JP2009043978A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2009043978A5 JP2009043978A5 JP2007207962A JP2007207962A JP2009043978A5 JP 2009043978 A5 JP2009043978 A5 JP 2009043978A5 JP 2007207962 A JP2007207962 A JP 2007207962A JP 2007207962 A JP2007207962 A JP 2007207962A JP 2009043978 A5 JP2009043978 A5 JP 2009043978A5
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- cooling flow
- semiconductor
- semiconductor device
- wiring board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 15
- 238000001816 cooling Methods 0.000 claims 9
- 239000000758 substrate Substances 0.000 claims 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 230000001174 ascending effect Effects 0.000 claims 1
- 239000000498 cooling water Substances 0.000 claims 1
- 230000020169 heat generation Effects 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007207962A JP5009085B2 (ja) | 2007-08-09 | 2007-08-09 | 半導体装置 |
| EP08161413.3A EP2023390B1 (en) | 2007-08-09 | 2008-07-30 | Semiconductor device |
| US12/187,636 US7952191B2 (en) | 2007-08-09 | 2008-08-07 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007207962A JP5009085B2 (ja) | 2007-08-09 | 2007-08-09 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009043978A JP2009043978A (ja) | 2009-02-26 |
| JP2009043978A5 true JP2009043978A5 (https=) | 2010-05-13 |
| JP5009085B2 JP5009085B2 (ja) | 2012-08-22 |
Family
ID=40032686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007207962A Expired - Fee Related JP5009085B2 (ja) | 2007-08-09 | 2007-08-09 | 半導体装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US7952191B2 (https=) |
| EP (1) | EP2023390B1 (https=) |
| JP (1) | JP5009085B2 (https=) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009143330A2 (en) * | 2008-05-21 | 2009-11-26 | Asetek A/S | Graphics card thermal interposer |
| JP2011222818A (ja) * | 2010-04-12 | 2011-11-04 | Yokogawa Electric Corp | 半導体デバイスの冷却構造 |
| JP5440440B2 (ja) * | 2010-08-06 | 2014-03-12 | 株式会社デンソー | 電子装置 |
| JP5776340B2 (ja) * | 2011-06-06 | 2015-09-09 | 富士通株式会社 | 液体搬送装置及び該搬送装置を用いた半導体冷却装置 |
| JP5779042B2 (ja) | 2011-08-18 | 2015-09-16 | 新光電気工業株式会社 | 半導体装置 |
| WO2013035337A1 (ja) * | 2011-09-09 | 2013-03-14 | 日本特殊陶業株式会社 | 半導体モジュール、回路基板 |
| US9082633B2 (en) * | 2011-10-13 | 2015-07-14 | Xilinx, Inc. | Multi-die integrated circuit structure with heat sink |
| JP5891707B2 (ja) * | 2011-10-28 | 2016-03-23 | 富士通株式会社 | 半導体装置とその製造方法 |
| JP5898919B2 (ja) | 2011-10-31 | 2016-04-06 | 新光電気工業株式会社 | 半導体装置 |
| CN103946043B (zh) * | 2011-11-16 | 2016-06-01 | 丰田自动车株式会社 | 电气设备的冷却装置 |
| US9490190B2 (en) | 2012-09-21 | 2016-11-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Thermal dissipation through seal rings in 3DIC structure |
| US8796829B2 (en) | 2012-09-21 | 2014-08-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Thermal dissipation through seal rings in 3DIC structure |
| JP6196815B2 (ja) | 2013-06-05 | 2017-09-13 | 新光電気工業株式会社 | 冷却装置及び半導体装置 |
| JP2015065335A (ja) * | 2013-09-25 | 2015-04-09 | Necプラットフォームズ株式会社 | 電子装置 |
| US9425125B2 (en) * | 2014-02-20 | 2016-08-23 | Altera Corporation | Silicon-glass hybrid interposer circuitry |
| CN106604618B (zh) * | 2017-01-05 | 2024-01-09 | 中国科学院广州能源研究所 | 一种用于数据中心的液冷、风冷复合冷却装置 |
| US10128199B1 (en) * | 2017-07-17 | 2018-11-13 | International Business Machines Corporation | Interchip backside connection |
| CN109950250B (zh) | 2017-12-20 | 2022-03-01 | 晟碟信息科技(上海)有限公司 | 具有矩阵冷却的数据中心3d固态驱动 |
| JP7172471B2 (ja) * | 2018-11-09 | 2022-11-16 | 住友電装株式会社 | 基板構造体 |
| US10763186B2 (en) * | 2018-12-31 | 2020-09-01 | Micron Technology, Inc. | Package cooling by coil cavity |
| US10966338B1 (en) | 2020-03-11 | 2021-03-30 | Peter C. Salmon | Densely packed electronic systems |
| US11393807B2 (en) | 2020-03-11 | 2022-07-19 | Peter C. Salmon | Densely packed electronic systems |
