JP2009120946A5 - - Google Patents

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Publication number
JP2009120946A5
JP2009120946A5 JP2008271476A JP2008271476A JP2009120946A5 JP 2009120946 A5 JP2009120946 A5 JP 2009120946A5 JP 2008271476 A JP2008271476 A JP 2008271476A JP 2008271476 A JP2008271476 A JP 2008271476A JP 2009120946 A5 JP2009120946 A5 JP 2009120946A5
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JP
Japan
Prior art keywords
shadow mask
substrate
deposition
region
light
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Withdrawn
Application number
JP2008271476A
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English (en)
Japanese (ja)
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JP2009120946A (ja
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Priority to JP2008271476A priority Critical patent/JP2009120946A/ja
Priority claimed from JP2008271476A external-priority patent/JP2009120946A/ja
Publication of JP2009120946A publication Critical patent/JP2009120946A/ja
Publication of JP2009120946A5 publication Critical patent/JP2009120946A5/ja
Withdrawn legal-status Critical Current

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JP2008271476A 2007-10-23 2008-10-22 成膜方法および発光装置の作製方法 Withdrawn JP2009120946A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008271476A JP2009120946A (ja) 2007-10-23 2008-10-22 成膜方法および発光装置の作製方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007274900 2007-10-23
JP2008271476A JP2009120946A (ja) 2007-10-23 2008-10-22 成膜方法および発光装置の作製方法

Publications (2)

Publication Number Publication Date
JP2009120946A JP2009120946A (ja) 2009-06-04
JP2009120946A5 true JP2009120946A5 (enExample) 2011-11-10

Family

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JP2008271476A Withdrawn JP2009120946A (ja) 2007-10-23 2008-10-22 成膜方法および発光装置の作製方法

Country Status (5)

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US (1) US20090104721A1 (enExample)
JP (1) JP2009120946A (enExample)
KR (1) KR20090041316A (enExample)
CN (1) CN101691652A (enExample)
TW (1) TWI500787B (enExample)

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JP5298244B2 (ja) * 2010-10-19 2013-09-25 シャープ株式会社 蒸着装置
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CN104862669B (zh) * 2010-12-16 2018-05-22 潘重光 任意尺寸底板及显示屏的气相沉积荫罩板系统及其方法
KR102112440B1 (ko) 2011-02-16 2020-05-18 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 소자
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EP2781296B1 (de) * 2013-03-21 2020-10-21 Corning Laser Technologies GmbH Vorrichtung und verfahren zum ausschneiden von konturen aus flächigen substraten mittels laser
KR20150007740A (ko) * 2013-07-12 2015-01-21 삼성디스플레이 주식회사 전사용 도너 기판 및 유기 발광 표시 장치의 제조 방법
US11556039B2 (en) 2013-12-17 2023-01-17 Corning Incorporated Electrochromic coated glass articles and methods for laser processing the same
US9517963B2 (en) 2013-12-17 2016-12-13 Corning Incorporated Method for rapid laser drilling of holes in glass and products made therefrom
TWI570982B (zh) * 2013-12-31 2017-02-11 昆山工研院新型平板顯示技術中心有限公司 An organic light emitting display device and a top emission organic light emitting diode device with improved viewing angle characteristics
US20170009332A1 (en) * 2014-03-12 2017-01-12 Advantech Global, Ltd Small mask tiling for larger area depositions
KR102445217B1 (ko) 2014-07-08 2022-09-20 코닝 인코포레이티드 재료를 레이저 가공하는 방법 및 장치
TWI659793B (zh) 2014-07-14 2019-05-21 美商康寧公司 用於使用可調整雷射束焦線來處理透明材料的系統及方法
KR102181239B1 (ko) 2014-09-03 2020-11-23 삼성디스플레이 주식회사 박막 형성 장치 및 그를 이용한 박막 형성 방법
CN105679967B (zh) * 2014-11-18 2018-06-26 昆山国显光电有限公司 掩膜板、制备有机发光显示装置的方法
CN104362170B (zh) * 2014-11-28 2017-04-12 京东方科技集团股份有限公司 一种有机电致发光显示器件、其驱动方法及相关装置
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CN104911548B (zh) * 2015-06-30 2017-05-03 合肥鑫晟光电科技有限公司 一种真空蒸镀装置及蒸镀方法
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