KR100951494B1 - 기판 가공기의 워크 로더 - Google Patents

기판 가공기의 워크 로더 Download PDF

Info

Publication number
KR100951494B1
KR100951494B1 KR1020070041220A KR20070041220A KR100951494B1 KR 100951494 B1 KR100951494 B1 KR 100951494B1 KR 1020070041220 A KR1020070041220 A KR 1020070041220A KR 20070041220 A KR20070041220 A KR 20070041220A KR 100951494 B1 KR100951494 B1 KR 100951494B1
Authority
KR
South Korea
Prior art keywords
substrate
processing
finger
stocker
rotary table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020070041220A
Other languages
English (en)
Korean (ko)
Other versions
KR20080041094A (ko
Inventor
가쓰히코 다쓰다
하지메 사이다
Original Assignee
나카무라 토메 세이미쓰고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 나카무라 토메 세이미쓰고교 가부시키가이샤 filed Critical 나카무라 토메 세이미쓰고교 가부시키가이샤
Publication of KR20080041094A publication Critical patent/KR20080041094A/ko
Application granted granted Critical
Publication of KR100951494B1 publication Critical patent/KR100951494B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0069—Other grinding machines or devices with means for feeding the work-pieces to the grinding tool, e.g. turntables, transfer means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/04—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
    • B23Q7/043—Construction of the grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/04—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
    • B23Q7/046—Handling workpieces or tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B24B27/0641—Grinders for cutting-off for grinding holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2707/00—Automatic supply or removal of metal workpieces
    • B23Q2707/02—Drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2707/00—Automatic supply or removal of metal workpieces
    • B23Q2707/04—Automatic supply or removal of metal workpieces by means of grippers also magnetic or pneumatic gripping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Feeding Of Workpieces (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
KR1020070041220A 2006-11-06 2007-04-27 기판 가공기의 워크 로더 Expired - Fee Related KR100951494B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006300586A JP2008114342A (ja) 2006-11-06 2006-11-06 基板加工機のワークローダ
JPJP-P-2006-00300586 2006-11-06

Publications (2)

Publication Number Publication Date
KR20080041094A KR20080041094A (ko) 2008-05-09
KR100951494B1 true KR100951494B1 (ko) 2010-04-07

Family

ID=39403479

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070041220A Expired - Fee Related KR100951494B1 (ko) 2006-11-06 2007-04-27 기판 가공기의 워크 로더

Country Status (4)

Country Link
JP (1) JP2008114342A (enrdf_load_stackoverflow)
KR (1) KR100951494B1 (enrdf_load_stackoverflow)
CN (1) CN100522469C (enrdf_load_stackoverflow)
TW (1) TW200822109A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101037063B1 (ko) * 2008-12-30 2011-05-26 에이펫(주) 기판처리장치
JP5759779B2 (ja) * 2011-05-06 2015-08-05 中村留精密工業株式会社 板材の加工装置
JP6183301B2 (ja) * 2014-06-16 2017-08-23 信越半導体株式会社 自動ハンドリング装置
CN108454119B (zh) * 2017-03-31 2019-11-22 苏州亚思科精密数控有限公司 一种旋铆机盘式自动上卸料及定位装置的操作方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0839386A (ja) * 1994-07-30 1996-02-13 Murata Mach Ltd ローダ
KR20020089569A (ko) * 2001-02-16 2002-11-29 오리진 일렉트릭 캄파니 리미티드 광디스크 제조 장치 및 제조 방법
JP2006026874A (ja) 2004-07-21 2006-02-02 Nakamura Tome Precision Ind Co Ltd 円板ワークのローダハンド

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53140695A (en) * 1977-05-13 1978-12-07 Masaharu Nishihara Ontinuous injection needle grinding machine
JP2540041B2 (ja) * 1986-06-10 1996-10-02 株式会社 デイスコ 切断機
JPH0818205B2 (ja) * 1992-05-07 1996-02-28 敏益 江口 工作機械
JP2003320296A (ja) * 2002-04-25 2003-11-11 Kasai Kogyo Co Ltd ロータリー式治具テーブル装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0839386A (ja) * 1994-07-30 1996-02-13 Murata Mach Ltd ローダ
KR20020089569A (ko) * 2001-02-16 2002-11-29 오리진 일렉트릭 캄파니 리미티드 광디스크 제조 장치 및 제조 방법
JP2006026874A (ja) 2004-07-21 2006-02-02 Nakamura Tome Precision Ind Co Ltd 円板ワークのローダハンド

Also Published As

Publication number Publication date
TWI352993B (enrdf_load_stackoverflow) 2011-11-21
CN101176976A (zh) 2008-05-14
KR20080041094A (ko) 2008-05-09
JP2008114342A (ja) 2008-05-22
TW200822109A (en) 2008-05-16
CN100522469C (zh) 2009-08-05

Similar Documents

Publication Publication Date Title
KR102024386B1 (ko) 기판 유지 장치 및 기판 유지 방법
JP6335672B2 (ja) 搬送装置
JP4230642B2 (ja) 基板搬送治具及び基板搬送装置
JP4999487B2 (ja) 基板処理装置
KR101757932B1 (ko) 웨이퍼 반송 기구
JP5137747B2 (ja) ワーク保持機構
CN1765528B (zh) 旋转式清洗装置和切割装置
KR100951494B1 (ko) 기판 가공기의 워크 로더
KR20140032893A (ko) 박리 시스템
CN111300670B (zh) 切削装置
JP4916995B2 (ja) ウェーハの洗浄装置および研削装置
CN111341694A (zh) 晶片制造装置
JP5192999B2 (ja) イオン化エア供給プログラム
JP2002353169A (ja) ワーク搬送装置及びダイシング装置
JP2000260740A (ja) スピンナー洗浄装置
JP6037372B2 (ja) パッケージ基板分割装置
JP2000208445A (ja) 被加工物の分割加工方法
JP4476866B2 (ja) ウエーハの保持方法
JP2011066198A (ja) 研削加工装置
JP3222726U (ja) 切削装置
JP2013071230A (ja) 位置決め機構
JP5508114B2 (ja) 研削装置
JP2023019354A (ja) 洗浄装置
JP2021074787A (ja) 加工装置
JP5022714B2 (ja) 乾燥機

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E90F Notification of reason for final refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

E601 Decision to refuse application
E801 Decision on dismissal of amendment
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

PE0801 Dismissal of amendment

St.27 status event code: A-2-2-P10-P12-nap-PE0801

AMND Amendment
J201 Request for trial against refusal decision
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PJ0201 Trial against decision of rejection

St.27 status event code: A-3-3-V10-V11-apl-PJ0201

PB0901 Examination by re-examination before a trial

St.27 status event code: A-6-3-E10-E12-rex-PB0901

B701 Decision to grant
PB0701 Decision of registration after re-examination before a trial

St.27 status event code: A-3-4-F10-F13-rex-PB0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

FPAY Annual fee payment

Payment date: 20130220

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20160211

Year of fee payment: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20190331

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20190331