JP2010232333A - 半導体装置及びその製造方法、並びに電子装置 - Google Patents
半導体装置及びその製造方法、並びに電子装置 Download PDFInfo
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- JP2010232333A JP2010232333A JP2009077033A JP2009077033A JP2010232333A JP 2010232333 A JP2010232333 A JP 2010232333A JP 2009077033 A JP2009077033 A JP 2009077033A JP 2009077033 A JP2009077033 A JP 2009077033A JP 2010232333 A JP2010232333 A JP 2010232333A
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Abstract
【解決手段】貫通部35を有した多層配線構造体31と、多層配線構造体31に内設されると共に、多層配線構造体31の面31A,31Bから露出された第1及び第2の接続面41A,42Aを有する貫通電極33と、を備え、第1及び第2の接続面41A,42Aから突出しないように、貫通部35に電子部品22を収容すると共に、電子部品22の電極パッド45及び貫通電極の第1の接続面41Aと直接接続された配線パターン25により、電子部品22と貫通電極33とを電気的に接続する。
【選択図】図2
Description
図2は、本発明の第1の実施の形態に係る電子装置の断面図である。
また、電子部品22としては、例えば、CPU用の半導体チップを用いることができる。
図18は、本発明の第2の実施の形態に係る電子装置の断面図である。図18において、第1の実施の形態の電子装置10と同一構成部分には、同一符号を付す。
図21は、本発明の第3の実施の形態に係る電子装置の断面図である。図21において、第2の実施の形態の電子装置90と同一構成部分には、同一符号を付す。
図22は、本発明の第4の実施の形態に係る電子装置の断面図である。図22において、第1及び第3の実施の形態の電子装置10,120と同一構成部分には、同一符号を付す。
11−1,11−2,61,91−1,91−2,121−1,121−2,141−1,141−2 半導体装置
13 内部接続端子
15 実装基板
16 外部接続端子
21,63,93,123 配線基板
22,65 電子部品
22A 電極パッド形成面
22B 背面
23 封止樹脂
25 配線パターン
26,76,77 ソルダーレジスト層
31 多層配線構造体
23A,23B,31A,31B,65A,81A,82A,85A,86A,88A,125A,125B 面
33,128,151 貫通電極
35,131 貫通部
36,40,132,154 貫通孔
38 ビア部
38A,41A,101A 第1の接続面
38B,42A,102A 第2の接続面
41,42,47,48 パッド部
45,79 電極パッド
45A 接続面
49 配線部
51,76A,77A 開口部
67 モールド樹脂
68 金属ワイヤ
71 基板本体
71A 上面
71B 下面
73,74,101,102 パッド
81 支持体
82,143 接着剤
85 樹脂シート
86 第1の封止樹脂
88 第2の封止樹脂
95 導体パターン
103,104 ビア
105 配線
125 シリコン基板
126 絶縁膜
126A 上面
126B 下面
128A 上端面
128B 下端面
145 ピン端子
155 はんだ
157 頭部
158 ピン部
Claims (18)
- 貫通部を有した多層配線構造体と、
前記貫通部の周囲に位置する部分の前記多層配線構造体に内設され、前記多層配線構造体の第1の面から露出された第1の接続面、及び前記第1の面の反対側に位置する前記多層配線構造体の第2の面から露出された第2の接続面を有した導体パターンと、
接続面を有した電極パッド、該電極パッドが形成された電極パッド形成面、及び該電極パッド形成面の反対側に配置された背面を有し、前記第1の接続面と前記接続面とが略面一となるように、前記貫通部に収容された電子部品と、
前記貫通部、前記電極パッド形成面、及び前記多層配線構造体の第1の面に設けられ、前記電子部品を封止すると共に、前記第1の接続面及び前記接続面を露出する第1の平面を有する封止樹脂と、
