TWI352993B - - Google Patents

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Publication number
TWI352993B
TWI352993B TW096111726A TW96111726A TWI352993B TW I352993 B TWI352993 B TW I352993B TW 096111726 A TW096111726 A TW 096111726A TW 96111726 A TW96111726 A TW 96111726A TW I352993 B TWI352993 B TW I352993B
Authority
TW
Taiwan
Prior art keywords
substrate
processing
robot
claw portion
holding
Prior art date
Application number
TW096111726A
Other languages
English (en)
Chinese (zh)
Other versions
TW200822109A (en
Original Assignee
Nakamura Tome Precision Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nakamura Tome Precision Ind filed Critical Nakamura Tome Precision Ind
Publication of TW200822109A publication Critical patent/TW200822109A/zh
Application granted granted Critical
Publication of TWI352993B publication Critical patent/TWI352993B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0069—Other grinding machines or devices with means for feeding the work-pieces to the grinding tool, e.g. turntables, transfer means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/04—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
    • B23Q7/043—Construction of the grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/04—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
    • B23Q7/046—Handling workpieces or tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B24B27/0641—Grinders for cutting-off for grinding holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2707/00—Automatic supply or removal of metal workpieces
    • B23Q2707/02—Drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2707/00—Automatic supply or removal of metal workpieces
    • B23Q2707/04—Automatic supply or removal of metal workpieces by means of grippers also magnetic or pneumatic gripping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Feeding Of Workpieces (AREA)
TW096111726A 2006-11-06 2007-04-03 Work loader of substrate working machine TW200822109A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006300586A JP2008114342A (ja) 2006-11-06 2006-11-06 基板加工機のワークローダ

Publications (2)

Publication Number Publication Date
TW200822109A TW200822109A (en) 2008-05-16
TWI352993B true TWI352993B (enrdf_load_stackoverflow) 2011-11-21

Family

ID=39403479

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096111726A TW200822109A (en) 2006-11-06 2007-04-03 Work loader of substrate working machine

Country Status (4)

Country Link
JP (1) JP2008114342A (enrdf_load_stackoverflow)
KR (1) KR100951494B1 (enrdf_load_stackoverflow)
CN (1) CN100522469C (enrdf_load_stackoverflow)
TW (1) TW200822109A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101037063B1 (ko) * 2008-12-30 2011-05-26 에이펫(주) 기판처리장치
JP5759779B2 (ja) * 2011-05-06 2015-08-05 中村留精密工業株式会社 板材の加工装置
JP6183301B2 (ja) * 2014-06-16 2017-08-23 信越半導体株式会社 自動ハンドリング装置
CN108454119B (zh) * 2017-03-31 2019-11-22 苏州亚思科精密数控有限公司 一种旋铆机盘式自动上卸料及定位装置的操作方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53140695A (en) * 1977-05-13 1978-12-07 Masaharu Nishihara Ontinuous injection needle grinding machine
JP2540041B2 (ja) * 1986-06-10 1996-10-02 株式会社 デイスコ 切断機
JPH0818205B2 (ja) * 1992-05-07 1996-02-28 敏益 江口 工作機械
JPH0839386A (ja) * 1994-07-30 1996-02-13 Murata Mach Ltd ローダ
JP3647757B2 (ja) * 2001-02-16 2005-05-18 オリジン電気株式会社 光ディスク製造装置及び製造方法
JP2003320296A (ja) * 2002-04-25 2003-11-11 Kasai Kogyo Co Ltd ロータリー式治具テーブル装置
JP4705765B2 (ja) 2004-07-21 2011-06-22 中村留精密工業株式会社 円板ワークのローダハンド

Also Published As

Publication number Publication date
KR20080041094A (ko) 2008-05-09
JP2008114342A (ja) 2008-05-22
CN100522469C (zh) 2009-08-05
KR100951494B1 (ko) 2010-04-07
TW200822109A (en) 2008-05-16
CN101176976A (zh) 2008-05-14

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees