JP2019214789A5 - - Google Patents
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- Publication number
- JP2019214789A5 JP2019214789A5 JP2019126273A JP2019126273A JP2019214789A5 JP 2019214789 A5 JP2019214789 A5 JP 2019214789A5 JP 2019126273 A JP2019126273 A JP 2019126273A JP 2019126273 A JP2019126273 A JP 2019126273A JP 2019214789 A5 JP2019214789 A5 JP 2019214789A5
- Authority
- JP
- Japan
- Prior art keywords
- metal
- lid
- chemical precursor
- flow distributor
- precursor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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- 239000002184 metal Substances 0.000 claims 28
- 229910052751 metal Inorganic materials 0.000 claims 28
- 239000012707 chemical precursor Substances 0.000 claims 15
- 239000012530 fluid Substances 0.000 claims 5
- 125000000217 alkyl group Chemical group 0.000 claims 4
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- 239000002243 precursor Substances 0.000 claims 3
- 229910052684 Cerium Inorganic materials 0.000 claims 2
- 229910052691 Erbium Inorganic materials 0.000 claims 2
- 229910052772 Samarium Inorganic materials 0.000 claims 2
- 229910052771 Terbium Inorganic materials 0.000 claims 2
- 229910052769 Ytterbium Inorganic materials 0.000 claims 2
- 150000004703 alkoxides Chemical class 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- 229910052787 antimony Inorganic materials 0.000 claims 2
- 229910052788 barium Inorganic materials 0.000 claims 2
- 229910052797 bismuth Inorganic materials 0.000 claims 2
- 229910052791 calcium Inorganic materials 0.000 claims 2
- 239000012159 carrier gas Substances 0.000 claims 2
- 229910052804 chromium Inorganic materials 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- 125000000058 cyclopentadienyl group Chemical group C1(=CC=CC1)* 0.000 claims 2
- -1 cyclopentadienylcarbonyl Chemical group 0.000 claims 2
- ZSWFCLXCOIISFI-UHFFFAOYSA-N endo-cyclopentadiene Natural products C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 claims 2
- 229910052735 hafnium Inorganic materials 0.000 claims 2
- 125000002883 imidazolyl group Chemical group 0.000 claims 2
- 229910052741 iridium Inorganic materials 0.000 claims 2
- 229910052742 iron Inorganic materials 0.000 claims 2
- 229910052746 lanthanum Inorganic materials 0.000 claims 2
- 229910052745 lead Inorganic materials 0.000 claims 2
- 229910052749 magnesium Inorganic materials 0.000 claims 2
- 229910001507 metal halide Inorganic materials 0.000 claims 2
- 150000005309 metal halides Chemical class 0.000 claims 2
- 229910052750 molybdenum Inorganic materials 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 2
- 125000000168 pyrrolyl group Chemical group 0.000 claims 2
- 229910052703 rhodium Inorganic materials 0.000 claims 2
- 229910052707 ruthenium Inorganic materials 0.000 claims 2
- 229910052712 strontium Inorganic materials 0.000 claims 2
- 238000000859 sublimation Methods 0.000 claims 2
- 230000008022 sublimation Effects 0.000 claims 2
- 229910052715 tantalum Inorganic materials 0.000 claims 2
- 229910052714 tellurium Inorganic materials 0.000 claims 2
- 229910052718 tin Inorganic materials 0.000 claims 2
- 229910052721 tungsten Inorganic materials 0.000 claims 2
- 229910052727 yttrium Inorganic materials 0.000 claims 2
