JP2009503826A5 - - Google Patents

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Publication number
JP2009503826A5
JP2009503826A5 JP2008523209A JP2008523209A JP2009503826A5 JP 2009503826 A5 JP2009503826 A5 JP 2009503826A5 JP 2008523209 A JP2008523209 A JP 2008523209A JP 2008523209 A JP2008523209 A JP 2008523209A JP 2009503826 A5 JP2009503826 A5 JP 2009503826A5
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optical element
projection objective
projection
objective according
actuators
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JP5069232B2 (ja
JP2009503826A (ja
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Priority claimed from PCT/EP2006/007273 external-priority patent/WO2007017089A1/en
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JP2008523209A 2005-07-25 2006-07-24 マイクロリソグラフィ投影露光装置の投影対物レンズ Expired - Fee Related JP5069232B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US70213705P 2005-07-25 2005-07-25
US60/702,137 2005-07-25
PCT/EP2006/007273 WO2007017089A1 (en) 2005-07-25 2006-07-24 Projection objective of a microlithographic projection exposure apparatus

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Publication Number Publication Date
JP2009503826A JP2009503826A (ja) 2009-01-29
JP2009503826A5 true JP2009503826A5 (enExample) 2009-07-02
JP5069232B2 JP5069232B2 (ja) 2012-11-07

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JP2008523209A Expired - Fee Related JP5069232B2 (ja) 2005-07-25 2006-07-24 マイクロリソグラフィ投影露光装置の投影対物レンズ

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US (2) US7830611B2 (enExample)
JP (1) JP5069232B2 (enExample)
WO (1) WO2007017089A1 (enExample)

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