JP2008303116A - 単結晶の製造方法 - Google Patents
単結晶の製造方法 Download PDFInfo
- Publication number
- JP2008303116A JP2008303116A JP2007152825A JP2007152825A JP2008303116A JP 2008303116 A JP2008303116 A JP 2008303116A JP 2007152825 A JP2007152825 A JP 2007152825A JP 2007152825 A JP2007152825 A JP 2007152825A JP 2008303116 A JP2008303116 A JP 2008303116A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- single crystal
- silicon
- crystal
- silicon melt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
- C30B15/305—Stirring of the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
【解決手段】結晶駆動部を作動させて種結晶をシリコン融液3に浸し、結晶駆動部及び坩堝駆動部を所定の条件で制御して、種結晶を引上げる引上げ工程を行う。この引上げ工程において、水平磁場装置を駆動して、坩堝4内のシリコン融液3内に水平方向の磁場を印加する。水平磁場装置は、印加される磁場の磁場中心線Iを、シリコン融液3の液面3aから一定の位置に固定する。即ち、水平磁場位置調整装置により予め水平磁場装置の上下方向の位置調整を行い、印加される磁場の磁場中心線Iを、シリコン融液3の液面3aから、50mmより下方であって、テールイン時の残留シリコン融液3の液面3aからの深さL以下の一定の距離の位置に固定する。
【選択図】図2
Description
2 結晶取出しチャンバ
3,43,53,63 シリコン融液
3a,44,54,64 液面
3b,46,56,66 最底部
4,41,51,61 坩堝
5 石英坩堝
6 黒鉛坩堝
7,42,52,62 Arガス整流板
8 加熱ヒータ
9 断熱材
10 Arガス導入口
11 Arガス排出口
12 直径制御用カメラ
13 ワイヤ
14 結晶駆動部
15 坩堝駆動部
16 水平磁場装置
17,18 コイル
19 水平磁場位置調整装置
20,47,57,67 シリコン単結晶
21 直胴部
22 ネック部
23 増径部
30 種結晶
45,55,65 磁場中心位置
100 単結晶製造装置
Claims (2)
- チョクラルスキー法において坩堝内に収容された原料融液に水平磁場を印加しつつ、前記原料融液から単結晶を製造する単結晶の製造方法において、
前記水平磁場の磁場中心を、前記収容された原料融液の液面から下方に、50mmより大きく、且つ製造される単結晶の直胴部の引上げ完了時において前記坩堝内に残留する前記原料融液の前記液面からの深さL以下の距離の位置に配置することを特徴とする単結晶の製造方法。 - 前記磁場中心を前記液面から下方に50mm〜90mmの間の位置に配置することを特徴とする請求項1記載の単結晶の製造方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007152825A JP4829176B2 (ja) | 2007-06-08 | 2007-06-08 | 単結晶の製造方法 |
KR1020080046079A KR101033250B1 (ko) | 2007-06-08 | 2008-05-19 | 단결정 제조 방법 |
EP08009718A EP2031100B1 (en) | 2007-06-08 | 2008-05-28 | Manufacturing method of single crystal |
US12/129,719 US8172943B2 (en) | 2007-06-08 | 2008-05-30 | Single Crystal manufacturing method |
SG200804209-5A SG148935A1 (en) | 2007-06-08 | 2008-06-03 | Manufacturing method of single crystal |
CN2008101082766A CN101319350B (zh) | 2007-06-08 | 2008-06-05 | 单晶的制造方法 |
TW097121228A TWI402384B (zh) | 2007-06-08 | 2008-06-06 | 製造單晶的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007152825A JP4829176B2 (ja) | 2007-06-08 | 2007-06-08 | 単結晶の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008303116A true JP2008303116A (ja) | 2008-12-18 |
JP4829176B2 JP4829176B2 (ja) | 2011-12-07 |
Family
ID=39870400
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007152825A Active JP4829176B2 (ja) | 2007-06-08 | 2007-06-08 | 単結晶の製造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8172943B2 (ja) |
EP (1) | EP2031100B1 (ja) |
JP (1) | JP4829176B2 (ja) |
KR (1) | KR101033250B1 (ja) |
CN (1) | CN101319350B (ja) |
SG (1) | SG148935A1 (ja) |
TW (1) | TWI402384B (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090038537A1 (en) * | 2007-08-07 | 2009-02-12 | Covalent Materials Corporation | Method of pulling up silicon single crystal |
JP5229017B2 (ja) * | 2009-03-11 | 2013-07-03 | 信越半導体株式会社 | 単結晶の製造方法 |
EP2270264B1 (en) | 2009-05-13 | 2011-12-28 | Siltronic AG | A method and an apparatus for growing a silicon single crystal from melt |
