JP2010239148A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2010239148A JP2010239148A JP2010140160A JP2010140160A JP2010239148A JP 2010239148 A JP2010239148 A JP 2010239148A JP 2010140160 A JP2010140160 A JP 2010140160A JP 2010140160 A JP2010140160 A JP 2010140160A JP 2010239148 A JP2010239148 A JP 2010239148A
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
- G09G3/3611—Control of matrices with row and column drivers
- G09G3/3648—Control of matrices with row and column drivers using an active matrix
- G09G3/3651—Control of matrices with row and column drivers using an active matrix using multistable liquid crystals, e.g. ferroelectric liquid crystals
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
- G09G3/3611—Control of matrices with row and column drivers
- G09G3/3648—Control of matrices with row and column drivers using an active matrix
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13454—Drivers integrated on the active matrix substrate
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2310/00—Command of the display device
- G09G2310/02—Addressing, scanning or driving the display screen or processing steps related thereto
- G09G2310/0264—Details of driving circuits
- G09G2310/027—Details of drivers for data electrodes, the drivers handling digital grey scale data, e.g. use of D/A converters
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2310/00—Command of the display device
- G09G2310/06—Details of flat display driving waveforms
- G09G2310/061—Details of flat display driving waveforms for resetting or blanking
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2320/00—Control of display operating conditions
- G09G2320/02—Improving the quality of display appearance
- G09G2320/0252—Improving the response speed
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/2007—Display of intermediate tones
- G09G3/2018—Display of intermediate tones by time modulation using two or more time intervals
- G09G3/2022—Display of intermediate tones by time modulation using two or more time intervals using sub-frames
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
- G09G3/3611—Control of matrices with row and column drivers
- G09G3/3614—Control of polarity reversal in general
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Liquid Crystal (AREA)
- Liquid Crystal Display Device Control (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
- Electrodes Of Semiconductors (AREA)
- Thin Film Transistor (AREA)
Abstract
【解決手段】半導体層と、ゲート配線と、前記半導体層と前記ゲート配線との間に挟まれたゲート絶縁層とを有し、前記ゲート配線はタングステン層を有し、前記タングステン層中の酸素濃度を30ppm以下とすることによって、配線抵抗を十分に低減することができる。
【選択図】図12
Description
ただし、本発明の液晶表示装置は、以下の実施例に限定されるわけではない。
ただし、本発明の液晶表示装置は、以下の実施例に限定されるわけではない。
この瞬間、ラッチ回路1(502)に書き込まれ保持されているデジタルビデオデータは、ラッチ回路2(503)に一斉に送出され、ラッチ回路2(503)
の全ステージのラッチ回路に書き込まれ、保持される。
が入力されるようになっている。このNOR回路(505−1)の他方の入力には、リセットパルスA(ResA)が入力される。このリセットパルスAは、D/A変換回路のリセット期間TRに入力される。本実施例の場合、デジタルビデオデータ(反転A0〜A7)はリセット期間TR中にもNOR回路(505−1)