- 229910052726 zirconium Inorganic materials 0.000 claims 2
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662335396P | 2016-05-12 | 2016-05-12 | |
| US62/335,396 | 2016-05-12 | ||
| US15/587,095 | 2017-05-04 | ||
| US15/587,095 US10480070B2 (en) | 2016-05-12 | 2017-05-04 | Delivery container with flow distributor |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017095354A Division JP6787838B2 (ja) | 2016-05-12 | 2017-05-12 | 流れ分配器を備える輸送容器、そのような容器を含むシステム、及びそのような容器を使用する方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2019214789A JP2019214789A (ja) | 2019-12-19 |
| JP2019214789A5 true JP2019214789A5 (enExample) | 2020-06-25 |
Family
ID=58707411
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017095354A Active JP6787838B2 (ja) | 2016-05-12 | 2017-05-12 | 流れ分配器を備える輸送容器、そのような容器を含むシステム、及びそのような容器を使用する方法 |
| JP2019126273A Withdrawn JP2019214789A (ja) | 2016-05-12 | 2019-07-05 | 流れ分配器を備える輸送容器 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017095354A Active JP6787838B2 (ja) | 2016-05-12 | 2017-05-12 | 流れ分配器を備える輸送容器、そのような容器を含むシステム、及びそのような容器を使用する方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10480070B2 (enExample) |
| EP (1) | EP3243927A1 (enExample) |
| JP (2) | JP6787838B2 (enExample) |
| KR (1) | KR102016666B1 (enExample) |
| CN (2) | CN107365975B (enExample) |
| SG (1) | SG10201703929WA (enExample) |
| TW (1) | TWI675702B (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3162914A1 (en) * | 2015-11-02 | 2017-05-03 | IMEC vzw | Apparatus and method for delivering a gaseous precursor to a reaction chamber |
| US10480070B2 (en) * | 2016-05-12 | 2019-11-19 | Versum Materials Us, Llc | Delivery container with flow distributor |
| KR20190112212A (ko) | 2017-03-03 | 2019-10-02 | 어플라이드 머티어리얼스, 인코포레이티드 | 앰풀로부터의 플럭스를 증가시키기 위한 장치 |
| DE102017223600A1 (de) * | 2017-12-21 | 2019-06-27 | Siemens Aktiengesellschaft | Verfahren und Vorrichtung zum Reinigen eines eine Materialschädigung aufweisenden Substrats |
| US10731249B2 (en) * | 2018-02-15 | 2020-08-04 | Asm Ip Holding B.V. | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
| US11440929B2 (en) | 2018-06-19 | 2022-09-13 | Versum Materials Us, Llc | Bis(diazadiene)cobalt compounds, method of making and method of use thereof |
| US11166441B2 (en) * | 2018-07-13 | 2021-11-09 | Versum Materials Us, Llc | Vapor delivery container with flow distributor |
| KR102707825B1 (ko) * | 2019-04-23 | 2024-09-24 | 삼성전자주식회사 | 코발트 전구체, 이를 이용한 코발트 함유막의 제조 방법 및 이를 이용한 반도체 소자의 제조 방법 |
| US11718912B2 (en) * | 2019-07-30 | 2023-08-08 | Applied Materials, Inc. | Methods and apparatus for calibrating concentration sensors for precursor delivery |
| WO2021183346A1 (en) * | 2020-03-09 | 2021-09-16 | Versum Materials Us, Llc | Limited volume coaxial valve block |
| WO2023059628A1 (en) * | 2021-10-05 | 2023-04-13 | Entegris, Inc. | Precursor delivery systems for determining material levels |
| CN120882900A (zh) * | 2023-03-10 | 2025-10-31 | 朗姆研究公司 | 流经式蒸气安瓿 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0819514B2 (ja) | 1986-07-07 | 1996-02-28 | 株式会社豊田中央研究所 | 表面処理方法およびその装置 |
| DE3708967A1 (de) * | 1987-03-19 | 1988-10-06 | Merck Patent Gmbh | Vorrichtung zur erzeugung eines gasgemisches nach dem saettigungsverfahren |
