds y arreglo de estructuras de microleds con una capa eléctricamente asilante. | |
| WO2012165903A3 (ko) | 반도체 발광 소자,그 제조 방법,이를 포함하는 반도체 발광 소자 패키지 및 레이저 가공 장치 | |
| JP2010153823A5 (enExample) | ||
| TW201130151A (en) | Photoelectric conversion device and manufacturing method thereof | |
| JP2009520369A5 (enExample) | ||
| JP2014515560A5 (enExample) | ||
| JP2011003608A5 (enExample) | ||
| JP2012129518A5 (ja) | 光電変換装置の作製方法 | |
| JP2019161047A5 (enExample) | ||
| JP2009164593A5 (enExample) | ||
| WO2011091959A8 (de) | Verfahren zur lokalen hochdotierung und kontaktierung einer halbleiterstruktur, welche eine solarzelle oder eine vorstufe einer solarzelle ist | |
| WO2011126209A3 (ko) | Pn접합 및 쇼트키 접합을 갖는 다중 태양 전지 및 이의 제조 방법 | |
| MY184055A (en) | Structures and methods of formation of contiguous and non-contiguous base regions for high efficiency back-contact solar cells | |
| JP2011204927A5 (enExample) | ||
| JP2010087495A5 (ja) | 光電変換装置の作製方法 | |
| WO2012173416A3 (en) | Semiconductor light emitting device and method of menufacturing the same | |
| JP2012049466A5 (enExample) | ||
| WO2008108299A1 (ja) | 窒化物半導体素子および窒化物半導体素子の製造方法 | |
| WO2012115541A3 (en) | Light-emitting nitride semiconductor device comprising substrate having through holes | |
| WO2008090788A1 (ja) | 窒化物半導体素子、窒化物半導体パッケージおよび窒化物半導体素子の製造方法 | |
| WO2014011260A3 (en) | High efficiency solar cell structures and manufacturing methods | |
| JP2013191657A5 (enExample) | ||
| KR101323657B1 (ko) | 반도체 발광 다이오드 및 그의 제조 방법 |