JP2008274437A5 - - Google Patents

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Publication number
JP2008274437A5
JP2008274437A5 JP2008120346A JP2008120346A JP2008274437A5 JP 2008274437 A5 JP2008274437 A5 JP 2008274437A5 JP 2008120346 A JP2008120346 A JP 2008120346A JP 2008120346 A JP2008120346 A JP 2008120346A JP 2008274437 A5 JP2008274437 A5 JP 2008274437A5
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JP
Japan
Prior art keywords
electrode
chamber
susceptor
showerhead
electrical
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JP2008120346A
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English (en)
Japanese (ja)
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JP5427367B2 (ja
JP2008274437A (ja
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Priority claimed from US11/775,359 external-priority patent/US7972470B2/en
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JP2008120346A 2007-05-03 2008-05-02 矩形サセプタの非対称な接地 Active JP5427367B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US91583307P 2007-05-03 2007-05-03
US60/915,833 2007-05-03
US11/775,359 2007-07-10
US11/775,359 US7972470B2 (en) 2007-05-03 2007-07-10 Asymmetric grounding of rectangular susceptor

Publications (3)

Publication Number Publication Date
JP2008274437A JP2008274437A (ja) 2008-11-13
JP2008274437A5 true JP2008274437A5 (https=) 2011-02-17
JP5427367B2 JP5427367B2 (ja) 2014-02-26

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JP2008120346A Active JP5427367B2 (ja) 2007-05-03 2008-05-02 矩形サセプタの非対称な接地

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US (2) US7972470B2 (https=)
JP (1) JP5427367B2 (https=)
KR (2) KR101011407B1 (https=)
CN (2) CN101298670B (https=)
TW (2) TWI377638B (https=)

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