へ入力されるが、NOR回路にリセットパルスResAが入力されている間は、NOR回路からはデジタルビデオデータが出力されないようになっている。
また、対向基板1001−2は対向電極1001−2−1(図示せず)を有している。1003−1および1003−2は、FPC端子であり、これらのFPC端子に外部から種々の信号が入力される。
の供給を制御している。各画素電極に画像信号(階調電圧)が供給され、各画素電極と対向電極との間に挟まれた液晶に電圧が印加され液晶が駆動される。
に基づきタイミング信号を順に発生させ、バッファ回路等(図示せず)を通して後段の回路へタイミング信号を順次供給する。
は第1のサブフレーム期間(1st Tsf)、第2のサブフレーム期間(2nd Tsf)および第3のサブフレーム期間(3rd Tsf)によって構成されている。
図26に示すように、例えば、画素P2,1には画像信号(D4)が書き込まれる。
が書き込まれる。
図26に示すように、例えば、画素P2,1には画像信号(反転D4)が書き込まれる。
図27に示すように、例えば、画素P2,1には画像信号(D3)が書き込まれる。
が書き込まれる。
図27に示すように、例えば、画素P2,1には画像信号(反転D3)が書き込まれる。
図27に示すように、例えば、画素P2,1には第1のサブフレームライン期間(1st Tsfl)に書き込まれた画像信号と同じ画像信号(D3)が書き込まれる。
図27に示すように、例えば、画素P2,1には第2のサブフレームライン期間(1st Tsfl)に書き込まれた画像信号と同じ画像信号(反転D3)が書き込まれる。
また、対向基板8001−2は対向電極8001−2−1(図示せず)を有している。8003−1および8003−2は、FPC端子であり、これらのFPC端子に外部から種々の信号が入力される。
)
膜を導電層(D)6045とし、チタン(Ti)膜を導電層(E)6046として形成した。導電層(D)6045は100〜400nm(好ましくは250〜350nm)とすれば良く、導電層(E)6046は50〜100nm(好ましくは100〜150nm)で形成すれば良い。(図14(A))
101−1 アクティブマトリクス基板
101−2 対向基板
101−1−1 ソースドライバ
101−1−2 ゲートドライバ
101−1−3 ゲートドライバ
101−1−4 画素部
101−1−3 デジタルビデオデータ分割回路
103−1 FPC
103−2 FPC
Claims (4)
- 半導体層と、ゲート配線と、前記半導体層と前記ゲート配線との間に挟まれたゲート絶縁層とを有し、
前記ゲート配線はタングステン層を有し、
前記タングステン層中の酸素濃度は30ppm以下であることを特徴とする半導体装置。 - 半導体層と、前記半導体層上のゲート絶縁層と、前記ゲート絶縁層上のゲート配線と、を有し、
前記ゲート配線は、前記ゲート絶縁層上の窒化タンタル層と、前記窒化タンタル層上のタングステン層と、を有し、
前記タングステン層中の酸素濃度は30ppm以下であり、
前記窒化タンタル層はアルゴン及びキセノンを含むことを特徴とする半導体装置。 - 半導体層と、前記半導体層上のゲート絶縁層と、前記ゲート絶縁層上のゲート配線と、を有し、
前記ゲート配線は、前記ゲート絶縁層上の窒化タンタル層と、前記窒化タンタル層上のタングステン層と、を有し、
前記タングステン層中の酸素濃度は30ppm以下であり、
前記窒化タンタル層はアルゴン及びクリプトンを含むことを特徴とする半導体装置。 - 請求項2又は請求項3のいずれか一項において、
前記ゲート配線は、前記ゲート絶縁層と前記窒化タンタル層との間に設けられたシリコン層を有し、
前記シリコン層にはリンが含まれることを特徴とする半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010140160A JP5235205B2 (ja) | 1999-05-14 | 2010-06-21 | 半導体装置 |
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13493499 | 1999-05-14 | ||
JP1999134934 | 1999-05-14 | ||
JP14649399 | 1999-05-26 | ||
JP1999146493 | 1999-05-26 | ||
JP2010140160A JP5235205B2 (ja) | 1999-05-14 | 2010-06-21 | 半導体装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000142512A Division JP4801239B2 (ja) | 1999-05-14 | 2000-05-15 | 液晶表示装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010239148A true JP2010239148A (ja) | 2010-10-21 |
JP5235205B2 JP5235205B2 (ja) | 2013-07-10 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2010140160A Expired - Lifetime JP5235205B2 (ja) | 1999-05-14 | 2010-06-21 | 半導体装置 |
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US (3) | US6545656B1 (ja) |
JP (1) | JP5235205B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2017068620A1 (ja) * | 2015-10-19 | 2017-04-27 | 株式会社ニコン | 構造化照明顕微鏡、観察方法、及び顕微鏡制御プログラム |
KR20170142972A (ko) * | 2015-06-15 | 2017-12-28 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 절연 구조물을 갖는 게이트 구조물 및 이의 제조 방법 |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6545656B1 (en) * | 1999-05-14 | 2003-04-08 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device in which a black display is performed by a reset signal during one sub-frame |
