CN100522469C - 基板加工机的工件装卸器 - Google Patents

基板加工机的工件装卸器 Download PDF

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Publication number
CN100522469C
CN100522469C CNB2007100894517A CN200710089451A CN100522469C CN 100522469 C CN100522469 C CN 100522469C CN B2007100894517 A CNB2007100894517 A CN B2007100894517A CN 200710089451 A CN200710089451 A CN 200710089451A CN 100522469 C CN100522469 C CN 100522469C
Authority
CN
China
Prior art keywords
substrate
processing
rotation
rotary table
claw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2007100894517A
Other languages
English (en)
Chinese (zh)
Other versions
CN101176976A (zh
Inventor
辰田胜彦
齐田一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nakamura Tome Precision Industry Co Ltd
Original Assignee
Nakamura Tome Precision Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nakamura Tome Precision Industry Co Ltd filed Critical Nakamura Tome Precision Industry Co Ltd
Publication of CN101176976A publication Critical patent/CN101176976A/zh
Application granted granted Critical
Publication of CN100522469C publication Critical patent/CN100522469C/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0069—Other grinding machines or devices with means for feeding the work-pieces to the grinding tool, e.g. turntables, transfer means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/04—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
    • B23Q7/043—Construction of the grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/04—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
    • B23Q7/046—Handling workpieces or tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B24B27/0641—Grinders for cutting-off for grinding holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2707/00—Automatic supply or removal of metal workpieces
    • B23Q2707/02—Drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2707/00—Automatic supply or removal of metal workpieces
    • B23Q2707/04—Automatic supply or removal of metal workpieces by means of grippers also magnetic or pneumatic gripping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Feeding Of Workpieces (AREA)
CNB2007100894517A 2006-11-06 2007-03-23 基板加工机的工件装卸器 Expired - Fee Related CN100522469C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006300586 2006-11-06
JP2006300586A JP2008114342A (ja) 2006-11-06 2006-11-06 基板加工機のワークローダ

Publications (2)

Publication Number Publication Date
CN101176976A CN101176976A (zh) 2008-05-14
CN100522469C true CN100522469C (zh) 2009-08-05

Family

ID=39403479

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2007100894517A Expired - Fee Related CN100522469C (zh) 2006-11-06 2007-03-23 基板加工机的工件装卸器

Country Status (4)

Country Link
JP (1) JP2008114342A (enrdf_load_stackoverflow)
KR (1) KR100951494B1 (enrdf_load_stackoverflow)
CN (1) CN100522469C (enrdf_load_stackoverflow)
TW (1) TW200822109A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101037063B1 (ko) * 2008-12-30 2011-05-26 에이펫(주) 기판처리장치
JP5759779B2 (ja) * 2011-05-06 2015-08-05 中村留精密工業株式会社 板材の加工装置
JP6183301B2 (ja) * 2014-06-16 2017-08-23 信越半導体株式会社 自動ハンドリング装置
CN108454119B (zh) * 2017-03-31 2019-11-22 苏州亚思科精密数控有限公司 一种旋铆机盘式自动上卸料及定位装置的操作方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53140695A (en) * 1977-05-13 1978-12-07 Masaharu Nishihara Ontinuous injection needle grinding machine
JP2540041B2 (ja) * 1986-06-10 1996-10-02 株式会社 デイスコ 切断機
JPH0818205B2 (ja) * 1992-05-07 1996-02-28 敏益 江口 工作機械
JPH0839386A (ja) * 1994-07-30 1996-02-13 Murata Mach Ltd ローダ
JP3647757B2 (ja) * 2001-02-16 2005-05-18 オリジン電気株式会社 光ディスク製造装置及び製造方法
JP2003320296A (ja) * 2002-04-25 2003-11-11 Kasai Kogyo Co Ltd ロータリー式治具テーブル装置
JP4705765B2 (ja) 2004-07-21 2011-06-22 中村留精密工業株式会社 円板ワークのローダハンド

Also Published As

Publication number Publication date
TW200822109A (en) 2008-05-16
KR100951494B1 (ko) 2010-04-07
CN101176976A (zh) 2008-05-14
JP2008114342A (ja) 2008-05-22
TWI352993B (enrdf_load_stackoverflow) 2011-11-21
KR20080041094A (ko) 2008-05-09

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20090805

Termination date: 20190323