JP2011054873A5 - - Google Patents
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- Publication number
- JP2011054873A5 JP2011054873A5 JP2009204528A JP2009204528A JP2011054873A5 JP 2011054873 A5 JP2011054873 A5 JP 2011054873A5 JP 2009204528 A JP2009204528 A JP 2009204528A JP 2009204528 A JP2009204528 A JP 2009204528A JP 2011054873 A5 JP2011054873 A5 JP 2011054873A5
- Authority
- JP
- Japan
- Prior art keywords
- memory element
- volatile memory
- nonvolatile memory
- magnetic material
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000000696 magnetic material Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009204528A JP2011054873A (ja) | 2009-09-04 | 2009-09-04 | 不揮発性メモリ素子の製造方法 |
| CN2010102635449A CN102013454B (zh) | 2009-09-04 | 2010-08-26 | 非易失性存储器件的制造方法 |
| US12/869,904 US8268713B2 (en) | 2009-09-04 | 2010-08-27 | Method of manufacturing nonvolatile memory device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009204528A JP2011054873A (ja) | 2009-09-04 | 2009-09-04 | 不揮発性メモリ素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011054873A JP2011054873A (ja) | 2011-03-17 |
| JP2011054873A5 true JP2011054873A5 (enExample) | 2012-08-30 |
Family
ID=43648096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009204528A Abandoned JP2011054873A (ja) | 2009-09-04 | 2009-09-04 | 不揮発性メモリ素子の製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8268713B2 (enExample) |
| JP (1) | JP2011054873A (enExample) |
| CN (1) | CN102013454B (enExample) |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5786341B2 (ja) * | 2010-09-06 | 2015-09-30 | ソニー株式会社 | 記憶素子、メモリ装置 |
| JP5214691B2 (ja) | 2010-09-17 | 2013-06-19 | 株式会社東芝 | 磁気メモリ及びその製造方法 |
| JP5742072B2 (ja) * | 2010-10-06 | 2015-07-01 | 住友電気工業株式会社 | 半導体装置およびその製造方法 |
| JP2012089643A (ja) * | 2010-10-19 | 2012-05-10 | Sony Corp | 記憶装置の製造方法、並びに記憶素子および記憶装置 |
| US20120267733A1 (en) * | 2011-04-25 | 2012-10-25 | International Business Machines Corporation | Magnetic stacks with perpendicular magnetic anisotropy for spin momentum transfer magnetoresistive random access memory |
| JP5768498B2 (ja) | 2011-05-23 | 2015-08-26 | ソニー株式会社 | 記憶素子、記憶装置 |
| US9054295B2 (en) * | 2011-08-23 | 2015-06-09 | Micron Technology, Inc. | Phase change memory cells including nitrogenated carbon materials, methods of forming the same, and phase change memory devices including nitrogenated carbon materials |
| JP5535161B2 (ja) * | 2011-09-20 | 2014-07-02 | 株式会社東芝 | 磁気抵抗効果素子およびその製造方法 |
| KR20130034260A (ko) * | 2011-09-28 | 2013-04-05 | 에스케이하이닉스 주식회사 | 반도체 장치의 제조방법 |
| JP2013115413A (ja) | 2011-12-01 | 2013-06-10 | Sony Corp | 記憶素子、記憶装置 |
| JP2013115400A (ja) | 2011-12-01 | 2013-06-10 | Sony Corp | 記憶素子、記憶装置 |
| JP5836163B2 (ja) * | 2012-03-08 | 2015-12-24 | ルネサスエレクトロニクス株式会社 | 磁気メモリセル、磁気メモリセルの製造方法 |
| JP2013247198A (ja) * | 2012-05-24 | 2013-12-09 | Toshiba Corp | 磁気抵抗素子及びその製造方法 |
| JP2014090109A (ja) * | 2012-10-31 | 2014-05-15 | Hitachi High-Technologies Corp | 磁気抵抗素子の製造方法 |
| CN103337589B (zh) * | 2013-06-27 | 2015-03-11 | 合肥工业大学 | 基于硫属亚铜化合物的准一维纳米阻变存储器与制备方法 |
| US9123879B2 (en) | 2013-09-09 | 2015-09-01 | Masahiko Nakayama | Magnetoresistive element and method of manufacturing the same |
| US9368717B2 (en) | 2013-09-10 | 2016-06-14 | Kabushiki Kaisha Toshiba | Magnetoresistive element and method for manufacturing the same |
| US9385304B2 (en) | 2013-09-10 | 2016-07-05 | Kabushiki Kaisha Toshiba | Magnetic memory and method of manufacturing the same |
| US9231196B2 (en) | 2013-09-10 | 2016-01-05 | Kuniaki SUGIURA | Magnetoresistive element and method of manufacturing the same |
| KR102259870B1 (ko) * | 2014-07-30 | 2021-06-04 | 삼성전자주식회사 | 자기 메모리 장치 및 그의 형성방법 |
| US9548450B2 (en) * | 2014-09-23 | 2017-01-17 | Micron Technology, Inc. | Devices containing metal chalcogenides |
| CN106328196B (zh) * | 2015-07-01 | 2019-03-05 | 华邦电子股份有限公司 | 电阻式存储器装置的写入方法 |
| KR101671860B1 (ko) * | 2015-07-20 | 2016-11-03 | 서울대학교산학협력단 | 터널링 절연막이 삽입된 저항성 메모리 소자 및 이를 이용한 메모리 어레이와 그 제조방법 |
