JP2008522029A5 - - Google Patents

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Publication number
JP2008522029A5
JP2008522029A5 JP2007543039A JP2007543039A JP2008522029A5 JP 2008522029 A5 JP2008522029 A5 JP 2008522029A5 JP 2007543039 A JP2007543039 A JP 2007543039A JP 2007543039 A JP2007543039 A JP 2007543039A JP 2008522029 A5 JP2008522029 A5 JP 2008522029A5
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JP
Japan
Prior art keywords
wall
membrane precursor
support assembly
tray
precursor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007543039A
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English (en)
Japanese (ja)
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JP2008522029A (ja
JP4975639B2 (ja
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Publication date
Priority claimed from US10/998,420 external-priority patent/US7638002B2/en
Priority claimed from US11/007,962 external-priority patent/US7484315B2/en
Application filed filed Critical
Publication of JP2008522029A publication Critical patent/JP2008522029A/ja
Publication of JP2008522029A5 publication Critical patent/JP2008522029A5/ja
Application granted granted Critical
Publication of JP4975639B2 publication Critical patent/JP4975639B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2007543039A 2004-11-29 2005-10-03 交換式の積み重ね可能なトレイを備える固体前駆体供給システム Expired - Lifetime JP4975639B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US10/998,420 2004-11-29
US10/998,420 US7638002B2 (en) 2004-11-29 2004-11-29 Multi-tray film precursor evaporation system and thin film deposition system incorporating same
US11/007,962 US7484315B2 (en) 2004-11-29 2004-12-09 Replaceable precursor tray for use in a multi-tray solid precursor delivery system
US11/007,962 2004-12-09
PCT/US2005/035583 WO2006057710A1 (en) 2004-11-29 2005-10-03 A solid precursor delivery system comprising replaceable stackable trays

Publications (3)

Publication Number Publication Date
JP2008522029A JP2008522029A (ja) 2008-06-26
JP2008522029A5 true JP2008522029A5 (enExample) 2008-11-20
JP4975639B2 JP4975639B2 (ja) 2012-07-11

Family

ID=36096210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007543039A Expired - Lifetime JP4975639B2 (ja) 2004-11-29 2005-10-03 交換式の積み重ね可能なトレイを備える固体前駆体供給システム

Country Status (4)

Country Link
US (1) US7484315B2 (enExample)
JP (1) JP4975639B2 (enExample)
KR (1) KR101172931B1 (enExample)
WO (1) WO2006057710A1 (enExample)

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US10876205B2 (en) 2016-09-30 2020-12-29 Asm Ip Holding B.V. Reactant vaporizer and related systems and methods
JP6849368B2 (ja) * 2016-09-30 2021-03-24 芝浦メカトロニクス株式会社 基板処理装置
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US11166441B2 (en) * 2018-07-13 2021-11-09 Versum Materials Us, Llc Vapor delivery container with flow distributor
JP7376278B2 (ja) 2018-08-16 2023-11-08 エーエスエム・アイピー・ホールディング・ベー・フェー 固体原料昇華器
CN110885970B (zh) * 2018-09-11 2024-06-21 北京北方华创微电子装备有限公司 固体前驱体蒸汽的稳压和纯化装置以及ald沉积设备
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JP6901153B2 (ja) * 2019-02-07 2021-07-14 株式会社高純度化学研究所 薄膜形成用金属ハロゲン化合物の固体気化供給システム。
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