JP2011040186A5 - - Google Patents

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Publication number
JP2011040186A5
JP2011040186A5 JP2009184270A JP2009184270A JP2011040186A5 JP 2011040186 A5 JP2011040186 A5 JP 2011040186A5 JP 2009184270 A JP2009184270 A JP 2009184270A JP 2009184270 A JP2009184270 A JP 2009184270A JP 2011040186 A5 JP2011040186 A5 JP 2011040186A5
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JP
Japan
Prior art keywords
substrate
layer
organic material
light
recess
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Application number
JP2009184270A
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English (en)
Japanese (ja)
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JP2011040186A (ja
JP5137917B2 (ja
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Priority to JP2009184270A priority Critical patent/JP5137917B2/ja
Priority claimed from JP2009184270A external-priority patent/JP5137917B2/ja
Publication of JP2011040186A publication Critical patent/JP2011040186A/ja
Publication of JP2011040186A5 publication Critical patent/JP2011040186A5/ja
Application granted granted Critical
Publication of JP5137917B2 publication Critical patent/JP5137917B2/ja
Expired - Fee Related legal-status Critical Current
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JP2009184270A 2009-08-07 2009-08-07 成膜用基板、成膜方法及び発光素子の作製方法 Expired - Fee Related JP5137917B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009184270A JP5137917B2 (ja) 2009-08-07 2009-08-07 成膜用基板、成膜方法及び発光素子の作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009184270A JP5137917B2 (ja) 2009-08-07 2009-08-07 成膜用基板、成膜方法及び発光素子の作製方法

Publications (3)

Publication Number Publication Date
JP2011040186A JP2011040186A (ja) 2011-02-24
JP2011040186A5 true JP2011040186A5 (enExample) 2012-08-30
JP5137917B2 JP5137917B2 (ja) 2013-02-06

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ID=43767763

Family Applications (1)

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JP2009184270A Expired - Fee Related JP5137917B2 (ja) 2009-08-07 2009-08-07 成膜用基板、成膜方法及び発光素子の作製方法

Country Status (1)

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JP (1) JP5137917B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3287291A1 (en) * 2016-08-26 2018-02-28 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Method and system for applying a patterned structure on a surface
KR102239833B1 (ko) * 2016-12-21 2021-04-13 엔씨씨 나노, 엘엘씨 기능성 재료를 기판 상에 증착시키기 위한 방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8153201B2 (en) * 2007-10-23 2012-04-10 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing light-emitting device, and evaporation donor substrate
JP2009146715A (ja) * 2007-12-13 2009-07-02 Sony Corp ドナー基板および表示装置の製造方法
US20110089412A1 (en) * 2008-06-16 2011-04-21 Shigeo Fujimori Patterning method, production method of device using the patterning method, and device
JP4600569B2 (ja) * 2008-06-25 2010-12-15 ソニー株式会社 ドナー基板および表示装置の製造方法
JP5258666B2 (ja) * 2009-04-22 2013-08-07 株式会社半導体エネルギー研究所 発光装置の作製方法および成膜用基板

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