JP2009087930A5 - - Google Patents
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- Publication number
- JP2009087930A5 JP2009087930A5 JP2008226583A JP2008226583A JP2009087930A5 JP 2009087930 A5 JP2009087930 A5 JP 2009087930A5 JP 2008226583 A JP2008226583 A JP 2008226583A JP 2008226583 A JP2008226583 A JP 2008226583A JP 2009087930 A5 JP2009087930 A5 JP 2009087930A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- substrate
- manufacturing
- emitting device
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 27
- 239000000463 material Substances 0.000 claims 16
- 238000000034 method Methods 0.000 claims 13
- 238000004519 manufacturing process Methods 0.000 claims 12
- 238000007740 vapor deposition Methods 0.000 claims 10
- 230000031700 light absorption Effects 0.000 claims 8
- 230000008020 evaporation Effects 0.000 claims 4
- 238000001704 evaporation Methods 0.000 claims 4
- 239000000956 alloy Substances 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 229910052709 silver Inorganic materials 0.000 claims 2
- 239000004332 silver Substances 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008226583A JP5180012B2 (ja) | 2007-09-13 | 2008-09-04 | 発光装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007237493 | 2007-09-13 | ||
| JP2007237493 | 2007-09-13 | ||
| JP2008226583A JP5180012B2 (ja) | 2007-09-13 | 2008-09-04 | 発光装置の作製方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012107224A Division JP5244996B2 (ja) | 2007-09-13 | 2012-05-09 | 照明装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009087930A JP2009087930A (ja) | 2009-04-23 |
| JP2009087930A5 true JP2009087930A5 (enExample) | 2011-09-22 |
| JP5180012B2 JP5180012B2 (ja) | 2013-04-10 |
Family
ID=40454870
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008226583A Expired - Fee Related JP5180012B2 (ja) | 2007-09-13 | 2008-09-04 | 発光装置の作製方法 |
| JP2012107224A Expired - Fee Related JP5244996B2 (ja) | 2007-09-13 | 2012-05-09 | 照明装置の作製方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012107224A Expired - Fee Related JP5244996B2 (ja) | 2007-09-13 | 2012-05-09 | 照明装置の作製方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20090075214A1 (enExample) |
| JP (2) | JP5180012B2 (enExample) |
| KR (1) | KR20090028413A (enExample) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8153201B2 (en) | 2007-10-23 | 2012-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing light-emitting device, and evaporation donor substrate |
| KR20090041314A (ko) * | 2007-10-23 | 2009-04-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 증착용 기판 및 발광장치의 제조방법 |
| US8425974B2 (en) * | 2007-11-29 | 2013-04-23 | Semiconductor Energy Laboratory Co., Ltd. | Evaporation donor substrate and method for manufacturing light-emitting device |
| KR101689519B1 (ko) * | 2007-12-26 | 2016-12-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 증착용 기판, 증착용 기판의 제조방법, 및 발광장치의 제조방법 |
| US8080811B2 (en) | 2007-12-28 | 2011-12-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing evaporation donor substrate and light-emitting device |
| WO2009099002A1 (en) * | 2008-02-04 | 2009-08-13 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and method for manufacturing light-emitting device |
| JP5416987B2 (ja) * | 2008-02-29 | 2014-02-12 | 株式会社半導体エネルギー研究所 | 成膜方法及び発光装置の作製方法 |
| WO2009107548A1 (en) * | 2008-02-29 | 2009-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and manufacturing method of light-emitting device |
| JP5079722B2 (ja) * | 2008-03-07 | 2012-11-21 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| US8182863B2 (en) * | 2008-03-17 | 2012-05-22 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and manufacturing method of light-emitting device |
| JP5244680B2 (ja) * | 2008-04-14 | 2013-07-24 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| JP5159689B2 (ja) * | 2008-04-25 | 2013-03-06 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| KR101629637B1 (ko) * | 2008-05-29 | 2016-06-13 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 성막방법 및 발광장치의 제조방법 |
| JP5292032B2 (ja) * | 2008-09-16 | 2013-09-18 | 東京エレクトロン株式会社 | 重合膜の成膜方法および成膜装置 |
| US8486736B2 (en) * | 2008-10-20 | 2013-07-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing light-emitting device |
| JP5291607B2 (ja) * | 2008-12-15 | 2013-09-18 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| JP5024348B2 (ja) * | 2009-03-23 | 2012-09-12 | 株式会社デンソー | 基板の表面に樹脂絶縁膜のパターンを形成する方法及び半導体装置 |
| JP5258669B2 (ja) * | 2009-05-12 | 2013-08-07 | 株式会社半導体エネルギー研究所 | 成膜方法及び転写用基板 |
| EP2509396A1 (en) * | 2009-12-03 | 2012-10-10 | Toray Industries, Inc. | Donor substrate, patterning method, and method for producing device |
| JP6174307B2 (ja) * | 2012-08-10 | 2017-08-02 | 株式会社三共 | 遊技機 |
| KR20150003570A (ko) * | 2013-07-01 | 2015-01-09 | 삼성디스플레이 주식회사 | 전사용 도너 기판 및 유기 발광 표시 장치의 제조 방법 |
| KR20150007740A (ko) * | 2013-07-12 | 2015-01-21 | 삼성디스플레이 주식회사 | 전사용 도너 기판 및 유기 발광 표시 장치의 제조 방법 |
| KR20150056112A (ko) * | 2013-11-14 | 2015-05-26 | 삼성디스플레이 주식회사 | 막 형성용 마스크, 이를 이용한 막 형성 방법 및 유기 발광 표시 장치의 제조 방법 |
| EP2884553A1 (en) * | 2013-12-11 | 2015-06-17 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Method and system for providing a carrier with an embedded patterned metal structure |
| KR20150109013A (ko) * | 2014-03-18 | 2015-10-01 | 삼성디스플레이 주식회사 | 유기막 패턴 형성용 마스크, 이를 이용한 유기막 패턴 형성 방법 및 유기 발광 표시 장치의 제조 방법 |
| KR20160003363A (ko) * | 2014-06-30 | 2016-01-11 | 삼성디스플레이 주식회사 | 도너마스크 및 유기발광 디스플레이 장치 제조방법 |
| KR102325208B1 (ko) | 2014-08-12 | 2021-11-12 | 삼성디스플레이 주식회사 | 도너마스크, 이를 이용한 유기발광 디스플레이 장치 제조방법 및 유기발광 디스플레이 장치 |
| KR20160030002A (ko) | 2014-09-05 | 2016-03-16 | 삼성디스플레이 주식회사 | 도너마스크 및 이를 이용한 유기발광 디스플레이 장치 제조방법 |
| US10437153B2 (en) | 2014-10-23 | 2019-10-08 | SCREEN Holdings Co., Ltd. | Heat treatment method and heat treatment apparatus |
| DE102015101932A1 (de) | 2015-02-11 | 2016-08-25 | Von Ardenne Gmbh | Verfahren und Vorrichtung zur strukturierten Beschichtung von Substraten |
| US9685349B2 (en) * | 2015-10-08 | 2017-06-20 | The United States Of America, As Represented By The Secretary Of The Navy | Laser-induced forming and transfer of shaped metallic interconnects |
| JP6661996B2 (ja) * | 2015-11-25 | 2020-03-11 | 東レ株式会社 | 樹脂基板の製造方法、樹脂積層基板の製造方法および表示装置の製造方法 |
| CN106328830B (zh) * | 2016-09-29 | 2018-04-24 | 昆山工研院新型平板显示技术中心有限公司 | Amoled显示器的制作方法及amoled显示器 |
| GB2563271A (en) | 2017-06-08 | 2018-12-12 | Short Brothers Plc | Aircraft ice protection system and method |
| CN111443539B (zh) * | 2020-04-10 | 2023-04-11 | 京东方科技集团股份有限公司 | 一种显示基板及显示装置 |
Family Cites Families (36)
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|---|---|---|---|---|
| GB8824366D0 (en) * | 1988-10-18 | 1988-11-23 | Kodak Ltd | Method of making colour filter array |
| JPH04248203A (ja) * | 1991-01-25 | 1992-09-03 | Matsushita Electric Works Ltd | 可変色照明装置 |
| JPH1050478A (ja) * | 1996-04-19 | 1998-02-20 | Toray Ind Inc | 有機電界発光素子およびその製造方法 |
| KR100195175B1 (ko) * | 1996-12-23 | 1999-06-15 | 손욱 | 유기전자발광소자 유기박막용 도너필름, 이를 이용한 유기전자발광소자의 제조방법 및 그 방법에 따라 제조된 유기전자발광소자 |
| US5904961A (en) * | 1997-01-24 | 1999-05-18 | Eastman Kodak Company | Method of depositing organic layers in organic light emitting devices |
| US5851709A (en) * | 1997-10-31 | 1998-12-22 | Eastman Kodak Company | Method for selective transfer of a color organic layer |
| JP2918037B1 (ja) * | 1998-06-18 | 1999-07-12 | 日本電気株式会社 | カラー有機elディスプレイとその製造方法 |
| JP2002222694A (ja) * | 2001-01-25 | 2002-08-09 | Sharp Corp | レーザー加工装置及びそれを用いた有機エレクトロルミネッセンス表示パネル |
| DE10133686C2 (de) * | 2001-07-11 | 2003-07-17 | Osram Opto Semiconductors Gmbh | Organisches, elektrolumineszierendes Display und dessen Herstellung |
| MXPA04001412A (es) * | 2001-08-16 | 2004-07-15 | 3M Innovative Properties Co | Metodo y materiales para moldear matriz amorfa, polimerizable con material electricamente activo dispuesto en la misma. |
| US6699597B2 (en) * | 2001-08-16 | 2004-03-02 | 3M Innovative Properties Company | Method and materials for patterning of an amorphous, non-polymeric, organic matrix with electrically active material disposed therein |
| JP2003100454A (ja) * | 2001-09-25 | 2003-04-04 | Dainippon Printing Co Ltd | 転写シート |
| US6703179B2 (en) * | 2002-03-13 | 2004-03-09 | Eastman Kodak Company | Transfer of organic material from a donor to form a layer in an OLED device |
| US6695030B1 (en) * | 2002-08-20 | 2004-02-24 | Eastman Kodak Company | Apparatus for permitting transfer of organic material from a donor web to form a layer in an OLED device |
| EP1555984B1 (en) * | 2002-10-21 | 2008-03-12 | L'oreal | Process for dissolving lipophilic compounds, and cosmetic composition. |
| JP2004233957A (ja) * | 2002-12-05 | 2004-08-19 | Toyota Industries Corp | 光学素子、面状照明装置及び液晶表示装置 |
| JP3840462B2 (ja) * | 2003-05-29 | 2006-11-01 | 八千代工業株式会社 | 車両用ガラスサンルーフパネル |
| US20050145326A1 (en) * | 2004-01-05 | 2005-07-07 | Eastman Kodak Company | Method of making an OLED device |
| JP4545504B2 (ja) * | 2004-07-15 | 2010-09-15 | 株式会社半導体エネルギー研究所 | 膜形成方法、発光装置の作製方法 |
| KR100667069B1 (ko) * | 2004-10-19 | 2007-01-10 | 삼성에스디아이 주식회사 | 도너 기판 및 그를 사용한 유기전계발광표시장치의 제조방법 |
| JP4815860B2 (ja) * | 2004-11-11 | 2011-11-16 | ソニー株式会社 | 発光素子及びその製造方法 |
| US7579224B2 (en) * | 2005-01-21 | 2009-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a thin film semiconductor device |
| KR20060109373A (ko) * | 2005-04-15 | 2006-10-20 | 삼성전기주식회사 | 유기전자소자 제조방법 |
| JP2005242380A (ja) * | 2005-04-19 | 2005-09-08 | Toshiba Corp | アクティブマトリクス基板及び表示装置 |
| JP2006309994A (ja) * | 2005-04-27 | 2006-11-09 | Sony Corp | 転写用基板および転写方法ならびに表示装置の製造方法 |
| JP2006309995A (ja) * | 2005-04-27 | 2006-11-09 | Sony Corp | 転写用基板および表示装置の製造方法ならびに表示装置 |
| JP4487868B2 (ja) * | 2005-06-27 | 2010-06-23 | パナソニック電工株式会社 | 面発光パネルおよび照明装置 |
| EP1760776B1 (en) * | 2005-08-31 | 2019-12-25 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method for semiconductor device with flexible substrate |
| JP2007115529A (ja) * | 2005-10-20 | 2007-05-10 | Toshiba Matsushita Display Technology Co Ltd | 表示装置及び表示装置の製造方法 |
| JP4449890B2 (ja) * | 2005-11-21 | 2010-04-14 | ソニー株式会社 | 転写用基板および転写方法ならびに表示装置の製造方法 |
| JP2007173145A (ja) * | 2005-12-26 | 2007-07-05 | Sony Corp | 転写用基板、転写方法、および有機電界発光素子の製造方法 |
| JP5013048B2 (ja) * | 2006-04-06 | 2012-08-29 | ソニー株式会社 | 赤色有機発光素子およびこれを備えた表示装置 |
| KR101322310B1 (ko) * | 2006-06-30 | 2013-10-25 | 엘지디스플레이 주식회사 | 유기전기발광소자 및 그 제조방법 |
| JP2009016287A (ja) * | 2007-07-09 | 2009-01-22 | Seiko Epson Corp | 有機el装置の製造方法、及び有機el装置の製造装置 |
| US7993945B2 (en) * | 2008-04-11 | 2011-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing light-emitting device |
| JP5244680B2 (ja) * | 2008-04-14 | 2013-07-24 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
-
2008
- 2008-08-29 KR KR20080085219A patent/KR20090028413A/ko not_active Ceased
- 2008-09-03 US US12/203,424 patent/US20090075214A1/en not_active Abandoned
- 2008-09-04 JP JP2008226583A patent/JP5180012B2/ja not_active Expired - Fee Related
-
2012
- 2012-05-09 JP JP2012107224A patent/JP5244996B2/ja not_active Expired - Fee Related
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