JP2010045369A5 - - Google Patents
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- Publication number
- JP2010045369A5 JP2010045369A5 JP2009187638A JP2009187638A JP2010045369A5 JP 2010045369 A5 JP2010045369 A5 JP 2010045369A5 JP 2009187638 A JP2009187638 A JP 2009187638A JP 2009187638 A JP2009187638 A JP 2009187638A JP 2010045369 A5 JP2010045369 A5 JP 2010045369A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- conductive region
- dielectric
- lower conductive
- upper conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims 4
- 239000000463 material Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/193,249 US7821068B2 (en) | 2008-08-18 | 2008-08-18 | Device and process involving pinhole undercut area |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010045369A JP2010045369A (ja) | 2010-02-25 |
| JP2010045369A5 true JP2010045369A5 (enExample) | 2012-09-27 |
Family
ID=41262208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009187638A Pending JP2010045369A (ja) | 2008-08-18 | 2009-08-13 | ピンホールアンダーカット部を含む装置と工程 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7821068B2 (enExample) |
| EP (1) | EP2157629A3 (enExample) |
| JP (1) | JP2010045369A (enExample) |
| KR (1) | KR20100021975A (enExample) |
| CN (1) | CN101656294A (enExample) |
| CA (1) | CA2675083C (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101070289B1 (ko) * | 2009-12-30 | 2011-10-06 | 주식회사 하이닉스반도체 | 반도체 장치 제조방법 |
| US9076975B2 (en) | 2010-04-27 | 2015-07-07 | Xerox Corporation | Dielectric composition for thin-film transistors |
| TWI445180B (zh) * | 2011-09-28 | 2014-07-11 | E Ink Holdings Inc | 陣列基板及使用其之顯示裝置 |
| CN108039338A (zh) * | 2017-11-24 | 2018-05-15 | 华中科技大学 | 一种消除介质层针孔缺陷影响的方法 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2707959A1 (de) | 1977-02-24 | 1978-08-31 | Eberhard Loeffelholz | Skistock und skihandschuh halte- und fangvorrichtung |
| JPS61183972A (ja) * | 1985-02-08 | 1986-08-16 | Matsushita Electric Ind Co Ltd | 薄膜半導体装置の製造方法 |
| US5354695A (en) * | 1992-04-08 | 1994-10-11 | Leedy Glenn J | Membrane dielectric isolation IC fabrication |
| JP3200639B2 (ja) * | 1992-05-19 | 2001-08-20 | カシオ計算機株式会社 | 薄膜トランジスタパネルの製造方法 |
| TW232751B (en) * | 1992-10-09 | 1994-10-21 | Semiconductor Energy Res Co Ltd | Semiconductor device and method for forming the same |
| US5424233A (en) * | 1994-05-06 | 1995-06-13 | United Microflectronics Corporation | Method of making electrically programmable and erasable memory device with a depression |
| US6107117A (en) | 1996-12-20 | 2000-08-22 | Lucent Technologies Inc. | Method of making an organic thin film transistor |
| US6331722B1 (en) * | 1997-01-18 | 2001-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Hybrid circuit and electronic device using same |
| JP4434411B2 (ja) * | 2000-02-16 | 2010-03-17 | 出光興産株式会社 | アクティブ駆動型有機el発光装置およびその製造方法 |
| JP2001281695A (ja) * | 2000-03-30 | 2001-10-10 | Sharp Corp | 薄膜静電容量の製造方法および液晶表示装置 |
| JP4854866B2 (ja) * | 2001-04-27 | 2012-01-18 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| US6949762B2 (en) | 2002-01-11 | 2005-09-27 | Xerox Corporation | Polythiophenes and devices thereof |
| US6621099B2 (en) | 2002-01-11 | 2003-09-16 | Xerox Corporation | Polythiophenes and devices thereof |
| US6770904B2 (en) | 2002-01-11 | 2004-08-03 | Xerox Corporation | Polythiophenes and electronic devices generated therefrom |
| US20030227014A1 (en) | 2002-06-11 | 2003-12-11 | Xerox Corporation. | Process for forming semiconductor layer of micro-and nano-electronic devices |
| JP3532188B1 (ja) | 2002-10-21 | 2004-05-31 | 沖電気工業株式会社 | 半導体装置及びその製造方法 |
| US20060073613A1 (en) * | 2004-09-29 | 2006-04-06 | Sanjeev Aggarwal | Ferroelectric memory cells and methods for fabricating ferroelectric memory cells and ferroelectric capacitors thereof |
| JP2007005782A (ja) * | 2005-05-27 | 2007-01-11 | Semiconductor Energy Lab Co Ltd | 半導体装置及び半導体装置の作製方法 |
| US7205608B2 (en) * | 2005-07-25 | 2007-04-17 | Freescale Semiconductor, Inc. | Electronic device including discontinuous storage elements |
| JP2007073779A (ja) * | 2005-09-07 | 2007-03-22 | Elpida Memory Inc | 不揮発性メモリ素子及びその製造方法 |
| US20070128758A1 (en) * | 2005-12-01 | 2007-06-07 | Keisuke Tanaka | Semiconductor device and method for fabricating the same |
| US20070145453A1 (en) * | 2005-12-23 | 2007-06-28 | Xerox Corporation | Dielectric layer for electronic devices |
| US7488643B2 (en) * | 2006-06-21 | 2009-02-10 | International Business Machines Corporation | MIM capacitor and method of making same |
| WO2008059633A1 (en) * | 2006-11-15 | 2008-05-22 | Sharp Kabushiki Kaisha | Semiconductor element, method for fabricating the same and display |
| US7855097B2 (en) * | 2008-07-11 | 2010-12-21 | Organicid, Inc. | Method of increasing yield in OFETs by using a high-K dielectric layer in a dual dielectric layer |
-
2008
- 2008-08-18 US US12/193,249 patent/US7821068B2/en active Active
-
2009
- 2009-08-11 CA CA2675083A patent/CA2675083C/en not_active Expired - Fee Related
- 2009-08-13 JP JP2009187638A patent/JP2010045369A/ja active Pending
- 2009-08-14 EP EP20090167865 patent/EP2157629A3/en not_active Withdrawn
- 2009-08-14 KR KR1020090075355A patent/KR20100021975A/ko not_active Ceased
- 2009-08-17 CN CN200910166517A patent/CN101656294A/zh active Pending
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