| ES2087933T3 (es) * | 1990-08-10 | 1996-08-01 | Toyoda Chuo Kenkyusho Kk | Metodo para la formacion de una capa de nitruro o carbonitruro. |
| US5078922A (en) * | 1990-10-22 | 1992-01-07 | Watkins-Johnson Company | Liquid source bubbler |
| JP2000252269A (ja) * | 1992-09-21 | 2000-09-14 | Mitsubishi Electric Corp | 液体気化装置及び液体気化方法 |
| US6033479A (en) * | 1998-04-22 | 2000-03-07 | Applied Materials, Inc. | Process gas delivery system for CVD having a cleaning subsystem |
| JP3909792B2 (ja) | 1999-08-20 | 2007-04-25 | パイオニア株式会社 | 化学気相成長法における原料供給装置及び原料供給方法 |
| GB9929279D0 (en) * | 1999-12-11 | 2000-02-02 | Epichem Ltd | An improved method of and apparatus for the delivery of precursors in the vapour phase to a plurality of epitaxial reactor sites |
| US6561498B2 (en) * | 2001-04-09 | 2003-05-13 | Lorex Industries, Inc. | Bubbler for use in vapor generation systems |
| JP3513505B2 (ja) * | 2001-12-26 | 2004-03-31 | 三菱重工業株式会社 | プラズマｃｖｄ装置、光電変換素子および光電変換素子の製造方法 |
| KR20040000689A (ko) * | 2002-06-25 | 2004-01-07 | 삼성전자주식회사 | 화학기상 증착공정의 원료물질 공급장치 |
| US20060185597A1 (en) | 2004-11-29 | 2006-08-24 | Kenji Suzuki | Film precursor evaporation system and method of using |
| GB2432371B (en) * | 2005-11-17 | 2011-06-15 | Epichem Ltd | Improved bubbler for the transportation of substances by a carrier gas |
| US7967911B2 (en) * | 2006-04-11 | 2011-06-28 | Applied Materials, Inc. | Apparatus and methods for chemical vapor deposition |
| US20090084317A1 (en) | 2007-09-28 | 2009-04-02 | Applied Materials, Inc. | Atomic layer deposition chamber and components |
| CN102365388A (zh) * | 2009-04-21 | 2012-02-29 | 株式会社堀场Stec | 液体原料气化装置 |
| JP5898624B2 (ja) | 2009-11-02 | 2016-04-06 | シグマ−アルドリッチ・カンパニー、エルエルシー | 蒸発器 |
| JP5728772B2 (ja) | 2011-05-31 | 2015-06-03 | 株式会社ブイ・テクノロジー | 原料ガス発生装置 |
| US9598766B2 (en) | 2012-05-27 | 2017-03-21 | Air Products And Chemicals, Inc. | Vessel with filter |
| US9957612B2 (en) * | 2014-01-17 | 2018-05-01 | Ceres Technologies, Inc. | Delivery device, methods of manufacture thereof and articles comprising the same |
| US9964332B2 (en) * | 2014-03-27 | 2018-05-08 | Lam Research Corporation | Systems and methods for bulk vaporization of precursor |
| US10741365B2 (en) * | 2014-05-05 | 2020-08-11 | Lam Research Corporation | Low volume showerhead with porous baffle |
| US9633838B2 (en) | 2015-12-28 | 2017-04-25 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Vapor deposition of silicon-containing films using penta-substituted disilanes |
| US10480070B2 (en) * | 2016-05-12 | 2019-11-19 | Versum Materials Us, Llc | Delivery container with flow distributor |
-
2017
- 2017-05-04 US US15/587,095 patent/US10480070B2/en active Active
- 2017-05-09 TW TW106115374A patent/TWI675702B/zh active
- 2017-05-11 KR KR1020170058670A patent/KR102016666B1/ko active Active
- 2017-05-12 JP JP2017095354A patent/JP6787838B2/ja active Active
- 2017-05-12 CN CN201710335600.7A patent/CN107365975B/zh active Active
- 2017-05-12 SG SG10201703929WA patent/SG10201703929WA/en unknown
- 2017-05-12 EP EP17170882.9A patent/EP3243927A1/en active Pending
- 2017-05-12 CN CN201720528774.0U patent/CN207659522U/zh not_active Withdrawn - After Issue
-
2019
- 2019-07-05 JP JP2019126273A patent/JP2019214789A/ja not_active Withdrawn
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