CN102220633B (zh) * | 2011-07-15 | 2012-11-07 | 西安华晶电子技术股份有限公司 | 一种半导体级单晶硅生产工艺 |
JP6206178B2 (ja) * | 2013-12-27 | 2017-10-04 | 株式会社Sumco | 単結晶の引上げ方法 |
JP2015205793A (ja) * | 2014-04-21 | 2015-11-19 | グローバルウェーハズ・ジャパン株式会社 | 単結晶引き上げ方法 |
JP2016064958A (ja) * | 2014-09-25 | 2016-04-28 | トヨタ自動車株式会社 | SiC単結晶の製造方法 |
JP6471492B2 (ja) * | 2014-12-24 | 2019-02-20 | 株式会社Sumco | 単結晶の製造方法 |
KR101674822B1 (ko) | 2015-08-19 | 2016-11-09 | 주식회사 엘지실트론 | 단결정 잉곳 성장장치 및 그 성장방법 |
KR101942320B1 (ko) * | 2017-08-10 | 2019-04-08 | 에스케이실트론 주식회사 | 단결정 잉곳 성장 장치 및 이를 이용한 단결정 잉곳의 성장 방법 |
JP6888568B2 (ja) | 2018-02-28 | 2021-06-16 | 株式会社Sumco | シリコン単結晶の製造方法 |
DE102018217509A1 (de) | 2018-10-12 | 2020-04-16 | Siltronic Ag | Vorrichtung zum Ziehen eines Einkristalls aus Halbleitermaterial nach der CZ-Methode aus einer Schmelze und Verfahren unter Verwendung der Vorrichtung |
CN109537046A (zh) * | 2018-11-30 | 2019-03-29 | 邢台晶龙新能源有限责任公司 | 一种大热场单晶炉 |
CN110923810A (zh) * | 2019-12-11 | 2020-03-27 | 包头美科硅能源有限公司 | 大尺寸单晶硅等径生长过程中调控液面位置的装置及工艺 |
CN111826707A (zh) * | 2020-07-27 | 2020-10-27 | 邢台晶龙新能源有限责任公司 | 单晶炉停炉预防热场损坏方法 |
CN114993151A (zh) * | 2022-05-18 | 2022-09-02 | 西安奕斯伟材料科技有限公司 | 测量装置和测量方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08333191A (ja) * | 1995-06-01 | 1996-12-17 | Shin Etsu Handotai Co Ltd | 単結晶の製造方法及び装置 |
JP2004189557A (ja) * | 2002-12-12 | 2004-07-08 | Sumitomo Mitsubishi Silicon Corp | 単結晶成長方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0431386A (ja) * | 1990-05-25 | 1992-02-03 | Shin Etsu Handotai Co Ltd | 半導体単結晶引上方法 |
JP2546736B2 (ja) * | 1990-06-21 | 1996-10-23 | 信越半導体株式会社 | シリコン単結晶引上方法 |
JPH08231294A (ja) | 1995-02-24 | 1996-09-10 | Toshiba Ceramics Co Ltd | 水平磁界下シリコン単結晶引上方法 |
JP3520883B2 (ja) * | 1995-12-29 | 2004-04-19 | 信越半導体株式会社 | 単結晶の製造方法 |
JPH11268987A (ja) * | 1998-03-20 | 1999-10-05 | Shin Etsu Handotai Co Ltd | シリコン単結晶およびその製造方法 |
KR100786878B1 (ko) * | 2000-01-31 | 2007-12-20 | 신에쯔 한도타이 가부시키가이샤 | 단결정 육성장치, 그 장치를 이용한 단결정 제조방법 및단결정 |
WO2002010485A1 (fr) * | 2000-07-28 | 2002-02-07 | Shin-Etsu Handotai Co.,Ltd. | Procede et dispositif pour fabriquer un monocristal de semiconducteur |
JP3598972B2 (ja) * | 2000-12-20 | 2004-12-08 | 三菱住友シリコン株式会社 | シリコン単結晶の製造方法 |
JP4055362B2 (ja) * | 2000-12-28 | 2008-03-05 | 信越半導体株式会社 | 単結晶育成方法および単結晶育成装置 |
JP4951186B2 (ja) | 2002-12-05 | 2012-06-13 | 株式会社Sumco | 単結晶成長方法 |
JP4153293B2 (ja) | 2002-12-17 | 2008-09-24 | コバレントマテリアル株式会社 | シリコン単結晶引上方法 |
JP4501507B2 (ja) | 2004-04-06 | 2010-07-14 | 株式会社Sumco | シリコン単結晶育成方法 |
JP4483729B2 (ja) * | 2005-07-25 | 2010-06-16 | 株式会社Sumco | シリコン単結晶製造方法 |
KR100840751B1 (ko) * | 2005-07-26 | 2008-06-24 | 주식회사 실트론 | 고품질 실리콘 단결정 잉곳 제조 방법, 성장 장치 및그로부터 제조된 잉곳 , 웨이퍼 |
JP4631717B2 (ja) * | 2006-01-19 | 2011-02-16 | 株式会社Sumco | Igbt用シリコン単結晶ウェーハ及びigbt用シリコン単結晶ウェーハの製造方法 |
JP4919343B2 (ja) * | 2007-02-06 | 2012-04-18 | コバレントマテリアル株式会社 | 単結晶引上装置 |
KR100954291B1 (ko) * | 2008-01-21 | 2010-04-26 | 주식회사 실트론 | 고품질의 반도체 단결정 잉곳 제조장치 및 방법 |
-
2007
- 2007-06-08 JP JP2007152825A patent/JP4829176B2/ja active Active
-
2008
- 2008-05-19 KR KR1020080046079A patent/KR101033250B1/ko active IP Right Grant
