JP5137917B2 - 成膜用基板、成膜方法及び発光素子の作製方法 - Google Patents
成膜用基板、成膜方法及び発光素子の作製方法 Download PDFInfo
- Publication number
- JP5137917B2 JP5137917B2 JP2009184270A JP2009184270A JP5137917B2 JP 5137917 B2 JP5137917 B2 JP 5137917B2 JP 2009184270 A JP2009184270 A JP 2009184270A JP 2009184270 A JP2009184270 A JP 2009184270A JP 5137917 B2 JP5137917 B2 JP 5137917B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- organic material
- light
- layer
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims description 124
- 238000000034 method Methods 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000011368 organic material Substances 0.000 claims description 84
- 239000000463 material Substances 0.000 claims description 22
- 230000031700 light absorption Effects 0.000 claims description 19
- 238000002347 injection Methods 0.000 claims description 12
- 239000007924 injection Substances 0.000 claims description 12
- 230000005525 hole transport Effects 0.000 claims description 8
- 230000001678 irradiating effect Effects 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000010408 film Substances 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 7
- 239000012212 insulator Substances 0.000 description 5
- 239000003086 colorant Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000005281 excited state Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- OGGKVJMNFFSDEV-UHFFFAOYSA-N 3-methyl-n-[4-[4-(n-(3-methylphenyl)anilino)phenyl]phenyl]-n-phenylaniline Chemical compound CC1=CC=CC(N(C=2C=CC=CC=2)C=2C=CC(=CC=2)C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C=C(C)C=CC=2)=C1 OGGKVJMNFFSDEV-UHFFFAOYSA-N 0.000 description 1
- KROKPRXHVSGBQB-UHFFFAOYSA-N 3-phenyl-9-[4-(10-phenylanthracen-9-yl)phenyl]carbazole Chemical compound C1=CC=CC=C1C1=CC=C(N(C=2C=CC(=CC=2)C=2C3=CC=CC=C3C(C=3C=CC=CC=3)=C3C=CC=CC3=2)C=2C3=CC=CC=2)C3=C1 KROKPRXHVSGBQB-UHFFFAOYSA-N 0.000 description 1
- AWXGSYPUMWKTBR-UHFFFAOYSA-N 4-carbazol-9-yl-n,n-bis(4-carbazol-9-ylphenyl)aniline Chemical compound C12=CC=CC=C2C2=CC=CC=C2N1C1=CC=C(N(C=2C=CC(=CC=2)N2C3=CC=CC=C3C3=CC=CC=C32)C=2C=CC(=CC=2)N2C3=CC=CC=C3C3=CC=CC=C32)C=C1 AWXGSYPUMWKTBR-UHFFFAOYSA-N 0.000 description 1
- HGHBHXZNXIDZIZ-UHFFFAOYSA-N 4-n-(9,10-diphenylanthracen-2-yl)-1-n,1-n,4-n-triphenylbenzene-1,4-diamine Chemical compound C1=CC=CC=C1N(C=1C=CC(=CC=1)N(C=1C=CC=CC=1)C=1C=C2C(C=3C=CC=CC=3)=C3C=CC=CC3=C(C=3C=CC=CC=3)C2=CC=1)C1=CC=CC=C1 HGHBHXZNXIDZIZ-UHFFFAOYSA-N 0.000 description 1
- -1 Azol-2-yl Chemical group 0.000 description 1
- 101000837344 Homo sapiens T-cell leukemia translocation-altered gene protein Proteins 0.000 description 1
- 102100028692 T-cell leukemia translocation-altered gene protein Human genes 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 238000001931 thermography Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- ODHXBMXNKOYIBV-UHFFFAOYSA-N triphenylamine Chemical compound C1=CC=CC=C1N(C=1C=CC=CC=1)C1=CC=CC=C1 ODHXBMXNKOYIBV-UHFFFAOYSA-N 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Landscapes
- Electroluminescent Light Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009184270A JP5137917B2 (ja) | 2009-08-07 | 2009-08-07 | 成膜用基板、成膜方法及び発光素子の作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009184270A JP5137917B2 (ja) | 2009-08-07 | 2009-08-07 | 成膜用基板、成膜方法及び発光素子の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011040186A JP2011040186A (ja) | 2011-02-24 |
| JP2011040186A5 JP2011040186A5 (enExample) | 2012-08-30 |
