JP2011066287A - 接合装置および接合方法 - Google Patents
接合装置および接合方法 Download PDFInfo
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- JP2011066287A JP2011066287A JP2009216985A JP2009216985A JP2011066287A JP 2011066287 A JP2011066287 A JP 2011066287A JP 2009216985 A JP2009216985 A JP 2009216985A JP 2009216985 A JP2009216985 A JP 2009216985A JP 2011066287 A JP2011066287 A JP 2011066287A
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Classifications
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- G01—MEASURING; TESTING
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Abstract
【解決手段】両被接合物91,92がZ方向において相対的に移動され被接合物91と被接合物92とが接触する(ステップS13)。そして、両被接合物91,92の接触状態において、両被接合物91,92の水平方向における位置ずれΔDが測定される(ステップS14)。その後、両被接合物91,92が水平方向に相対的に移動され両被接合物91,92の位置合わせが再度実行され、当該位置ずれΔDが補正される(ステップS17)。
【選択図】図8
Description
<1−1.装置構成>
図1および図2は、本発明の第1実施形態に係る接合装置1(1Aとも称する)の内部構造を示す側面図である。なお、以下、各図においては、便宜上、XYZ直交座標系を用いて方向等を示している。
また、接合装置1は、被接合物91,92の水平位置(詳細にはX,Y,θ)を認識する位置認識部28を備えている。
つぎに、図8を参照しながら、第1実施形態に係る動作について説明する。図8は、第1実施形態に係る動作を示すフローチャートである。
具体的には、接触前の時点において、図9のような理想状態(平行配置状態)とは異なる状態(傾斜状態)で両被接合物91,92が配置されることがある。より詳細には、図11に示すように、ステージ12とヘッド22との両者の平行度が十分ではなく、当該両者12,22(ひいては両被接合物91,92)が若干傾いて配置されることがある。
第2実施形態は、第1実施形態の変形例である。以下、第1実施形態との相違点を中心に説明する。
第1実施形態においては、接触後の位置ずれを解消するために、被接合物92を一旦上昇させて両被接合物91,92を一旦非接触状態にする場合を例示したが、これに限定されない。たとえば、両被接合物91,92の接触状態を維持したまま当該両被接合物91,92の位置ずれを補正して当該両被接合物91,92の位置合わせを行うようにしてもよい。第3実施形態においては、このような変形例について、第1実施形態との相違点を中心に説明する。
上記第1実施形態等においては、パッド93と金属バンプ94とが固相のまま位置合わせされた後に、当該パッド93と金属バンプ94とが加熱され接合される場合について例示した。
以上、この発明の実施の形態について説明したが、この発明は上記説明した内容のものに限定されるものではない。
2 真空チャンバ
12 ステージ
22 ヘッド
22h ヒータ
23 アライメントテーブル
28L,28M,28N 撮像部(カメラ)
31a,31b,31c ピエゾアクチュエータ
91,92 被接合物
93 パッド
94 金属バンプ
95,96 薄膜
97 樹脂層
GAa,GAb 撮影画像
MK1a,MK1b,MK2a,MK2b アライメントマーク
ΔD,Δx,Δy,Δθ 位置ずれ量
ΔZ Z方向変位量
Claims (16)
- 第1の被接合物と第2の被接合物との両被接合物を接合する接合装置であって、
前記第1の被接合物と前記第2の被接合物とを所定方向において相対的に移動する相対移動手段と、
前記相対移動手段による相対移動動作により前記第1の被接合物と前記第2の被接合物とが接触した状態において、前記両被接合物の位置ずれであって前記所定方向に垂直な平面内における位置ずれを測定する測定手段と、
前記位置ずれを補正して前記両被接合物の位置合わせを行うアライメント手段と、
を備えることを特徴とする接合装置。 - 請求項1に記載の接合装置において、
前記測定手段は、前記第1の被接合物に付された第1のアライメントマークと前記第2の被接合物に付された第2のアライメントマークとの両アライメントマークを含む撮影画像を取得し、当該撮影画像に基づいて前記両被接合物の前記位置ずれを測定することを特徴とする接合装置。 - 請求項2に記載の接合装置において、
前記測定手段は、前記両アライメントマークを前記所定方向に離間させた状態で前記撮影画像を取得し、前記撮影画像内の前記両アライメントマークに対応する部分のエッジをベクトル相関法により検出することによって、前記両被接合物の前記位置ずれを測定することを特徴とする接合装置。 - 請求項3に記載の接合装置において、
前記測定手段の撮像光学系は、物体からの光の結像位置を調節する焦点位置調節手段を有し、