| US9941469B2 (en) | 2015-10-06 | 2018-04-10 | International Business Machines Corporation | Double spin filter tunnel junction |
| WO2017068611A1 (ja) * | 2015-10-21 | 2017-04-27 | キヤノンアネルバ株式会社 | 磁気抵抗素子の製造方法 |
| JP2017183602A (ja) * | 2016-03-31 | 2017-10-05 | ソニー株式会社 | 不揮発性メモリ素子および不揮発性メモリ素子の製造方法 |
| JP2017183560A (ja) * | 2016-03-31 | 2017-10-05 | ソニー株式会社 | メモリ素子、及びメモリ素子の製造方法 |
| US10062845B1 (en) * | 2016-05-13 | 2018-08-28 | Crossbar, Inc. | Flatness of memory cell surfaces |
| US10522754B2 (en) | 2016-06-15 | 2019-12-31 | Crossbar, Inc. | Liner layer for dielectric block layer |
| US10749110B1 (en) | 2016-07-15 | 2020-08-18 | Crossbar, Inc. | Memory stack liner comprising dielectric block layer material |
| CN109983594B (zh) * | 2016-12-27 | 2023-06-20 | 英特尔公司 | 具有多种类型的嵌入式非易失性存储器器件的单片集成电路 |
| EP3343655B1 (en) * | 2016-12-29 | 2022-03-02 | IMEC vzw | Magnetic tunnel junction device |
| KR102305342B1 (ko) * | 2019-11-14 | 2021-09-24 | 울산과학기술원 | 2차원 강유전성 물질을 이용한 비휘발성 3진 메모리 소자 및 이의 제조 방법 |
| CN111864058B (zh) * | 2020-07-29 | 2023-04-18 | 浙江驰拓科技有限公司 | 存储位元的制备方法及mram的制备方法 |
| JP2023042173A (ja) * | 2021-09-14 | 2023-03-27 | キオクシア株式会社 | 磁気メモリデバイス |
| KR102781519B1 (ko) * | 2022-12-29 | 2025-03-17 | 인하대학교 산학협력단 | 코발트 박막의 건식 식각방법 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5761115A (en) | 1996-05-30 | 1998-06-02 | Axon Technologies Corporation | Programmable metallization cell structure and method of making same |
| US6165803A (en) * | 1999-05-17 | 2000-12-26 | Motorola, Inc. | Magnetic random access memory and fabricating method thereof |
| ID28920A (id) | 1999-07-22 | 2001-07-12 | Koninkl Philips Electronics Nv | Metode pembuatan peranti sambungan saluran magnetik |
| US20020036876A1 (en) * | 2000-09-06 | 2002-03-28 | Yasuhiro Kawawake | Magnetoresistive element, method for manufacturing the same, and magnetic device using the same |
| AU2002225761A1 (en) * | 2000-11-30 | 2002-06-11 | Asm America, Inc. | Thin films for magnetic devices |
| JP2002334972A (ja) * | 2001-05-10 | 2002-11-22 | Sony Corp | 磁気メモリ装置 |
| US6693821B2 (en) | 2001-06-28 | 2004-02-17 | Sharp Laboratories Of America, Inc. | Low cross-talk electrically programmable resistance cross point memory |
| JP2003017782A (ja) | 2001-07-04 | 2003-01-17 | Rikogaku Shinkokai | キャリヤスピン注入磁化反転型磁気抵抗効果膜と該膜を用いた不揮発性メモリー素子及び該素子を用いたメモリー装置 |
| JP2003078185A (ja) | 2001-09-03 | 2003-03-14 | Nec Corp | 強磁性トンネル接合構造及びその製造方法並びに該強磁性トンネル接合を用いた磁気メモリ |
| JP2003243630A (ja) * | 2002-02-18 | 2003-08-29 | Sony Corp | 磁気メモリ装置およびその製造方法 |
| US6759263B2 (en) * | 2002-08-29 | 2004-07-06 | Chentsau Ying | Method of patterning a layer of magnetic material |
| US7199055B2 (en) * | 2003-03-03 | 2007-04-03 | Cypress Semiconductor Corp. | Magnetic memory cell junction and method for forming a magnetic memory cell junction |
| US7140374B2 (en) * | 2003-03-14 | 2006-11-28 | Lam Research Corporation | System, method and apparatus for self-cleaning dry etch |
| JP4792714B2 (ja) | 2003-11-28 | 2011-10-12 | ソニー株式会社 | 記憶素子及び記憶装置 |
| JP4608875B2 (ja) | 2003-12-03 | 2011-01-12 | ソニー株式会社 | 記憶装置 |
| US7211446B2 (en) * | 2004-06-11 | 2007-05-01 | International Business Machines Corporation | Method of patterning a magnetic tunnel junction stack for a magneto-resistive random access memory |
| KR100695164B1 (ko) | 2005-11-09 | 2007-03-14 | 삼성전자주식회사 | 스위칭 소자로서 트랜지스터 및 다이오드를 포함하는하이브리드 타입의 비휘발성 메모리 소자 |
| CN101449361A (zh) * | 2006-03-16 | 2009-06-03 | 泰格尔公司 | 消除磁性随机存取存储器器件结构中的电短路的干法蚀刻停止工艺 |
| RU2390883C1 (ru) * | 2006-09-13 | 2010-05-27 | Кэнон АНЕЛВА Корпорейшн | Способ изготовления элемента с магниторезистивным эффектом и многокамерное устройство для изготовления элемента с магниторезистивным эффектом |
-
2009
- 2009-09-04 JP JP2009204528A patent/JP2011054873A/ja not_active Abandoned
-
2010
- 2010-08-26 CN CN2010102635449A patent/CN102013454B/zh not_active Expired - Fee Related
- 2010-08-27 US US12/869,904 patent/US8268713B2/en active Active
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