前記第1の接続面、前記接続面、及び前記封止樹脂の第1の平面に設けられ、前記電極パッドと前記導体パターンとを電気的に接続すると共に、パッド部を有する配線パターンと、を備えたことを特徴とする半導体装置。 - 前記封止樹脂の第1の平面と前記第1の接続面及び前記接続面とが略面一となるように構成したことを特徴とする請求項1記載の半導体装置。
- 前記封止樹脂は、前記多層配線構造体の第2の面にも設けられており、
前記電子部品の背面は、前記封止樹脂から露出されており、
前記第1の平面の反対側に位置する前記封止樹脂の第2の平面、前記電子部品の背面、及び前記第2の接続面を同一平面上に配置したことを特徴とする請求項1または2記載の半導体装置。 - 前記封止樹脂の第1の平面及び前記配線パターンに、前記パッド部を露出する開口部を有したソルダーレジスト層を設けたことを特徴とする請求項1ないし3のうち、いずれか1項記載の半導体装置。
- 前記導体パターンは、貫通電極であることを特徴とする請求項1ないし4のうち、いずれか1項記載の半導体装置。
- 前記導体パターンは、前記多層配線構造体の厚さ方向に配置され、電気的に接続されたパッド、ビア、及び配線により構成されることを特徴とする請求項1ないし4のうち、いずれか1項記載の半導体装置。
- 貫通部及び該貫通部の周囲に形成された貫通孔を有するシリコン基板と、
前記貫通孔の側面、前記シリコン基板の第1の面、及び該第1の面とは反対側に位置する前記シリコン基板の第2の面に設けられた絶縁膜と、
前記絶縁膜を介して、前記貫通孔に設けられ、前記シリコン基板の第1の面に設けられた部分の前記絶縁膜の第1の面と略面一となるように構成された第1の接続面と、前記シリコン基板の第2の面に設けられた部分の前記絶縁膜の第2の面と略面一となるように構成された第2の接続面とを有する貫通電極と、
接続面を有した電極パッド、該電極パッドが形成された電極パッド形成面、及び該電極パッド形成面の反対側に配置された背面を有し、前記第1の接続面と前記接続面とが略面一となるように、前記貫通部に収容された電子部品と、
前記貫通部及び前記電極パッド形成面に設けられ、前記接続面を露出する第1の平面を有する封止樹脂と、
前記絶縁膜の第1の面、前記第1の接続面、前記接続面、及び前記封止樹脂の第1の平面に設けられ、前記電極パッドと前記貫通電極とを電気的に接続すると共に、パッド部を有する配線パターンと、を備えたことを特徴とする半導体装置。 - 前記封止樹脂の第1の平面と前記第1の接続面及び前記接続面とが略面一となるように構成したことを特徴とする請求項7記載の半導体装置。
- 前記封止樹脂は、前記第1の平面の反対側に位置する第2の平面を有し、
前記封止樹脂の第2の平面と前記第2の接続面及び前記電子部品の背面とを略面一にしたことを特徴とする請求項7または8記載の半導体装置。 - 貫通部及び該貫通部の周囲に形成された貫通孔を有するシリコン基板と、
前記貫通孔の側面、前記シリコン基板の第1の面、及び該第1の面とは反対側に位置する前記シリコン基板の第2の面に設けられた絶縁膜と、
前記絶縁膜を介して、前記貫通孔に設けられ、前記シリコン基板の第1の面側に配置された第1の接続面と、前記シリコン基板の第2の面側に配置された第2の接続面とを有する貫通電極と、
接続面を有した電極パッド、該電極パッドが形成された電極パッド形成面、及び該電極パッド形成面の反対側に配置された背面を有し、前記第1の接続面と前記接続面とが略面一となるように、前記貫通部に収容された電子部品と、
前記貫通部、前記電極パッド形成面、及び前記シリコン基板の第1の面に形成された前記絶縁膜に設けられ、前記電子部品を封止すると共に、前記第1の接続面及び前記接続面を露出する第1の平面を有する封止樹脂と、
前記第1の接続面、前記接続面、及び前記封止樹脂の第1の平面に設けられ、前記電極パッドと前記貫通電極とを電気的に接続すると共に、パッド部を有する配線パターンと、を備え、
前記貫通電極の中央部、及び該貫通電極の中央部と対向する部分の前記配線パターンを貫通すると共に、ピン端子を挿入可能なピン端子挿入用孔を設けたことを特徴とする半導体装置。 - 前記封止樹脂の第1の平面と前記第1の接続面及び前記接続面とが略面一となるように構成したことを特徴とする請求項10記載の半導体装置。
- 前記封止樹脂は、前記シリコン基板の第2の面に形成された前記絶縁膜に設けられており、
前記封止樹脂は、前記第1の平面の反対側に位置する第2の平面を有し、
前記電子部品の背面は、前記封止樹脂から露出されており、
前記封止樹脂の第2の平面と前記第2の接続面及び前記電子部品の背面とを略面一にしたことを特徴とする請求項10または11記載の半導体装置。 - 請求項1ないし6のうち、いずれか1項記載の半導体装置と、
前記半導体装置上に配置された他の半導体装置と、
前記半導体装置と前記他の半導体装置との間に配置され、前記半導体装置と前記他の半導体装置とを電気的に接続する内部接続端子と、を備えたことを特徴とする電子装置。 - 請求項1ないし6のうち、いずれか1項記載の半導体装置を複数有し、
複数の前記半導体装置を積み重ねて配置し、内部接続端子を介して、前記半導体装置間を電気的に接続したことを特徴とする電子装置。 - 請求項7ないし9のうち、いずれか1項記載の半導体装置を複数有し、
複数の前記半導体装置を積み重ねて配置し、内部接続端子を介して、前記半導体装置間を電気的に接続したことを特徴とする電子装置。 - 請求項10ないし12のうち、いずれか1項記載の半導体装置を2つ有し、
2つの前記半導体装置を積み重ねて配置し、2つの前記半導体装置に設けられた前記ピン端子挿入用孔に前記ピン端子を挿入することで、2つの前記半導体装置を電気的に接続したことを特徴とする電子装置。 - 貫通部を有した多層配線構造体と、前記多層配線構造体を貫通するように設けられ、前記多層配線構造体の第1の面から露出された第1の接続面、及び前記第1の面の反対側に位置する前記多層配線構造体の第2の面から露出された第2の接続面を有した貫通電極と、を備えた配線基板を形成する配線基板形成工程と、
支持体の面に接着剤を形成する接着剤形成工程と、
前記第2の接続面と前記接着剤とが接触するように、前記接着剤により、前記配線基板を前記支持体に接着する配線基板接着工程と、
接続面を有した電極パッド、該電極パッドが形成された電極パッド形成面、及び該電極パッド形成面の反対側に配置された背面を有する電子部品を準備した後、前記接続面と前記第1の接続面とが略面一となるように、前記貫通部から露出された部分の前記接着剤と前記電子部品の背面とを接着させる電子部品接着工程と、
前記貫通部、前記電極パッド形成面、及び前記多層配線構造体の第1の面に、前記電子部品を封止すると共に、前記第1の接続面及び前記接続面を露出する第1の平面を有した封止樹脂を形成する封止樹脂形成工程と、
前記第1の接続面、前記接続面、及び前記封止樹脂の第1の平面に、前記電極パッドと前記貫通電極とを電気的に接続すると共に、パッド部を有する配線パターンを形成する配線パターン形成工程と、
前記封止樹脂の第1の平面及び前記配線パターンに、前記パッド部を露出する開口部を有したソルダーレジスト層を形成するソルダーレジスト層形成工程と、
前記ソルダーレジスト層形成工程後に、前記接着剤及び前記支持体を除去する接着剤及び支持体除去工程と、を含むことを特徴とする半導体装置の製造方法。 - 貫通部を有した多層配線構造体と、前記多層配線構造体を貫通するように設けられ、前記多層配線構造体の第1の面から露出された第1の接続面、及び前記第1の面の反対側に位置する前記多層配線構造体の第2の面から露出された第2の接続面を有し、前記多層配線構造体の前記第1及び第2の面から突出する貫通電極と、を備えた配線基板を形成する配線基板形成工程と、
支持体の面に、接着剤と、半硬化状態とされた樹脂シートとを順次形成する接着剤及び樹脂シート形成工程と、
前記配線基板を押圧して、前記接着剤と前記第2の接続面とを接触させ、前記半硬化状態とされた樹脂シートを完全に硬化させることで、前記多層配線構造体の第2の面から突出した部分の前記貫通電極の側面及び前記多層配線構造体の第2の面を封止すると共に、前記貫通部の底面を塞ぐ第1の封止樹脂を形成する第1の封止樹脂形成工程と、
接続面を有した電極パッド、該電極パッドが形成された電極パッド形成面、及び該電極パッド形成面の反対側に配置された背面を有する電子部品を準備した後、前記接続面と前記第1の接続面とが略面一となるように、前記貫通部から露出された部分の前記第1の封止樹脂と前記電子部品の背面とを接触させることで、前記貫通部に前記電子部品を配置する電子部品配置工程と、
前記貫通部、前記電極パッド形成面、及び前記多層配線構造体の第1の面に、前記電子部品を封止すると共に、前記第1の接続面及び前記接続面を露出する第1の平面を有した第2の封止樹脂を形成する第2の封止樹脂形成工程と、
前記第1の接続面、前記接続面、及び前記第2の封止樹脂の第1の平面に、前記電極パッドと前記貫通電極とを電気的に接続すると共に、パッド部を有する配線パターンを形成する配線パターン形成工程と、
前記第2の封止樹脂の第1の平面及び前記配線パターンに、前記パッド部を露出する開口部を有したソルダーレジスト層を形成するソルダーレジスト層形成工程と、
前記ソルダーレジスト層形成工程後に、前記接着剤及び前記支持体を除去する接着剤及び支持体除去工程と、を含むことを特徴とする半導体装置の製造方法。
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