JP2009043978A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2009043978A JP2009043978A JP2007207962A JP2007207962A JP2009043978A JP 2009043978 A JP2009043978 A JP 2009043978A JP 2007207962 A JP2007207962 A JP 2007207962A JP 2007207962 A JP2007207962 A JP 2007207962A JP 2009043978 A JP2009043978 A JP 2009043978A
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Abstract
【解決手段】半導体装置は、配線基板11と、配線基板11の上に実装された複数の半導体素子17と、複数の半導体素子17の上に配置され、配線基板17に対して水平方向に水を流すための冷却流路22を備えた放熱板21とを有する。複数の半導体素子17は冷却流路22に沿って配置されており、複数の半導体素子17のうち、冷却流路22の流入側には冷却流路22の流出側に配置される半導体素子17aよりも発熱量が小さい半導体素子17cが配置される。冷却流路22の流入側に配置される半導体素子はメモリ素子であり、冷却流路22の流出側に配置される半導体素子はロジック素子であるようにしてもよい。
【選択図】図2
Description
第1の実施形態の半導体装置を説明する前に、MCM(Multi Chip Module)構造を有する関連技術の半導体装置の問題点について説明する。
第2の実施形態では、半導体素子を冷却するための冷却水を流す冷却流路をインターポーザに形成する半導体装置について説明する。
Claims (10)
- 配線基板と、
前記配線基板の上に実装された複数の半導体素子と、
前記複数の半導体素子の上に配置され、前記配線基板に対して水平方向に水を流すための冷却流路を備えた放熱板とを有し、
前記複数の半導体素子は前記冷却流路に沿って配置されており、前記複数の半導体素子のうち、前記冷却流路の流入側に配置される半導体素子は前記冷却流路の流出側に配置される半導体素子よりも発熱量が小さいことを特徴とする半導体装置。 - 配線基板に対して水平方向に水を流すための冷却流路を備えた前記配線基板と、
前記配線基板の上に実装された複数の半導体素子とを有し、
前記複数の半導体素子は前記冷却流路に沿って配置されており、前記複数の半導体素子のうち、前記冷却流路の流入側に配置される半導体素子は前記冷却流路の流出側に配置される半導体素子よりも発熱量が小さいことを特徴とする半導体装置。 - 前記放熱板の下面側にキャビティが設けられ、前記複数の半導体素子は、その上面が導電性接着剤によって前記キャビティの内面側に接合された状態で前記キャビティ内に収容されていることを特徴とする請求項1に記載の半導体装置。
- 前記配線基板は、貫通電極が設けられた基板の上にビルドアップ配線が設けられて構成されることを特徴とする請求項2に記載の半導体装置。
- 前記貫通電極が設けられた基板は、シリコン基板、ガラス基板、又はシリコン基板とガラス基板とが接合された基板であることを特徴とする請求項4に記載の半導体装置。
- 前記複数の半導体素子は、前記配線基板の上側又は下側の少なくとも一方に実装されていることを特徴とする請求項2、4または5に記載の半導体装置。
- 前記冷却流路の流入側に配置される半導体素子はメモリ素子であり、前記冷却流路の流出側に配置される半導体素子はロジック素子であることを特徴とする請求項1乃至6のいずれか一項に記載の半導体装置。
- 前記複数の半導体素子は3つ以上実装され、前記冷却流路の流入側から流出側にかけて、発熱量の小さい順に配置されることを特徴とする請求項1乃至6のいずれか一項に記載の半導体装置。
- 前記冷却流路の流入側から流出側にかけて、DRAMチップ、フラッシュメモリチップ、CPUチップが順に配置されることを特徴とする請求項8に記載の半導体装置。
- 前記冷却流路を通過した冷却水は、熱交換器によって冷却されて循環することを特徴とする請求項1乃至6のいずれか一項に記載の半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2007207962A JP5009085B2 (ja) | 2007-08-09 | 2007-08-09 | 半導体装置 |
EP08161413.3A EP2023390B1 (en) | 2007-08-09 | 2008-07-30 | Semiconductor device |
US12/187,636 US7952191B2 (en) | 2007-08-09 | 2008-08-07 | Semiconductor device |
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JP2007207962A JP5009085B2 (ja) | 2007-08-09 | 2007-08-09 | 半導体装置 |
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JP2009043978A true JP2009043978A (ja) | 2009-02-26 |
JP2009043978A5 JP2009043978A5 (ja) | 2010-05-13 |
JP5009085B2 JP5009085B2 (ja) | 2012-08-22 |
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JP2007207962A Expired - Fee Related JP5009085B2 (ja) | 2007-08-09 | 2007-08-09 | 半導体装置 |
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EP (1) | EP2023390B1 (ja) |
JP (1) | JP5009085B2 (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2011222818A (ja) * | 2010-04-12 | 2011-11-04 | Yokogawa Electric Corp | 半導体デバイスの冷却構造 |
JP2012038892A (ja) * | 2010-08-06 | 2012-02-23 | Denso Corp | 電子装置 |
JP2012251750A (ja) * | 2011-06-06 | 2012-12-20 | Fujitsu Ltd | 液体搬送装置及び該搬送装置を用いた半導体冷却装置 |
KR20130020570A (ko) | 2011-08-18 | 2013-02-27 | 신꼬오덴기 고교 가부시키가이샤 | 반도체 장치 |
JP2013098212A (ja) * | 2011-10-28 | 2013-05-20 | Fujitsu Ltd | 半導体装置とその製造方法 |
US8648461B2 (en) | 2011-10-31 | 2014-02-11 | Shinko Electric Industries Co., Ltd. | Semiconductor device |
JP2014236198A (ja) * | 2013-06-05 | 2014-12-15 | 新光電気工業株式会社 | 冷却装置及び半導体装置 |
JP2015065335A (ja) * | 2013-09-25 | 2015-04-09 | Necプラットフォームズ株式会社 | 電子装置 |
JP2020077819A (ja) * | 2018-11-09 | 2020-05-21 | 住友電装株式会社 | 基板構造体 |
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EP3270261A1 (en) * | 2008-05-21 | 2018-01-17 | Asetek A/S | Graphics card thermal interposer |
KR20140070584A (ko) * | 2011-09-09 | 2014-06-10 | 니혼도꾸슈도교 가부시키가이샤 | 반도체 모듈, 회로기판 |
US9082633B2 (en) * | 2011-10-13 | 2015-07-14 | Xilinx, Inc. | Multi-die integrated circuit structure with heat sink |
WO2013073021A1 (ja) * | 2011-11-16 | 2013-05-23 | トヨタ自動車株式会社 | 電気機器の冷却装置 |
US9490190B2 (en) | 2012-09-21 | 2016-11-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Thermal dissipation through seal rings in 3DIC structure |
US8796829B2 (en) | 2012-09-21 | 2014-08-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Thermal dissipation through seal rings in 3DIC structure |
US9425125B2 (en) * | 2014-02-20 | 2016-08-23 | Altera Corporation | Silicon-glass hybrid interposer circuitry |
CN106604618B (zh) * | 2017-01-05 | 2024-01-09 | 中国科学院广州能源研究所 | 一种用于数据中心的液冷、风冷复合冷却装置 |
US10128199B1 (en) * | 2017-07-17 | 2018-11-13 | International Business Machines Corporation | Interchip backside connection |
CN109950250B (zh) | 2017-12-20 | 2022-03-01 | 晟碟信息科技(上海)有限公司 | 具有矩阵冷却的数据中心3d固态驱动 |
US10763186B2 (en) * | 2018-12-31 | 2020-09-01 | Micron Technology, Inc. | Package cooling by coil cavity |
US11393807B2 (en) | 2020-03-11 | 2022-07-19 | Peter C. Salmon | Densely packed electronic systems |
US11546991B2 (en) | 2020-03-11 | 2023-01-03 | Peter C. Salmon | Densely packed electronic systems |
US10966338B1 (en) | 2020-03-11 | 2021-03-30 | Peter C. Salmon | Densely packed electronic systems |
US11523543B1 (en) | 2022-02-25 | 2022-12-06 | Peter C. Salmon | Water cooled server |
US11445640B1 (en) | 2022-02-25 | 2022-09-13 | Peter C. Salmon | Water cooled server |
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JP2011222818A (ja) * | 2010-04-12 | 2011-11-04 | Yokogawa Electric Corp | 半導体デバイスの冷却構造 |
JP2012038892A (ja) * | 2010-08-06 | 2012-02-23 | Denso Corp | 電子装置 |
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US8648461B2 (en) | 2011-10-31 | 2014-02-11 | Shinko Electric Industries Co., Ltd. | Semiconductor device |
JP2014236198A (ja) * | 2013-06-05 | 2014-12-15 | 新光電気工業株式会社 | 冷却装置及び半導体装置 |
US9591742B2 (en) | 2013-06-05 | 2017-03-07 | Shinko Electric Industries Co., Ltd. | Interposer and semiconductor device including the same |
JP2015065335A (ja) * | 2013-09-25 | 2015-04-09 | Necプラットフォームズ株式会社 | 電子装置 |
JP2020077819A (ja) * | 2018-11-09 | 2020-05-21 | 住友電装株式会社 | 基板構造体 |
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Also Published As
Publication number | Publication date |
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JP5009085B2 (ja) | 2012-08-22 |
EP2023390A1 (en) | 2009-02-11 |
US7952191B2 (en) | 2011-05-31 |
EP2023390B1 (en) | 2015-09-23 |
US20090040715A1 (en) | 2009-02-12 |
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