JP3556150B2 (ja) * | 1999-06-15 | 2004-08-18 | シャープ株式会社 | 液晶表示方法および液晶表示装置 |
US7348953B1 (en) | 1999-11-22 | 2008-03-25 | Semiconductor Energy Laboratory Co., Ltd. | Method of driving liquid crystal display device |
TW521256B (en) * | 2000-05-18 | 2003-02-21 | Semiconductor Energy Lab | Electronic device and method of driving the same |
US7315295B2 (en) * | 2000-09-29 | 2008-01-01 | Seiko Epson Corporation | Driving method for electro-optical device, electro-optical device, and electronic apparatus |
JP2002236472A (ja) * | 2001-02-08 | 2002-08-23 | Semiconductor Energy Lab Co Ltd | 液晶表示装置およびその駆動方法 |
US7061451B2 (en) | 2001-02-21 | 2006-06-13 | Semiconductor Energy Laboratory Co., Ltd, | Light emitting device and electronic device |
KR100437475B1 (ko) * | 2001-04-13 | 2004-06-23 | 삼성에스디아이 주식회사 | 평판 디스플레이 장치용 표시 소자 제조 방법 |
JP2003022058A (ja) * | 2001-07-09 | 2003-01-24 | Seiko Epson Corp | 電気光学装置、電気光学装置の駆動回路、電気光学装置の駆動方法および電子機器 |
WO2003036605A1 (fr) * | 2001-10-23 | 2003-05-01 | Matsushita Electric Industrial Co., Ltd. | Ecran a cristaux liquides et procede de commande |
US6958651B2 (en) | 2002-12-03 | 2005-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Analog circuit and display device using the same |
JP4079793B2 (ja) * | 2003-02-07 | 2008-04-23 | 三洋電機株式会社 | 表示方法、表示装置およびそれに利用可能なデータ書込回路 |
JP4235900B2 (ja) * | 2003-07-09 | 2009-03-11 | ソニー株式会社 | フラットディスプレイ装置 |
KR20050082643A (ko) * | 2004-02-19 | 2005-08-24 | 삼성에스디아이 주식회사 | 액정표시장치의 구동방법 |
TWI295051B (en) * | 2005-07-22 | 2008-03-21 | Sunplus Technology Co Ltd | Source driver circuit and driving method for liquid crystal display device |
US20070090385A1 (en) * | 2005-10-21 | 2007-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
GB0623769D0 (en) * | 2006-11-28 | 2007-01-10 | Seos Ltd | Method and apparatus for reducing motion blur in a displayed image |
JP6200149B2 (ja) * | 2012-12-07 | 2017-09-20 | 株式会社Jvcケンウッド | 液晶表示装置、及びその駆動方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01175244A (ja) * | 1987-12-29 | 1989-07-11 | Fujitsu Ltd | 半導体装置の製造方法 |
JPH0776771A (ja) * | 1993-09-08 | 1995-03-20 | Japan Energy Corp | タングステンスパッタリングターゲット |
JP2000332259A (ja) * | 1999-03-17 | 2000-11-30 | Semiconductor Energy Lab Co Ltd | 配線材料およびこれを用いた配線を備えた半導体装置およびその作製方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5233447A (en) * | 1988-10-26 | 1993-08-03 | Canon Kabushiki Kaisha | Liquid crystal apparatus and display system |
JP2745435B2 (ja) * | 1990-11-21 | 1998-04-28 | キヤノン株式会社 | 液晶装置 |
JP2502871B2 (ja) * | 1992-01-27 | 1996-05-29 | 松下電器産業株式会社 | 液晶駆動回路と表示装置 |
JPH06194623A (ja) * | 1992-12-24 | 1994-07-15 | Casio Comput Co Ltd | 反強誘電性液晶表示素子の駆動方法 |
US5594569A (en) | 1993-07-22 | 1997-01-14 | Semiconductor Energy Laboratory Co., Ltd. | Liquid-crystal electro-optical apparatus and method of manufacturing the same |
JP3431033B2 (ja) | 1993-10-29 | 2003-07-28 | 株式会社半導体エネルギー研究所 | 半導体作製方法 |
TW264575B (ja) | 1993-10-29 | 1995-12-01 | Handotai Energy Kenkyusho Kk | |