前記撮影画像は、前記所定方向における前記第1のアライメントマークの位置と前記第2のアライメントマークの位置との間の位置の仮想物体からの光が撮像部の撮像面に結像する状態で、取得されることを特徴とする接合装置。 - 請求項1ないし請求項4のいずれかに記載の接合装置において、
前記測定手段による前記位置ずれの測定動作と前記アライメント手段による前記位置ずれの補正動作とが繰り返し実行されることを特徴とする接合装置。 - 請求項1ないし請求項5のいずれかに記載の接合装置において、
前記アライメント手段は、前記両被接合物の接触状態を維持したまま前記位置ずれを補正して前記両被接合物の位置合わせを行うことを特徴とする接合装置。 - 請求項6に記載の接合装置において、
前記アライメント手段は、表面活性化処理が施された前記両被接合物に対して、前記両被接合物の加圧接触状態を維持したまま前記位置ずれを補正して前記両被接合物の位置合わせを行うことを特徴とする接合装置。 - 請求項1ないし請求項5のいずれかに記載の接合装置において、
前記相対移動手段は、前記測定手段による前記位置ずれの測定動作の後に、前記両被接合物を前記所定方向において相対的に移動して前記両被接合物の接触状態を一旦解除し、
前記アライメント手段は、前記両被接合物の接触解除状態において、前記位置ずれを補正して前記両被接合物の位置合わせを行い、
前記相対移動手段は、前記アライメント手段による前記位置合わせ後において、前記両被接合物を再び接触させる再接触動作を行うことを特徴とする接合装置。 - 請求項8に記載の接合装置において、
前記相対移動手段は、表面活性化処理が施された前記両被接合物に対して、前記再接触動作を行うことを特徴とする接合装置。 - 請求項1ないし請求項5のいずれかに記載の接合装置において、
前記第1の被接合物に設けられた金属バンプと前記第2の被接合物にて前記金属バンプに対向する対向部分とが接触する状態において、前記金属バンプを加熱または冷却する加熱冷却手段、
をさらに備え、
前記加熱冷却手段は、前記金属バンプと前記対向部分との接触状態において、前記金属バンプを加熱して溶融させ、
前記測定手段は、前記金属バンプと前記対向部分との接触状態であり且つ前記金属バンプの加熱溶融状態でもある第1の状態において前記位置ずれを測定し、
前記アライメント手段は、前記第1の状態において前記位置ずれを補正して前記両被接合物の位置合わせを行い、
前記加熱冷却手段は、前記位置合わせ後において前記金属バンプを冷却して固化させることを特徴とする接合装置。 - 請求項10に記載の接合装置において、
前記測定手段は、前記加熱冷却手段による前記金属バンプの加熱開始から所定時間経過後に前記位置ずれを測定することを特徴とする接合装置。 - 請求項1ないし請求項11のいずれかに記載の接合装置において、
前記両被接合物は、接触前において固相状態を有することを特徴とする接合装置。 - 請求項1ないし請求項6のいずれかに記載の接合装置において、
前記両被接合物の少なくとも一方は、その接合表面に樹脂層を有しており、
前記測定手段は、前記樹脂層部分において前記両被接合物が接触した状態において、前記両被接合物の前記位置ずれを測定することを特徴とする接合装置。 - 請求項1ないし請求項13のいずれかに記載の接合装置において、
前記両被接合物の平行度を調節する調節機構、
をさらに備え、
前記調節機構は、非接触状態における前記両被接合物の位置ずれと接触状態における前記両被接合物の位置ずれとに基づいて、前記両被接合物の接触直前における前記平行度を推定し、その推定結果に基づき、前記両被接合物の平行度を調節することを特徴とする接合装置。 - 請求項1ないし請求項14のいずれかに記載の接合装置において、
前記アライメント手段は、前記測定手段による前記位置ずれに関する測定結果が所定の許容誤差範囲内に収まる場合には、前記所定方向に平行な軸周りの回転方向の移動を伴うことなく、前記平面に平行な2つの並進方向に移動して前記位置合わせを行うことを特徴とする接合装置。 - 第1の被接合物と第2の被接合物との両被接合物を接合する接合方法であって、
a)前記第1の被接合物と前記第2の被接合物とを所定方向において相対的に移動し前記第1の被接合物と前記第2の被接合物とを接触させるステップと、
b)前記第1の被接合物と前記第2の被接合物との接触状態において、前記両被接合物の位置ずれであって前記所定方向に垂直な平面内における位置ずれを測定するステップと、
c)前記位置ずれを補正して前記両被接合物の位置合わせを行うステップと、
を備えることを特徴とする接合方法。
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US20160084638A1 (en) | 2016-03-24 |
EP2479786A4 (en) | 2013-04-03 |
US9243894B2 (en) | 2016-01-26 |
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US20120127485A1 (en) | 2012-05-24 |
WO2011033797A1 (ja) | 2011-03-24 |
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US9379082B2 (en) | 2016-06-28 |
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