| US11546991B2 (en) | 2020-03-11 | 2023-01-03 | Peter C. Salmon | Densely packed electronic systems |
| US12302497B2 (en) | 2020-03-11 | 2025-05-13 | Peter C. Salmon | Densely packed electronic systems |
| US11523543B1 (en) | 2022-02-25 | 2022-12-06 | Peter C. Salmon | Water cooled server |
| US11445640B1 (en) | 2022-02-25 | 2022-09-13 | Peter C. Salmon | Water cooled server |
| US12376254B2 (en) | 2022-02-25 | 2025-07-29 | Peter C. Salmon | Water cooled server |
| US12136576B1 (en) | 2023-06-22 | 2024-11-05 | Peter C. Salmon | Microelectronic module |
| US12469754B2 (en) | 2023-09-07 | 2025-11-11 | Peter C. Salmon | Hermetic microelectronic module using a sheath |
| US12255122B1 (en) | 2023-12-13 | 2025-03-18 | Peter C. Salmon | Water-cooled electronic system |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4649990A (en) * | 1985-05-06 | 1987-03-17 | Hitachi, Ltd. | Heat-conducting cooling module |
| JPH05136305A (ja) * | 1991-11-08 | 1993-06-01 | Hitachi Ltd | 発熱体の冷却装置 |
| US6213195B1 (en) * | 1998-12-23 | 2001-04-10 | Hamilton Sundstrand Corporation | Modular coolant manifold for use with power electronics devices having integrated coolers |
| JP2001015675A (ja) * | 1999-06-29 | 2001-01-19 | Hitachi Ltd | マルチチップモジュール |
| JP3518434B2 (ja) * | 1999-08-11 | 2004-04-12 | 株式会社日立製作所 | マルチチップモジュールの冷却装置 |
| US6366462B1 (en) * | 2000-07-18 | 2002-04-02 | International Business Machines Corporation | Electronic module with integral refrigerant evaporator assembly and control system therefore |
| US6822170B2 (en) * | 2000-12-26 | 2004-11-23 | Ngk Spark Plug Co., Ltd. | Embedding resin and wiring substrate using the same |
| JPWO2002057921A1 (ja) * | 2001-01-19 | 2004-07-22 | 株式会社日立製作所 | 電子回路装置 |
| JP3815239B2 (ja) * | 2001-03-13 | 2006-08-30 | 日本電気株式会社 | 半導体素子の実装構造及びプリント配線基板 |
| JP4604398B2 (ja) * | 2001-06-11 | 2011-01-05 | ソニー株式会社 | 高周波モジュール用基板装置、高周波モジュール装置及びこれらの製造方法 |
| US6433413B1 (en) * | 2001-08-17 | 2002-08-13 | Micron Technology, Inc. | Three-dimensional multichip module |
| JP2004228521A (ja) * | 2003-01-27 | 2004-08-12 | Ngk Spark Plug Co Ltd | 配線基板およびその製造方法 |
| US7019971B2 (en) * | 2003-09-30 | 2006-03-28 | Intel Corporation | Thermal management systems for micro-components |
| JP2005228237A (ja) * | 2004-02-16 | 2005-08-25 | Hitachi Ltd | 液冷システム及びそれを備えた電子機器 |
| JP2007073668A (ja) * | 2005-09-06 | 2007-03-22 | Fujitsu Ltd | 熱を伝える熱伝熱装置、及びこの伝熱装置を実装した電子装置 |
| US7675163B2 (en) * | 2007-03-21 | 2010-03-09 | Sun Microsystems, Inc. | Carbon nanotubes for active direct and indirect cooling of electronics device |
-
2007
- 2007-08-09 JP JP2007207962A patent/JP5009085B2/ja not_active Expired - Fee Related
-
2008
- 2008-07-30 EP EP08161413.3A patent/EP2023390B1/en not_active Ceased
- 2008-08-07 US US12/187,636 patent/US7952191B2/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2009043978A5 (https=) | ||
| JP5608187B2 (ja) | ヒートシンク | |
| JP5009085B2 (ja) | 半導体装置 | |
| JP5472443B2 (ja) | 冷却器 | |
| JP5769834B2 (ja) | 液冷式冷却器 | |
| US9123697B2 (en) | Semiconductor cooling device | |
| JP2006229180A5 (https=) | ||
| JP5738503B1 (ja) | 液冷ヒートシンク | |
| TWM289878U (en) | Heat-dissipation structure of water-cooling type parallel runner | |
| JP2015500569A5 (https=) | ||
| JP2008218589A5 (https=) | ||
| CN204859868U (zh) | 具有分流设计的液冷式水冷头及其散热结构 | |
| ATE548622T1 (de) | Wärmeaustauschsystem | |
| US11101194B2 (en) | Heat sinks and methods for fabricating a heat sink | |
| WO2016192482A1 (zh) | 插箱及其插卡 | |
| WO2013118809A1 (ja) | 半導体冷却装置 | |
| JP2016225530A (ja) | 液冷式冷却装置 | |
| JP2017108130A5 (https=) | ||
| CN103796475B (zh) | 散热模块及电子装置 | |
| JP6469521B2 (ja) | 液冷式冷却装置 | |
| CN104735958A (zh) | 一种液冷式热管散热器 | |
| US20130146259A1 (en) | Heat sink | |
| KR101611351B1 (ko) | 3d프린터에 의하여 제조되는 수냉식 냉각판 모듈 | |
| JP5605206B2 (ja) | 電子部品冷却装置 | |
| JP2005303063A5 (https=) |