US5923962A (en) | 1993-10-29 | 1999-07-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
JPH07333580A (ja) | 1994-06-10 | 1995-12-22 | Casio Comput Co Ltd | 強誘電性液晶表示装置及び強誘電性液晶表示素子の駆動方法 |
US5920301A (en) * | 1994-06-10 | 1999-07-06 | Casio Computer Co., Ltd. | Liquid crystal display apparatus using liquid crystal having ferroelectric phase and method of driving liquid crystal display device using liquid crystal having ferroelectric phase |
JPH10254390A (ja) | 1997-03-10 | 1998-09-25 | Canon Inc | 液晶装置 |
GB2324899A (en) | 1997-04-30 | 1998-11-04 | Sharp Kk | Active matrix display |
JP4036923B2 (ja) * | 1997-07-17 | 2008-01-23 | 株式会社半導体エネルギー研究所 | 表示装置およびその駆動回路 |
JP3371200B2 (ja) | 1997-10-14 | 2003-01-27 | 富士通株式会社 | 液晶表示装置の表示制御方法及び液晶表示装置 |
JPH11326957A (ja) * | 1998-03-20 | 1999-11-26 | Toshiba Corp | 液晶表示装置 |
US6323850B1 (en) * | 1998-04-30 | 2001-11-27 | Canon Kabushiki Kaisha | Driving method for liquid crystal device |
JP4446410B2 (ja) | 1998-12-02 | 2010-04-07 | 駿介 小林 | 液晶表示素子及びこれを用いた液晶表示装置 |
US6545656B1 (en) * | 1999-05-14 | 2003-04-08 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device in which a black display is performed by a reset signal during one sub-frame |
-
2000
- 2000-05-12 US US09/570,698 patent/US6545656B1/en not_active Expired - Fee Related
-
2003
- 2003-03-10 US US10/385,151 patent/US7088327B2/en not_active Expired - Fee Related
-
2006
- 2006-07-07 US US11/482,609 patent/US7768488B2/en not_active Expired - Fee Related
-
2010
- 2010-06-21 JP JP2010140160A patent/JP5235205B2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01175244A (ja) * | 1987-12-29 | 1989-07-11 | Fujitsu Ltd | 半導体装置の製造方法 |
JPH0776771A (ja) * | 1993-09-08 | 1995-03-20 | Japan Energy Corp | タングステンスパッタリングターゲット |
JP2000332259A (ja) * | 1999-03-17 | 2000-11-30 | Semiconductor Energy Lab Co Ltd | 配線材料およびこれを用いた配線を備えた半導体装置およびその作製方法 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170142972A (ko) * | 2015-06-15 | 2017-12-28 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 절연 구조물을 갖는 게이트 구조물 및 이의 제조 방법 |
KR102069252B1 (ko) * | 2015-06-15 | 2020-01-22 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 절연 구조물을 갖는 게이트 구조물 및 이의 제조 방법 |
US10840105B2 (en) | 2015-06-15 | 2020-11-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Gate structure with insulating structure and method for manufacturing the same |
WO2017068620A1 (ja) * | 2015-10-19 | 2017-04-27 | 株式会社ニコン | 構造化照明顕微鏡、観察方法、及び顕微鏡制御プログラム |
JPWO2017068620A1 (ja) * | 2015-10-19 | 2018-08-02 | 株式会社ニコン | 構造化照明顕微鏡、観察方法、及び顕微鏡制御プログラム |
US10900900B2 (en) | 2015-10-19 | 2021-01-26 | Nikon Corporation | Structured illumination microscope, observation method, and storage medium |
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US20060267899A1 (en) | 2006-11-30 |
US6545656B1 (en) | 2003-04-08 |
US7768488B2 (en) | 2010-08-03 |
US20030174114A1 (en) | 2003-09-18 |
US7088327B2 (en) | 2006-08-08 |
JP5235205B2 (ja) | 2013-07-10 |
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