- 2008-05-28 EP EP08009718A patent/EP2031100B1/en active Active
- 2008-05-30 US US12/129,719 patent/US8172943B2/en active Active
- 2008-06-03 SG SG200804209-5A patent/SG148935A1/en unknown
- 2008-06-05 CN CN2008101082766A patent/CN101319350B/zh active Active
- 2008-06-06 TW TW097121228A patent/TWI402384B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08333191A (ja) * | 1995-06-01 | 1996-12-17 | Shin Etsu Handotai Co Ltd | 単結晶の製造方法及び装置 |
JP2004189557A (ja) * | 2002-12-12 | 2004-07-08 | Sumitomo Mitsubishi Silicon Corp | 単結晶成長方法 |
Also Published As
Publication number | Publication date |
---|---|
SG148935A1 (en) | 2009-01-29 |
US20080302294A1 (en) | 2008-12-11 |
US8172943B2 (en) | 2012-05-08 |
TW200848555A (en) | 2008-12-16 |
KR20080108000A (ko) | 2008-12-11 |
CN101319350A (zh) | 2008-12-10 |
KR101033250B1 (ko) | 2011-05-06 |
EP2031100B1 (en) | 2011-10-26 |
JP4829176B2 (ja) | 2011-12-07 |
EP2031100A1 (en) | 2009-03-04 |
TWI402384B (zh) | 2013-07-21 |
CN101319350B (zh) | 2011-08-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4829176B2 (ja) | 単結晶の製造方法 | |
KR101997600B1 (ko) | 원료 충전방법, 단결정의 제조방법 및 단결정 제조장치 | |
JP2009114054A (ja) | 酸素濃度特性が改善した半導体単結晶の製造方法 | |
JP2010018446A (ja) | 単結晶の製造方法及び単結晶引上装置 | |
US20140326173A1 (en) | Method for manufacturing single-crystal silicon | |
JP5051033B2 (ja) | シリコン単結晶の製造方法 | |
JP2009091237A (ja) | 極低欠陥半導体単結晶製造方法及びその製造装置 | |
JP2009292662A (ja) | シリコン単結晶育成における肩形成方法 | |
JP6485286B2 (ja) | シリコン単結晶の製造方法 | |
JP2007254200A (ja) | 単結晶の製造方法 | |
JP4640796B2 (ja) | シリコン単結晶の製造方法 | |
CN111742086B (zh) | 原料供给方法及单晶硅的制造方法 | |
JP4907568B2 (ja) | 単結晶引上装置及び単結晶の製造方法 | |
JP2007204305A (ja) | 単結晶引上装置 | |
US9051661B2 (en) | Silicon single crystal production method | |
JP2009274921A (ja) | シリコン単結晶の製造方法 | |
KR100946558B1 (ko) | 커스프 자기장을 이용한 반도체 단결정 제조장치 및 방법 | |
JP2008019128A (ja) | 単結晶製造装置、単結晶製造方法および単結晶 | |
WO2022254885A1 (ja) | シリコン単結晶の製造方法 | |
JP2021098622A (ja) | 単結晶シリコンインゴットの製造方法 | |
JP2022101008A (ja) | 単結晶シリコンインゴットの製造方法 | |
JPH07300389A (ja) | 半導体単結晶製造方法 | |
JPH11106292A (ja) | 半導体単結晶の製造方法 | |
JP2010018494A (ja) | シリコン単結晶の育成方法 | |
JP2009249214A (ja) | 化合物半導体単結晶の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100310 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20101227 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20101228 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110613 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110616 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110729 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110909 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110915 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140922 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4829176 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140922 Year of fee payment: 3 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: R3D02 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140922 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140922 Year of fee payment: 3 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |