JP2008114342A - 基板加工機のワークローダ - Google Patents

基板加工機のワークローダ Download PDF

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Publication number
JP2008114342A
JP2008114342A JP2006300586A JP2006300586A JP2008114342A JP 2008114342 A JP2008114342 A JP 2008114342A JP 2006300586 A JP2006300586 A JP 2006300586A JP 2006300586 A JP2006300586 A JP 2006300586A JP 2008114342 A JP2008114342 A JP 2008114342A
Authority
JP
Japan
Prior art keywords
substrate
processing
rotary table
finger
stocker
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006300586A
Other languages
English (en)
Japanese (ja)
Inventor
Katsuhiko Tatsuta
勝彦 辰田
Hajime Saida
一 斉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nakamura Tome Precision Industry Co Ltd
Original Assignee
Nakamura Tome Precision Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nakamura Tome Precision Industry Co Ltd filed Critical Nakamura Tome Precision Industry Co Ltd
Priority to JP2006300586A priority Critical patent/JP2008114342A/ja
Priority to CNB2007100894517A priority patent/CN100522469C/zh
Priority to TW096111726A priority patent/TW200822109A/zh
Priority to KR1020070041220A priority patent/KR100951494B1/ko
Publication of JP2008114342A publication Critical patent/JP2008114342A/ja
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0069—Other grinding machines or devices with means for feeding the work-pieces to the grinding tool, e.g. turntables, transfer means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/04—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
    • B23Q7/043—Construction of the grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/04—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
    • B23Q7/046—Handling workpieces or tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B24B27/0641—Grinders for cutting-off for grinding holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2707/00—Automatic supply or removal of metal workpieces
    • B23Q2707/02—Drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2707/00—Automatic supply or removal of metal workpieces
    • B23Q2707/04—Automatic supply or removal of metal workpieces by means of grippers also magnetic or pneumatic gripping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Feeding Of Workpieces (AREA)
JP2006300586A 2006-11-06 2006-11-06 基板加工機のワークローダ Pending JP2008114342A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006300586A JP2008114342A (ja) 2006-11-06 2006-11-06 基板加工機のワークローダ
CNB2007100894517A CN100522469C (zh) 2006-11-06 2007-03-23 基板加工机的工件装卸器
TW096111726A TW200822109A (en) 2006-11-06 2007-04-03 Work loader of substrate working machine
KR1020070041220A KR100951494B1 (ko) 2006-11-06 2007-04-27 기판 가공기의 워크 로더

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006300586A JP2008114342A (ja) 2006-11-06 2006-11-06 基板加工機のワークローダ

Publications (1)

Publication Number Publication Date
JP2008114342A true JP2008114342A (ja) 2008-05-22

Family

ID=39403479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006300586A Pending JP2008114342A (ja) 2006-11-06 2006-11-06 基板加工機のワークローダ

Country Status (4)

Country Link
JP (1) JP2008114342A (enrdf_load_stackoverflow)
KR (1) KR100951494B1 (enrdf_load_stackoverflow)
CN (1) CN100522469C (enrdf_load_stackoverflow)
TW (1) TW200822109A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101037063B1 (ko) * 2008-12-30 2011-05-26 에이펫(주) 기판처리장치
JP5759779B2 (ja) * 2011-05-06 2015-08-05 中村留精密工業株式会社 板材の加工装置
JP6183301B2 (ja) * 2014-06-16 2017-08-23 信越半導体株式会社 自動ハンドリング装置
CN108454119B (zh) * 2017-03-31 2019-11-22 苏州亚思科精密数控有限公司 一种旋铆机盘式自动上卸料及定位装置的操作方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53140695A (en) * 1977-05-13 1978-12-07 Masaharu Nishihara Ontinuous injection needle grinding machine
JPS63117921A (ja) * 1986-06-10 1988-05-21 Disco Abrasive Syst Ltd 切断機
JPH05309535A (ja) * 1992-05-07 1993-11-22 Toshimasu Eguchi 工作機械
JP2003320296A (ja) * 2002-04-25 2003-11-11 Kasai Kogyo Co Ltd ロータリー式治具テーブル装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0839386A (ja) * 1994-07-30 1996-02-13 Murata Mach Ltd ローダ
JP3647757B2 (ja) * 2001-02-16 2005-05-18 オリジン電気株式会社 光ディスク製造装置及び製造方法
JP4705765B2 (ja) 2004-07-21 2011-06-22 中村留精密工業株式会社 円板ワークのローダハンド

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53140695A (en) * 1977-05-13 1978-12-07 Masaharu Nishihara Ontinuous injection needle grinding machine
JPS63117921A (ja) * 1986-06-10 1988-05-21 Disco Abrasive Syst Ltd 切断機
JPH05309535A (ja) * 1992-05-07 1993-11-22 Toshimasu Eguchi 工作機械
JP2003320296A (ja) * 2002-04-25 2003-11-11 Kasai Kogyo Co Ltd ロータリー式治具テーブル装置

Also Published As

Publication number Publication date
KR20080041094A (ko) 2008-05-09
TWI352993B (enrdf_load_stackoverflow) 2011-11-21
CN100522469C (zh) 2009-08-05
KR100951494B1 (ko) 2010-04-07
TW200822109A (en) 2008-05-16
CN101176976A (zh) 2008-05-14

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