| JP5137917B2 true JP5137917B2 (ja) | 2013-02-06 |
Family
ID=43767763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009184270A Expired - Fee Related JP5137917B2 (ja) | 2009-08-07 | 2009-08-07 | 成膜用基板、成膜方法及び発光素子の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5137917B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102239833B1 (ko) * | 2016-12-21 | 2021-04-13 | 엔씨씨 나노, 엘엘씨 | 기능성 재료를 기판 상에 증착시키기 위한 방법 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3287291A1 (en) | 2016-08-26 | 2018-02-28 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Method and system for applying a patterned structure on a surface |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8153201B2 (en) * | 2007-10-23 | 2012-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing light-emitting device, and evaporation donor substrate |
| JP2009146715A (ja) * | 2007-12-13 | 2009-07-02 | Sony Corp | ドナー基板および表示装置の製造方法 |
| WO2009154156A1 (ja) * | 2008-06-16 | 2009-12-23 | 東レ株式会社 | パターニング方法およびこれを用いたデバイスの製造方法ならびにデバイス |
| JP4600569B2 (ja) * | 2008-06-25 | 2010-12-15 | ソニー株式会社 | ドナー基板および表示装置の製造方法 |
| JP5258666B2 (ja) * | 2009-04-22 | 2013-08-07 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法および成膜用基板 |
-
2009
- 2009-08-07 JP JP2009184270A patent/JP5137917B2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102239833B1 (ko) * | 2016-12-21 | 2021-04-13 | 엔씨씨 나노, 엘엘씨 | 기능성 재료를 기판 상에 증착시키기 위한 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011040186A (ja) | 2011-02-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100595931C (zh) | 电致发光显示装置和用于电致发光显示装置的热转移给体膜 | |
| TWI357777B (en) | Display and method for manufacturing display | |
| KR100932940B1 (ko) | 유기 발광 디스플레이 장치 | |
| US8535108B2 (en) | Formation method of an organic layer, manufacturing method of an organic electroluminescent element, organic electroluminescent element, and organic electroluminescent display device | |
| JP4880092B2 (ja) | 発光素子及び表示装置 | |
| KR100754127B1 (ko) | 유기 전계 발광표시장치 및 그 제조방법 | |
| US20190006628A1 (en) | Organic Light-Emitting Diode Device and Manufacturing Method Thereof and Display Panel | |
| JP5137917B2 (ja) | 成膜用基板、成膜方法及び発光素子の作製方法 | |
| TW200403904A (en) | Vertical cavity light-producing device with improved power conversion | |
| JP2000077182A (ja) | 有機ｅｌ素子の製造方法及び有機ｅｌ転写基板とその製造方法 | |
| KR100306237B1 (ko) | 색조절가능한유기발광소자 | |
| TW201002129A (en) | Organic el display and manufacturing method thereof | |
| WO2011013168A1 (ja) | 発光素子及び表示装置 | |
| CN104851985B (zh) | 发光元件和显示装置 | |
| JP3898163B2 (ja) | 有機発光表示装置 | |
| JP5485966B2 (ja) | 発光素子 | |
| JP5805618B2 (ja) | 有機発光素子およびこれを用いた照明装置 | |
| KR101797959B1 (ko) | 유기물 패턴의 형성 방법 및 이를 포함한 유기발광 디스플레이의 제조방법 | |
| JP5357381B2 (ja) | 有機ｅｌ素子 | |
| JP2005317536A (ja) | 有機電界発光素子およびその製造方法 | |
| KR101989086B1 (ko) | Ｏｌｅｄ 조명 소자 및 그 제조 방법 | |
| CN107302013B (zh) | 像素结构 | |
| JP5258669B2 (ja) | 成膜方法及び転写用基板 | |
| KR100752384B1 (ko) | 유기 전계 발광표시장치의 제조방법 | |
| KR100601376B1 (ko) | 유기 전계 발광 표시 소자 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120716 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120716 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20121030 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20121106 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20121113 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20151122 Year of fee payment: 3 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |