JP2010153615A - マイクロバブル生成装置及びシリコンウェハ洗浄装置 - Google Patents
マイクロバブル生成装置及びシリコンウェハ洗浄装置 Download PDFInfo
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- 238000004140 cleaning Methods 0.000 title claims abstract description 130
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 58
- 239000010703 silicon Substances 0.000 title claims abstract description 58
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 57
- 230000007246 mechanism Effects 0.000 claims abstract description 55
- 239000007788 liquid Substances 0.000 claims description 49
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 230000000694 effects Effects 0.000 abstract description 10
- 238000011086 high cleaning Methods 0.000 abstract description 6
- 239000004020 conductor Substances 0.000 abstract 3
- 235000012431 wafers Nutrition 0.000 description 53
- 238000000034 method Methods 0.000 description 22
- 230000000052 comparative effect Effects 0.000 description 13
- 238000005530 etching Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 238000009434 installation Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 5
- 239000004809 Teflon Substances 0.000 description 4
- 229920006362 Teflon® Polymers 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 241000234314 Zingiber Species 0.000 description 1
- 235000006886 Zingiber officinale Nutrition 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 235000008397 ginger Nutrition 0.000 description 1
- 229910017053 inorganic salt Inorganic materials 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Percussion Or Vibration Massage (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Accessories For Mixers (AREA)
Abstract
【解決手段】マイクロバブル生成装置1は、マイクロバブル生成機構10とマイクロバブルを外部に導出する導出導管20とを備える。導出導管20は拡幅部21と管部22とを備え、導出導管20において、拡幅部21と管部22とは互いに接続されており、互いに連通している。拡幅部21は、軸zを中心軸とする中空円柱形であり、底面23,24と、円筒形の周面25とを有し、拡幅部21の一方の底面23を介してマイクロバブル生成機構10の噴出口11が、他方の底面24を介して管部22が連通している。拡幅部21のマイクロバブルの流路軸zに直交する断面の面積は、管部22の流路軸zに直交する断面の面積より大きい。
【選択図】図1
Description
服部毅編著「新版シリコンウェハ表面のクリーン化技術」リアライズ社(2000)
また、マイクロバブル生成装置1は上述のように小型であるので、シリコンウェハ洗浄装置100において、配置位置の自由度が高く、シリコンウェハ洗浄装置100の設計の自由度を向上させることができる。また、シリコンウェハ洗浄装置100を小型化することができ、使用や移動を容易にすることができ、取り扱いを容易にすることができる。
10 マイクロバブル生成機構
11 噴出口
20,210,310,410,510,610 導出導管
21,411,611 拡幅部
22 管部
23,24,412 底面
25,612 周面
100 シリコンウェハ洗浄装置
101 洗浄槽
102 洗浄液
103 ポンプ
104,105 管路
711 供給管路
z,z1 軸
M マイクロバブル
W シリコンウェハ
Claims (9)
- マイクロバブルを生成するマイクロバブル生成機構と、
前記マイクロバブル生成機構によって生成されたマイクロバブルを導出するために前記マイクロバブル生成機構に接続された導出導管とを備え、
前記マイクロバブル生成機構はマイクロバブルを外部に噴出する噴出口を備え、前記導出導管は互いに連通する拡幅部と管部とを備え、前記拡幅部はマイクロバブルの流路断面積が前記管部より大きく、前記マイクロバブル生成機構は前記拡幅部に接続されていることを特徴とするマイクロバブル生成装置。 - 前記拡幅部におけるマイクロバブルの流路軸と前記管部におけるマイクロバブルの流路軸とが互いに同一方向に延びるように、前記マイクロバブル生成機構及び前記管部が前記拡幅部に接続されていることを特徴とする請求項1記載のマイクロバブル生成装置。
- 前記拡幅部におけるマイクロバブルの流れ方向と、前記管部におけるマイクロバブルの流れ方向は、互いに逆方向であることを特徴とする請求項1記載のマイクロバブル生成装置。
- 前記拡幅部におけるマイクロバブルの流路軸と前記管部におけるマイクロバブルの流路軸とが互いに交差するように、前記マイクロバブル生成機構及び前記管部が前記拡幅部に接続されていることを特徴とする請求項1記載のマイクロバブル生成装置。
- 前記拡幅部における流路軸と前記管部における流路軸とが互いに直交するように、前記マイクロバブル生成機構及び前記管部が前記拡幅部に接続されていることを特徴とする請求項4記載のマイクロバブル生成装置。
- 前記マイクロバブル生成機構は、前記噴出口が前記管部におけるマイクロバブルの流路軸線上から外れるように前記拡幅部に接続されていることを特徴とする請求項1乃至5のいずれか1項記載のマイクロバブル生成装置。
- 前記拡幅部は流路断面が円形であることを特徴とする請求項1乃至6のいずれか1項記載のマイクロバブル生成装置。
- 前記管部は前記拡幅部において前記噴出口の近傍に設けられていることを特徴とする請求項1乃至7のいずれか1項記載のマイクロバブル生成装置。
- 請求項1乃至8のいずれか1項記載のマイクロバブル生成装置を備えるシリコンウェハを洗浄するシリコンウェハ洗浄装置であって、
被洗浄体としてのシリコンウェハを収容する、洗浄液を貯留する洗浄槽と、
前記洗浄槽内の洗浄液を循環する、ポンプ及び管路を有するポンプ装置とを備え、
前記マイクロバブル生成装置は、前記ポンプ装置の管路に設けられていることを特徴とするシリコンウェハ洗浄装置。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008330560A JP5666086B2 (ja) | 2008-12-25 | 2008-12-25 | シリコンウェハ洗浄装置 |
CN200910224515.9A CN101764048B (zh) | 2008-12-25 | 2009-11-17 | 微气泡产生装置以及硅晶片清洁设备 |
KR1020090115163A KR101136278B1 (ko) | 2008-12-25 | 2009-11-26 | 마이크로 버블 생성 장치 및 실리콘 웨이퍼 세정 장치 |
US12/633,914 US8408221B2 (en) | 2008-12-25 | 2009-12-09 | Micro bubble generating device and silicon wafer cleaning apparatus |
SG200908343-7A SG162689A1 (en) | 2008-12-25 | 2009-12-15 | Micro-bubble generating device and silicon wafer cleaning apparatus |
EP09015555A EP2202782B1 (en) | 2008-12-25 | 2009-12-16 | Micro-Bubble generating device |
AT09015555T ATE546831T1 (de) | 2008-12-25 | 2009-12-16 | Vorrichtung zur erzeugung von mikroblasen |
TW098144421A TWI411476B (zh) | 2008-12-25 | 2009-12-23 | 微氣泡產生裝置及矽晶圓清潔設備 |
Applications Claiming Priority (1)
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JP2008330560A JP5666086B2 (ja) | 2008-12-25 | 2008-12-25 | シリコンウェハ洗浄装置 |
Related Child Applications (1)
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JP2014210748A Division JP6005118B2 (ja) | 2014-10-15 | 2014-10-15 | マイクロバブル生成装置及びシリコンウェハ洗浄装置 |
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JP2010153615A true JP2010153615A (ja) | 2010-07-08 |
JP5666086B2 JP5666086B2 (ja) | 2015-02-12 |
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JP2008330560A Active JP5666086B2 (ja) | 2008-12-25 | 2008-12-25 | シリコンウェハ洗浄装置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US8408221B2 (ja) |
EP (1) | EP2202782B1 (ja) |
JP (1) | JP5666086B2 (ja) |
KR (1) | KR101136278B1 (ja) |
CN (1) | CN101764048B (ja) |
AT (1) | ATE546831T1 (ja) |
SG (1) | SG162689A1 (ja) |
TW (1) | TWI411476B (ja) |
Cited By (1)
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JP7018610B2 (ja) * | 2018-01-15 | 2022-02-14 | 株式会社三進製作所 | マイクロバブル発生具及びマイクロバブル発生装置 |
JP7077188B2 (ja) * | 2018-09-06 | 2022-05-30 | キオクシア株式会社 | 基板処理方法、基板処理装置および複合処理装置 |
KR102089380B1 (ko) * | 2018-09-10 | 2020-03-16 | (주)신우에이엔티 | 웨이퍼 세정용 나노 버블 분사 구조 |
KR102074221B1 (ko) * | 2018-09-10 | 2020-02-06 | (주)신우에이엔티 | 나노 버블을 이용한 기판 세정 시스템 |
CN110473773B (zh) * | 2019-08-22 | 2022-03-22 | 北京北方华创微电子装备有限公司 | 晶圆清洗方法及晶圆清洗设备 |
CN113118951A (zh) * | 2019-12-31 | 2021-07-16 | 清华大学 | 一种空化射流喷嘴及具有该喷嘴的晶圆处理装置 |
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Also Published As
Publication number | Publication date |
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TW201023987A (en) | 2010-07-01 |
TWI411476B (zh) | 2013-10-11 |
KR101136278B1 (ko) | 2012-04-20 |
US20100163084A1 (en) | 2010-07-01 |
CN101764048A (zh) | 2010-06-30 |
US8408221B2 (en) | 2013-04-02 |
ATE546831T1 (de) | 2012-03-15 |
SG162689A1 (en) | 2010-07-29 |
EP2202782A2 (en) | 2010-06-30 |
EP2202782B1 (en) | 2012-02-22 |
EP2202782A3 (en) | 2010-10-06 |
JP5666086B2 (ja) | 2015-02-12 |
KR20100075728A (ko) | 2010-07-05 |
CN101764048B (zh) | 2015-11-25 |
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